The invention relates to the field of micro-electromechanical systems (MEMS) for electrical switching, and in particular to a piezoelectrically actuated liquid metal relay.
Liquid metals, such as mercury, have been used in electrical switches to provide an electrical path between two conductors. An example is a mercury thermostat switch, in which a bimetal strip coil reacts to temperature and alters the angle of an elongated cavity containing mercury. The mercury in the cavity forms a single droplet due to high surface tension. Gravity moves the mercury droplet to the end of the cavity containing electrical contacts or to the other end, depending upon the angle of the cavity. In a manual liquid metal switch, a permanent magnet is used to move a mercury droplet in a cavity.
Liquid metal is also used in relays. A liquid metal droplet can be moved by a variety of techniques, including electrostatic forces, variable geometry due to thermal expansion/contraction and magneto-hydrodynamic forces.
Rapid switching of high currents is used in a large variety of devices, but provides a problem for solid-contact based relays because of arcing when current flow is disrupted. The arcing causes damage to the contacts and degrades their conductivity due to pitting of the electrode surfaces.
Conventional piezoelectric relays either do not latch or use residual charges in the piezoelectric material to latch or else activate a switch that uses a latching mechanism.
Micro-switches have been developed that use liquid metal as the switching element and the expansion of a gas when heated to move the liquid metal and actuate the switching function. Liquid metal has some advantages over other micro-machined technologies, such as the ability to switch relatively high powers (about 100 mW) using metal-to-metal contacts without micro-welding or overheating the switch mechanism. However, the use of heated gas has several disadvantages. It requires a relatively large amount of energy to change the state of the switch, and the heat generated by switching must be dissipated effectively if the switching duty cycle is high. In addition, the actuation rate is relatively slow, the maximum rate being limited to a few hundred Hertz.
An electrical relay array is disclosed that uses a conducting liquid in the switching mechanism. The relay uses a piezoelectric element to move an electrically conducting, wettable switch finger into contact with conducting liquid drops supported by two fixed electrical contacts. The conducting liquid wets between the fixed electrical contacts and the switch finger to form an electrical circuit. Surface tension in the liquid maintains the circuit and provides a latching mechanism. The switch finger is retracted to break the surface tension bond and open the circuit. The relay array is amenable to manufacture by micro-machining techniques.
The novel features believed characteristic of the invention are set forth in the claims. The invention itself, however, as well as the preferred mode of use, and further objects and advantages thereof, will best be understood by reference to the following detailed description of an illustrative embodiment when read in conjunction with the accompanying drawing(s), wherein:
While this invention is susceptible of embodiment in many different forms, there is shown in the drawings and will herein be described in detail one or more specific embodiments, with the understanding that the present disclosure is to be considered as exemplary of the principles of the invention and not intended to limit the invention to the specific embodiments shown and described. In the description below, like reference numerals are used to describe the same, similar or corresponding parts in the several views of the drawings.
The present invention relates to an electrical relay in which the formation of a conducting liquid bridge between two fixed contacts is facilitated by action of a conducting, wettable finger. The conducting liquid may be a liquid metal, such as mercury or a gallium alloy. The finger is attached to one end of a beam, the other end of the beam is fixed to the substrate of the relay. The beam and the attached finger are moved by the action of one or more piezoelectric elements acting on the beam. The piezoelectric elements may operated to bend or deflect the beam.
In order to open the switch, the wettable switch finger is moved farther away from the electrical contacts. This is shown in
A side view of the circuit substrate is shown in FIG. 11. The electrical contacts 118 and 120 are fixed to non-wettable pads 122 and 124, respectively, which are in turn fixed to the substrate 106. The electrical contacts 118 and 120 are electrically coupled to connectors 108 on the external surface of the substrate. Alternatively, the electrical connectors may be connected, via traces on the top of the substrate, to connectors on the edge of the substrate. The electrical pads 128 provide electrical connections to the piezoelectric elements and are electrically coupled to the connectors 110 on the external surface of the substrate.
In order to open the switch, the wettable switch finger is moved farther away from the electrical contacts. This is shown in
While the invention has been described in conjunction with specific embodiments, it is evident that many alternatives, modifications, permutations and variations will become apparent to those of ordinary skill in the art in light of the foregoing description. Accordingly, the present invention is intended to embrace all such alternatives, modifications and variations as fall within the scope of the appended claims.
This application is related to the following co-pending U.S. patent applications, being identified by the below enumerated identifiers and arranged in alphanumerical order, which have the same ownership as the present application and to that extent are related to the present application and which are hereby incorporated by reference: Application 10010448-1, titled “Piezoelectrically Actuated Liquid Metal Switch”, filed May 2, 2002 and identified by Ser. No. 10/137,691; Application 10010529-1, “Bending Mode Latching Relay”, and having the same filing date as the present application; Application 10010531-1, “High Frequency Bending Mode Latching Relay”, and having the same filing date as the present application; Application 10010570-1, titled “Piezoelectrically Actuated Liquid Metal Switch”, filed May 2, 2002 and identified by Ser. No. 10/142,076; Application 10010571-1, “High-frequency, Liquid Metal, Latching Relay with Face Contact”, and having the same filing date as the present application; Application 10010572-1, “Liquid Metal, Latching Relay with Face Contact”, and having the same filing date as the present application; Application 10010573-1, “Insertion Type Liquid Metal Latching Relay”, and having the same filing date as the present application; Application 10010617-1, “High-frequency, Liquid Metal, Latching Relay Array”, and having the same filing date as the present application; Application 10010618-1, “Insertion Type Liquid Metal Latching Relay Array”, and having the same filing date as the present application; Application 10010634-1, “Liquid Metal Optical Relay”, and having the same filing date as the present application; Application 10010640-1, titled “A Longitudinal Piezoelectric Optical Latching Relay”, filed Oct. 31, 2001 and identified by Ser. No. 09/999,590; Application 10010643-1, “Shear Mode Liquid Metal Switch”, and having the same filing date as the present application; Application 10010644-1, “Bending Mode Liquid Metal Switch”, and having the same filing date as the present application; Application 10010656-1, titled “A Longitudinal Mode Optical Latching Relay”, and having the same filing date as the present application; Application 10010663-1, “Method and Structure for a Pusher-Mode Piezoelectrically Actuated Liquid Metal Switch”, and having the same filing date as the present application; Application 10010664-1, “Method and Structure for a Pusher-Mode Piezoelectrically Actuated Liquid Metal Optical Switch”, and having the same filing date as the present application; Application 10010790-1, titled “Switch and Production Thereof”, filed Dec. 12, 2002 and identified by Ser. No. 10/317,597; Application 10011055-1, “High Frequency Latching Relay with Bending Switch Bar”, and having the same filing date as the present application; Application 10011056-1, “Latching Relay with Switch Bar”, and having the same filing date as the present application; Application 10011064-1, “High Frequency Push-mode Latching Relay”, and having the same filing date as the present application; Application 10011065-1, “Push-mode Latching Relay”, and having the same filing date as the present application; Application 10011121-1, “Closed Loop Piezoelectric Pump”, and having the same filing date as the present application; Application 10011329-1, titled “Solid Slug Longitudinal Piezoelectric Latching Relay”, filed May 2, 2002 and identified by Ser. No. 10/137,692; Application 10011344-1, “Method and Structure for a Slug Pusher-Mode Piezoelectrically Actuated Liquid Metal Switch”, and having the same filing date as the present application; Application 10011345-1, “Method and Structure for a Slug Assisted Longitudinal Piezoelectrically Actuated Liquid Metal Optical Switch”, and having the same filing date as the present application; Application 10011397-1, “Method and Structure for a Slug Assisted Pusher-Mode Piezoelectrically Actuated Liquid Metal Optical Switch”, and having the same filing date as the present application; Application 10011398-1, “Polymeric Liquid Metal Switch”, and having the same filing date as the present application; Application 10011410-1, “Polymeric Liquid Metal Optical Switch”, and having the same filing date as the present application; Application 10011436-1, “Longitudinal Electromagnetic Latching Optical Relay”, and having the same filing date as the present application; Application 10011437-1, “Longitudinal Electromagnetic Latching Relay”, and having the same filing date as the present application; Application 10011458-1, “Damped Longitudinal Mode Optical Latching Relay”, and having the same filing date as the present application; Application 10011459-1, “Damped Longitudinal Mode Latching Relay”, and having the same filing date as the present application; Application 10020013-1, titled “Switch and Method for Producing the Same”, filed Dec. 12, 2002 and identified by Ser. No. 10/317,963; Application 10020027-1, titled “Piezoelectric Optical Relay”, filed Mar. 28, 2002 and identified by Ser. No. 10/109,309; Application 10020071-1, titled “Electrically Isolated Liquid Metal Micro-Switches for Integrally Shielded Microcircuits”, filed Oct. 8, 2002 and identified by Ser. No. 10/266,872; Application 10020073-1, titled “Piezoelectric Optical Demultiplexing Switch”, filed Apr. 10, 2002 and identified by Ser. No. 10/119,503; Application 10020162-1, titled “Volume Adjustment Apparatus and Method for Use”, filed Dec. 12, 2002 and identified by Ser. No. 10/317,293; Application 10020241-1, “Method and Apparatus for Maintaining a Liquid Metal Switch in a Ready-to-Switch Condition”, and having the same filing date as the present application; Application 10020242-1, titled “A Longitudinal Mode Solid Slug Optical Latching Relay”, and having the same filing date as the present application; Application 10020473-1, titled “Reflecting Wedge Optical Wavelength Multiplexer/Demultiplexer”, and having the same filing date as the present application; Application 10020540-1, “Method and Structure for a Solid Slug Caterpillar Piezoelectric Relay”, and having the same filing date as the present application; Application 10020541-1, titled “Method and Structure for a Solid Slug Caterpillar Piezoelectric Optical Relay”, and having the same filing date as the present application; Application 10030438-1, “Inserting-finger Liquid Metal Relay”, and having the same filing date as the present application; Application 10030521-1, “Pressure Actuated Optical Latching Relay”, and having the same filing date as the present application; Application 10030522-1, “Pressure Actuated Solid Slug Optical Latching Relay”, and having the same filing date as the present application; and Application 10030546-1, “Method and Structure for a Slug Caterpillar Piezoelectric Reflective Optical Relay”, and having the same filing date as the present application.
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