Claims
- 1. An X-ray generation apparatus having an anticathode comprising:
- a high thermal conductivity diamond substrate;
- said diamond substrate having a hole penetrating said diamond substrate filled with target material;
- said target material forming a target for generating X-rays by irradiation of electrons;
- said target penetrating said diamond substrate; and
- said diamond substrate is synthesized using a gaseous phase method.
- 2. The X-ray generation apparatus according to claim 1, wherein said diamond substrate has at least one pathway surrounding said target to pass a coolant in said diamond substrate.
- 3. The X-ray generation apparatus according to claim 1, wherein said target is made from a metal selected from a group consisting of Mo, W, Cu, Ag, Ni, Co, Cr, Fe, Ti, and Rh or an alloy thereof.
- 4. The X-ray generation apparatus according to claim 1, further comprising:
- a metal film or an electric conductive diamond layer formed on a back surface of said anticathode.
- 5. The X-ray generation apparatus according to claim 1, wherein the electrical resistance of said diamond substrate is not more than 10.sup.3 .OMEGA..multidot.cm.
- 6. The X-ray generation apparatus according to claim 1, wherein said diamond substrate is a disk and the target is located at the center of said substrate.
- 7. The X-ray generation apparatus according to claim 2, wherein said high thermal conductivity diamond substrate is arranged in a holder.
- 8. The X-ray generation apparatus according to claim 1, wherein said hole is circular.
- 9. The X-ray generation apparatus according to claim 1, wherein said target penetrates said diamond in a direction that coincides with the direction of an electron beam.
- 10. The X-ray generation apparatus according to claim 2, further comprising
- a supporting material for mounting said diamond substrate; and
- said diamond substrate having a groove defined therein adjacent said supporting material forming said at least one pathway therebetween;
- wherein said groove has a width (a), a distance between two portions of said groove (b), and a depth of said groove (c), wherein a ratio of a/b is from 0.02 to 50, and wherein a ratio of a/c is from 0.05 to 100, and said distance b is 20 .mu.m to 10 mm.
- 11. The X-ray generation apparatus according to claim 10, wherein
- said ratio of a/b is from 0.04 to 25, and wherein said ratio of a/c is from 0.1 to 50, and said distance b is 40 .mu.m to 2 mm.
- 12. The X-ray generation apparatus according to claim 10, wherein
- a cross section of said groove is rectangular, semicircular or semielliptical.
- 13. The X-ray generation apparatus according to claim 10, wherein
- a ratio of a surface of said groove to a front surface of said substrate is from 2-90%.
- 14. The X-ray generation apparatus according to claim 10, wherein
- a ratio of a surface of said groove to a front surface of said substrate is from 10-80%.
- 15. The X-ray generation apparatus according to claim 10 further comprising
- a non-diamond carbon layer on said diamond substrate located on the surface of said groove having a thickness of 1 nm to 1 .mu.m.
- 16. A method of making an anticathode as defined in claim 1 having an interior tube comprising
- shaping said high thermal conductivity diamond substrate into a desired shape,
- collecting a laser beam at a side of said high thermal conductivity diamond substrate,
- forming a tube in the interior of said high thermal conductivity diamond substrate with said collected laser beam to form a pathway for flowing coolant.
- 17. A method of making the anticathode as defined in claim 1 having an interior tube comprising
- etching a groove in said high thermal conductivity diamond substrate,
- adhering said high thermal conductivity diamond substrate as a first high heat conductive material to a second high heat conductive material to form an adhered high thermal conductivity diamond substrate and second high heat conductive material,
- wherein said high thermal conductivity diamond and said second high heat conductive material define an interior tube there between,
- shaping said adhered high thermal conductivity diamond substrate and said second high heat conductive materials.
- 18. The method of making the anticathode having the interior tube according to claim 17 further comprising
- forming an exit and an entrance on said high heat conductive material.
- 19. The method of making the anticathode having the interior tube according to claim 17 further comprising
- etching a groove in said second high heat conductive material before said adhering step.
- 20. The method of making the anticathode having the interior tube as defined in claim 17
- wherein said second high heat conducting material is a member selected from the group consisting of B, Be, Al, Cu, Si, Ag, Ti, Fe, Ni, Mo, W, and alloys of said elements.
- 21. A method of making the anticathode as defined in claim 1 having a groove comprising
- masking a substrate with a mask corresponding to a desired groove to form a masked substrate;
- synthesizing said high thermal conductivity diamond substrate on said masked substrate;
- removing said masked substrate to form said high thermal conductivity diamond substrate having a groove.
- 22. The method of making the anticathode as defined in claim 1 having an interior tube comprising
- synthesizing a first layer of said diamond substrate on a base having a projection corresponding to a groove to form said diamond substrate having a groove on said base;
- subsequently removing said base;
- masking said diamond substrate having a groove to form a mask on said diamond substrate to obtain a masked diamond substrate;
- synthesizing a second layer of a diamond on said masked diamond substrate having a groove;
- removing said mask; and
- thereby forming a tube in between said first layer of said diamond substrate and said second layer of said diamond.
- 23. A method for X-ray generation comprising
- irradiating said anticathode having a target as defined in claim 1 with electrons;
- cooling said target;
- emitting X-rays from said target.
Priority Claims (2)
Number |
Date |
Country |
Kind |
218074 |
Aug 1994 |
JPX |
|
148081 |
May 1995 |
JPX |
|
Parent Case Info
This application is a continuation-in-part application of application Ser. No. 08/515,096, filed Aug. 14, 1995, which is now U.S. Pat. No. 5,657,365 relied on and incorporated herein by reference.
US Referenced Citations (4)
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Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
515096 |
Aug 1995 |
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