| Number | Name | Date | Kind |
|---|---|---|---|
| 4099208 | Tasaku et al. | Jul 1978 | |
| 4283777 | Curry et al. | Aug 1981 | |
| 4502762 | Anderson | Mar 1985 | |
| 4667316 | Suda et al. | May 1987 | |
| 4870452 | Tanimoto et al. | Sep 1989 | |
| 4952815 | Nishi | Aug 1990 |
| Number | Date | Country |
|---|---|---|
| 2-304515 | Dec 1990 | JPX |
| Entry |
|---|
| IBM Technical Disclosure Bulletin, vol. 30, No. 8, Jan. 1988, entitled "Focusing Method For Projection Exposure Systems". |