Patent Grant
10170271
The present invention relates to an X-ray generator having as anode that is equipped with a plurality of X-ray generation zones. The invention also relates to an X-ray analyzer that employs the X-ray generator.
In X-ray analyzers, i.e., X-ray diffractometers, fluorescent X-ray devices, small-angle X-ray scattering devices, and the like, X-rays generated from an X-ray generator irradiate a specimen targeted for analysis. In a typical X-ray generator, electrons generated from a cathode are made to collide against the surface of an anode, thereby generating X-rays from the surface of the anode. The region where the electrons collide, i.e., the region where X-rays are generated, is typically called the X-ray focal point.
The wavelength of the X-rays generated from the anode is determined by the material of the region that corresponds to the X-ray focal point in the anode. Known materials for anodes include Cu (copper), Mo (molybdenum), Cr (chromium), Co (cobalt), and the like. The material of the anode, is selected, as appropriate, according to the type of analysis that is to he carried out. For example, in a case in which structural analysis of a protein is to be carried out by an X-ray diffractometer, a plurality of materials selected from the above plurality of mate would be employed.
Conventionally, according to Patent Literature 1, there is disclosed in
In this conventional device, a gap is formed by means of two wall surfaces, namely, a wall surface of a casing that houses the anode and a wall surface of a protruding member that extends from the casing, and within this gap is arranged a flange that extends from the anode housing. The components are then arranged so that the cathode and one of the X-ray generation zones are facing when the flange of the anode housing has abutted the wall surfaces, and the cathode and another one of the X-ray generation zones are facing when the flange of the anode housing has abutted the wall surface of the protruding member.
That is, in the X-ray generator of Patent Literature 1, two X-ray generation zones are respectively arranged at positions facing the cathode, while using the wall surface of the casing and the wall surface of protruding member as stoppers. However, with this method, there is a problem in that for an anode equipped with three or more X-ray generation zones, any one of the X-ray generation zones thereof cannot be stationed at a position facing the cathode.
According to
Patent Literature 1: Japanese Unexamined Patent Application Publication No. 2008-269933
However in the position adjustment method for the anode X-ray generation zones disclosed in Patent Literature 1, the check screw is threaded in manually, and therefore there was a problem in that it is not possible to automate the task of selecting one of a plurality of X-ray generation zones and arranging the zone at a position facing the cathode, and the process cannot be carried out with high accuracy.
The present invention was contrived in view of the aforementioned problems of the prior art devices, and has as an object to provide an X-ray generator and an X-ray analyzer with which one of three or more X-ray generation zones provided on an anode can be stationed at a prescribed position facing the cathode, and by which the operation can be carried out automatically and with high accuracy.
The X-ray generator according to the present invention is an X-ray generator comprising: a cathode for generating electrons; an anode provided facing the cathode, and equipped with a plurality of X-ray generation zones which are lined up adjacently to one another; a casing fox housing the cathode and the anode in the interior thereof, and integrated with the cathode; an anode support body for supporting the anode; driving means for driving the anode support body in such a way that the anode support body and the casing undergo relative advancing and retreating movement; and stopper means for stopping motion of the anode support body when the anode support body and the casing move in a direction of approaching one another. The stopper means comprising: a mobile platform equipped with a section that enters and exits from between the anode support body and the casing; a mobile platform drive means for driving the mobile platform; and a plurality of stop members of mutually different heights provided in the entering and exiting section of the mobile platform.
According to this X-ray generator, the plurality of stop members of different heights are moved by a mobile platform drive means such as a motor, whereby the positions of a plurality of X-ray generation zones of the anode are changed, and therefore setting of the position of the X-ray generation zones can be accomplished automatically rather than manually.
Further, conventionally, the distal end surface of a check bolt was employed as a stopper in order to adjust the positions of three or more X-ray generation zones, and the position of the distal end of the check bolt was changed by varying the amount of threading of the check bolt, With this method, the position of the X-ray generation zones could not be adjusted finely or with high accuracy.
By contrast, according to the present embodiment, any one of the plurality of stop members of different heights is selectively interposed between the anode support body and the casing, whereby the anode which is supported by the anode support body and the cathode which is supported by the casing are adjusted in their relative positions, and therefore the relative positions of the cathode and the X-ray generation zones on the anode can be positioned finely and with high accuracy.
the X-ray generator according to the present invention, the mobile platform may be provided in such a way as to be able to move in a direction closer towards or away from the casing, in a state in which at least one of the plurality of stop members is placed between the anode support body and the casing. With this configuration, unwanted load bearing on the mobile platform which supports the stop members can be prevented.
In the aforementioned configuration, the stop members may be urged by elastic members (e.g., compression springs). With this configuration, the stop members which are moveably provided on the mobile platform can be kept always arranged at a given position in a natural state by means of the elastic force of the elastic members.
In the aforementioned configuration, the stop members may have lengths that are greater than the thickness of the mobile platform, the stop members may be provided to pass through the mobile platform, and the stop members may be configured such that one end thereof is capable of abutting against either the casing or the anode support body, and the other end of the stop member is capable of abutting against the other of the casing or the anode support body.
In the X-ray generator of the present invention, the mobile platform may be a rotating plate, the plurality of entering and exiting sections may peripheral sections of the rotating plate, and the plurality of stop members may be provided at different positions of the peripheral sections of the rotating plate. With this configuration, the stopper means of the present invention can be this configuration, the stopper means of the present invention can be realized in a simple fashion.
In the aforementioned X-ray generator having a rotating plate as the mobile platform, the mobile platform moving means can be a motor, the motor may be one having a main body section, and an output shaft that extends to the outside from the interior of the main body section, the rotating plate may be attached to the output shaft, and the main body section of the motor may be secured to the anode support body or to the casing.
In the X-ray generator of the present invention, a plurality of the stopper means may be provided on the anode support body or on the casing. In so doing, positioning of the anode can be carried out with high accuracy.
The X-ray generator of the present invention employing the plurality of stopper means may have a seal member for airtightly partitioning a space between the anode support body and the casing. In this X-ray generator, the plurality of stopper means may be arranged point-symmetrically with respect to the center axis of the seal member within a plane orthogonal to the center axis, or line-symmetrically with respect to a line that passes through the center axis. In so doing, the accuracy of positioning of the anode can be further enhanced.
In the X-ray generator of the present invention which employs a plurality of the stopper means, the stopper means may be arranged at mutually equidistant spacing with respect to the center axis of the seal member, and at mutually equiangular spacing about the center axis. In so doing, the accuracy of positioning of the anode can be further enhanced.
In the X-ray generator of the present invention, the space between the anode support body and the casing may be airtightly partitioned by a bellows. That is, the seal member may be formed by the bellows. The stopper means may be provided outside the bellows. With this configuration, the X-ray generator can be easily manufactured.
In the X-ray generator according to the present invention, the anode support body may have an anode housing that supports the anode and extends to the outside of the anode, and a support plate that is secured to the anode housing and extends in a direction traversing the direction of extension of the anode housing. The drive means and the stopper means may be arranged on the support plate. With this configuration, a structure for supporting the anode can be formed in a simple manner, and the X-ray generator, including the drive means and the stopper means, can be kept compact.
Next, the X-ray analyzer of the present invention is an X-ray analyzer comprising an X-ray generator of the configuration disclosed above, and an X-ray optical system employing X-rays generated by the X-ray generator. The X-ray optical system may be, for example, an optical system comprising a combination of a divergence slit, scattering slit, receiving slit, an X-ray detector 13, and the like. Elements besides these X-ray optical elements may be included in the X-ray optical system as well.
According to the X-ray generator of the present invention, the plurality of stop members of different heights are moved by the mobile platform moving means, which is a motor or the like, whereby one of the plurality of stop members can be selected, for use. As a result, positioning of the X-ray generation zones can foe carried out automatically, not manually.
Moreover, conventionally, the distal end surface of a check bolt was employed as a stopper in order to adjust the positions of three or more X-ray generation zones, and the position of the distal end surface of the check bolt was changed by varying the amount of threading of the check bolt. With this method, the position of the X-ray generation zones could not be adjusted automatically/with high accuracy.
By contrast, according to the X-ray generator of the present invention, any one of the plurality of stop members of different heights is interposed between the anode support body and the casing, whereby a plurality of X-ray generation zones located at a multitude of different positions on the anode can be positions finely and with high accuracy, with respect to the cathode.
The X-ray generator and the X-ray analyzer according to the present invention shall be described below on the basis of embodiments. The present invention is not limited to these embodiments, as shall he apparent. In the drawings appended to the present description, constituent elements are in some instances depicted at a scale different from the actual one, in order to facilitate understanding of characteristic features.
(X-Ray Diffractometer)
The θ-rotation platform 4 is rotatable about its own center axis ω. The center axis ω extends in a direction passing through the page on
A specimen holder 10 is detachably installed on the θ-rotation platform 4, and the specimen S being measured is accommodated within the specimen holder 10. For example, the specimen S may be packed into a recessed portion or through-opening provided to the specimen holder 10. On the detector arm 6 are provided a scattering slit 11, a receiving slit 12, and a two-dimensional X-ray detector 13 by way of an X-ray detection means. The scattering slit 11 prevents scattered rays which are unwanted for the purposes of analysis from, entering the X-ray detector 13. The receiving slit 12 passes secondary X-rays, e.g., diffracted X-rays, exiting from the specimen S, while blocking other unwanted X-rays.
The two-dimensional X-ray detector 13 has a two-dimensional sensor 14. The two-dimensional sensor 14 is an X-ray sensor that has a position resolution function in a two-dimensional area (i.e., within a plane). A position resolution function is a function for detecting X-ray intensity on a per-position basis. This two-dimensional sensor 14 is an X-ray detector having, for example, a plurality of photon-counting type pixels arranged two-dimensionally (i.e., in planar fashion). The sensor has the function of outputting electrical signals of magnitude that corresponds to the intensity of X-rays received by the individual photon-counting type pixels. Therefore, the two-dimensional sensor 14 is designed to simultaneously receive in planar fashion X-rays from a plurality of pixels, and independently output electrical signals from each of the pixels.
The two-dimensional sensor 14 could also be configured from a two-dimensional charge coupled device (CCD) sensor. A two-dimensional CCD sensor is a two-dimensional sensor in which individual pixels for receiving X-rays are formed by CCDs.
Depending on the type of measurement being performed, a one-dimensional X-ray detector could be used in place of the two-dimensional X-ray detector 13. A one-dimensional X-ray detector is an X-ray detector that has a position resolution function within a one-dimensional area (i.e., within a linear area). The one-dimensional X-ray detector may be, for example, a position sensitive proportional counter (PSPC), an X-ray detector that employs a one-dimensional CCD sensor an X-ray detector in which a plurality of photon-counting type pixels are arranged one-dimensionally, or the like.
Depending on the type of measurement being performed, a 0(zero) dimensional X-ray detector may be used instead of a two-dimensional X-ray detector. A 0 (aero) dimensional X-ray detector is an X-ray detector that lacks a position resolution function relating to X-ray intensity. This 0 (zero) dimensional X-ray detector may be, for example, an X-ray detector that employs a proportional counter (PC), an X-ray detector that employs a scintillation counter (SC), or the like.
The X-ray generator 2 is arranged secured at a given position. This X-ray generator 2 has a cathode 16 that emits thermal electrons through electrical conduction, and a rotating anode 17 arranged facing the cathode 16. Electrons emitted from the cathode 16 collide at high speed with the outer peripheral surface of the rotating anode 17. The area in which the electrons collide is an X-ray focal point F, and X-rays are generated at this X-ray focal point. The planar shape of the X-ray focal point is, for example, 0.2 mm×2 mm. The X-rays R1 generated from the rotating anode 17, the divergence angle thereof having been regulated by the divergence slit 7, impinge on the specimen S.
The θ-rotation platform 4 rotates about the ω-axis while driven by a θ-rotation driving device 20. This rotation is intermittent rotation at prescribed step angles, or continuous rotation at a prescribed angular velocity. This rotation of the θ-rotation platform 4 is rotation that takes place in order to change the angle of incidence θ of X-rays on the specimen S, and is typically called θ-rotation.
The 2θ-rotation platform 5 rotates about the ω-axis while driven by a 2θ-rotation driving device 21. This rotation is typically called 2θ-rotation. This 2θ-rotation is rotation that takes place in such a way that when secondary X-rays (e.g. diffracted X-rays) R2 are generated from the specimen S at times when X-rays, are incident on the specimen S at an incident angle θ, the secondary X-rays can be received by the X-ray detector 13.
The θ-rotation driving device 20 and the 2θ-rotation driving device 21 may be configured with any rotation driving devices. Such a rotation device may be configured, for example, from a rotation power source and a power transmission device. The rotation power source may be configured, for example, with a controllable-rotation speed motor, e.g., a servo motor, or a stepping motor. The power transmission device may be configured, for example, with a worm secured to the output shaft of the rotation power source, and a worm wheel that meshes with the worm, and is secured to the center shaft of the θ-rotation platform 4 or to the center shaft of the 2θ-rotation platform 5.
When the θ-rotation platform. 4 and the specimen S installed thereon undergo θ-rotation, and the 2θ-rotation platform 5 and the X-ray detector 13 supported thereon undergo 2θ-rotation, the X-ray focal point F is arranged fixed on a goniometer circle Cg that is centered on the axis ω, while the X-ray collection point of the receiving silt 12 moves over the goniometer circle Cg. During θ-rotation of the specimen S and 2θ-rotation of the X-ray detector 13, the X-ray focal point F, the ω-axis, and the X-ray collection point of the receiving slit 12 are present on a focusing circle Cf. The goniometer circle Cg is a constant-radius hypothetical circle, and the focusing circle Cf is a hypothetical circle that changes in radius in association with changes of the θ angle and the 2θ angle.
In the present embodiment, the X-ray optical system is configured with the divergence slit 7, the specimen S, the scattering slit 11, the receiving slit 12, and the X-ray detector 13. If needed, the X-ray optical system may include other X-ray optical elements. Such X-ray optical elements could be, for example, a collimator, a solar slit, a monochromator, or the like.
The operation of the X-ray diffractometer 1 configured as described above will be described below.
First, if needed, the various X-ray optical elements present on the X-ray path leading from the X-ray focal point F to the X-ray detector 13 are correctly aligned in position on the X-ray optical axis. That is, optical axis adjustment is performed. Next, the X-ray incident angle θ with respect to the specimen S and the diffraction angle 2θ of the X-ray detector 13 are set so the desired initial positions (zero positions).
Next, by passing current through the cathode 16 to heat it, thermal, electrons are generated from the: cathode 16. These electrons, while being restricted in the direction of advance by an electric field that is usually applied by a Wehnelt (not illustrated), collide at high speed against the surface of the rotating anode 17 and form the X-ray focal point F. X-rays of wavelength that is dependent on the material of the rotating anode 17 are then emitted from the X-ray focal point F. The current that flows to the rotating anode 17 from the cathode 16 due to electrical conduction to the cathode 16 is typically called tube current. In order to accelerate the electrons that are emitted from the cathode 16 and collide with the rotating anode 17, a prescribed large voltage is applied across the cathode 16 and the rotating anode 17. This voltage is typically called tube voltage. In the present embodiment, the tube voltage and the tube current are respectively set to 30-60 kV and 10-120 mA. The rotating anode material will be discussed below.
The X-rays R1 that are emitted and diverge from the X-ray generator 2 include continuous X-rays that include X-rays of various wavelengths, and characteristic X-rays of specific wavelength. In cases in which it is desired to select desired characteristic X-rays from among these X-rays, an incidence-side monochromator (an “incident monochromator”) is provided on the X-ray optical path leading from the X-ray generator 2 to the specimen S. The X-rays R1, divergence of which is regulated by the divergence slit 7, irradiate the specimen S. During intervals in which the specimen is undergoing θ-rotation .and the X-ray detector 13 is undergoing 2θ-rotation, when the X-rays R1 incident on the specimen S meet a prescribed rotation condition, with respect to the crystal, lattice planes inside the specimen, specifically, an angular state that satisfies the Bragg's diffraction angle, secondary X-rays, e.g., diffracted rays R2, are generated at a diffraction angle of 2θ from the specimen S. These diffracted rays R2 pass through the scattering slit 11 and the receiving slit 12 to be scattering slit 11 and the receiving slit 12 to be received by the X-ray detector 13. The X-ray detector 13 outputs a signal that is dependent on the count of X-rays received at individual pixels of the X-ray detector 13, and X-ray intensity is calculated on the basis of this output signal.
The aforedescribed X-ray intensity calculation process is carried out on each angle among the incident X-ray angles θ and the diffraction angles 2θ, as a result of which there is derived an X-ray intensity I (2θ) at each angular position of the diffraction angle 2θ. By plotting the X-ray intensity I (2θ) on plane coordinates where the diffraction angle 2θ is the horizontal axis and the X-ray intensity I is the vertical axis, an X-ray diffraction diagram of known type is derived. By then observing the generated, intensity (I) and the angle (2θ) at which the X-ray intensity peak waveform appearing on the X-ray diffraction diagram is generated, the internal structure of the specimen S can be analyzed.
(X-ray Generator)
The X-ray generator 2 will be described in detail below.
In the present embodiment, a welded bellows is employed as the bellows 36. The welded bellows has an accordion shape in which the outer peripheries and inner peripheries of a plurality of thin ring-shaped metal plates are joined together by welding. The bellows 36 is round in shape when viewed in the direction of arrow A, and cylindrical in shape overall. On the outer peripheral surface of the rotating anode 17 are provided a plurality (in the present embodiment, five) X-ray generation zones 21A, 27B, 27C, 27D, 27E, which are lined up adjacently to one another. The center axis X1 of the cylindrical shape of the bellows 36 extends in the direction in which the X-ray generation zones 27A to 27E are lined up (the vertical direction in
One end of the bellows 36 (e.g., the end at the top side in
For the planar shape and thickness of the first flange 36a and the second flange 36b, there can be adopted any shape besides the illustrated shapes, as needed. In some instances, the bellows 36 can be formed by a molded bellows instead of a welded bellows, or by a bellows of some other configuration. Molded bellows are bellows that have been formed by a molding process, instead of welding.
In
An X-ray window 28 for extraction of the X-rays R1 generated by the rotating anode 17 is provided in a section of the base 29 of the casing 25. The X-ray window 28 is formed from a material through which X-rays can pass, for example, beryllium (Be).
The rotating anode unit 24 has an anode housing 26 that supports the rotating anode 17 and extends to the outside of the rotating anode 17. The anode housing 26 rotatably supports the rotating anode 17 about the axis X0 as shown by arrow D. The base 29 and the anode housing 26 are formed, for example, from copper or copper alloy. The anode housing 26 is formed to cylindrical shape as viewed from the direction of arrow A. The base 29 is formed to cylindrical shape as viewed from the direction of arrow A. The base 29 may be a cornered tube shape as well.
The rotating anode 17 is formed by disposing in a row arrangement a plurality of types (in the present embodiment, five types) of X-ray generation cones 27A, 27B, 27C, 27D, 27E on the outer peripheral surface of a base member formed from a material having high thermal conductivity (e.g., copper (Cu) or a copper alloy). The rotating anode 17 has a cup shape whose top is a closed plane as shown in
The materials Mo, Cr, and Co are formed on a Cu base member, for example, by ion plating, plating, shrink fitting, or other appropriate film, forming method. The widths of the X-ray generation zones 27A, 27B, 27C, 27D, 27E in the axial direction are set to mutually equal lengths. Specifically, where the dimensions of the X-ray focal spot F are 0.2 mm×2 mm, the widths of the X-ray generation zones 27A, 27B, 27C, 27D, 27E in the axial direction are set to about 3 mm.
The anode housing 26 is formed to generally cylindrical
shape centered on the axis X0. As shown in
The magnetic seal device 38 is a shaft seal device for maintaining a pressure differential between the internal space H of the casing 25, which is in a high vacuum state, and the internal space of the anode housing 26, which communicates with atmospheric pressure. The magnetic seal device 38 has a magnetic fluid deposited on the outer peripheral surface of the rotating shaft 30 by magnetic force. Due to this magnetic fluid, a high vacuum is maintained to one side of the magnetic seal device 38, and atmospheric pressure to the other side. Because the magnetic fluid does not exert significant torque on the rotating shaft 30, the magnetic seal device 38 does not hamper rotation of the rotating shaft 30.
The water passage 31 connects to a water supply port 46 and a water discharge port 47 which are provided at the back end of the anode housing 26 (the left end in
The internal structure of the rotating anode unit 24 is generally as described above. More specifically, the internal structure of the rotating anode unit disclosed, for example, in Japanese Unexamined Patent Application Publication 2008-269933 can be adopted.
In
The exhaust device 34 can be configured, for example, as a combination of a rotary pump and a turbo molecular pump. The rotary pump is a pump that can reduce the pressure in the internal space H to a low vacuum. The turbo molecular pump is a pump that can further evacuate to a high vacuum state the atmosphere that has been reduced in pressure by the rotary pump. Through the action of this turbo molecular pump, the surrounding area of the rotating anode 17 and the cathode 16 can be placed under a high vacuums of 10−3 Pa or lower. Provided that the interior of the casing 25 can be placed in a high vacuum state, a combination of a high vacuum pump other than a turbo molecular pump and an auxiliary pump other than a rotary pump can be adopted.
In the present embodiment, the casing 25 is secured at an appropriate location of the X-ray diffractometer 1 of
By disposing the bellows 36 between the casing 25 and the anode housing 26 in
In
the side away from the anode 17 (the front side in
In
The dovetail tails 58 mate with the dovetail grooves of the dovetail groove members 59, The mating of the dovetail tails and the dovetail grooves involves mating in such a way that the parts are slidable in the lengthwise direction (i.e., capable of sliding movement), but are not able to release from the mated state in directions perpendicular to the lengthwise direction. The anode support body 32 which supports the anode 17 moves parallel to the casing 25 as shown by arrow E and arrow J while being guided by the linear guides 42a, 42b. Through this action of the linear guides 42a, 42b, the anode support body 32 is guided in such a way as to not experience lateral swaying or tilting. In so doing, the anode 17 can experience parallel movement without laterally swaying within the internal space H of the casing 25.
As shown in
The cylinder body 48 is provided with a first air connection port 51 and a second air connection port 52. These air connection ports are connected to an air supply source, not illustrated. When air is supplied to the first air connection port 51, the output rod 49 experiences extending motion. Due to this extending motion, the support plate 36b experiences parallel motion in a direction away from the casing 25 as shown by arrow E. When air is supplied to the second air connector port 52, the output rod 49 experiences contracting motion. Due to this contracting motion, the support place 36b experiences parallel motion in a direction towards the casing 25 as shown by arrow J. When the support plate 36b experiences parallel motion in the direction of arrow E or the direction of arrow J, the anode 17 which is integrated therewith experiences parallel motion in the same direction. Due to this parallel motion, of the anode 17, any one of the X-ray generation zones 21A, 21B, 27C, 27D, or 27E provided on the anode 17 can be selectively transported to a position facing the cathode 16.
An end of the spring cover 64 which is fitted into the through-hole 62 of the support plate 36b is open, and the end on the opposite side therefrom is closed. The spring cover 64 compresses the compression spring 63 by means of the closed end. The compression spring 63 imparts to the anode support body 32 spring force (i.e., elastic force) commensurate to the compressed length. In this way, the anode support body 32 is urged in the direction of arrow E (i.e., a direction away from the internal space H) by the compression spring 63.
In
The annular peripheral section of the rotating plate 68 (i.e., the section that enters and exits from between the casing 25 and the support plate 36b) is provided with a plurality of stop members 73a, 73b, 73c, 73d, 73e. In the present embodiment, the stop members number five.
Retaining rings 74 are attached at the distal ends (top ends in
The heights P1, P2, P3, P4, P5 of the stop members 73a, 73b, 73c, 73d, 73e, as measured from the surface on the casing 25 side of the rotating plate 68, differ from one another.
Specifically,
P1<P2<P3<P4<P5.
These differences in height correspond to the positions, in the direction of extension of the axis X0, of the individual X-ray generation zones 27A, 27B, 27C, 27D, 27E of
The state depicted in
Because the X-ray generator 2 of the present embodiment is configured in the above manner, in the event that, for example, the X-ray generation zone 27E in
Next, the compression spring 75 is compressed, and finally the distal end at the opposite side of the stop member 73e (the distal end at the top side in
There is no limitation to selecting the stop member 73e which corresponds to the X-ray generation zone 27E, and through appropriate selection of the stop member 73a-73e corresponding to the desired X-ray generation zone 27A-27E, the desired X-ray generation zone can be arranged correctly and accurately at the prescribed position. Moreover, by designing the stop members 73a-73e to be slidable with respect to the rotating plate 68, the rotating plate 68 and the output shaft 71 are not subjected to an axial load, a radial load, or a moment load, and positioning of the anode 17 among a multitude of positions can be accomplished with the compressive load of the stop members 73a-73e only.
Where the one X-ray generation zone 27E is facing the cathode 16 in
When it has become necessary to produce X-rays from an X-ray generation zone other than the X-ray generation gone 27E in order to change the conditions of X-ray analysis measurement, first, the air cylinder 41a and the air cylinder 41b are simultaneously made to undergo extending motion in
Next, the rotating plate 68 is rotated by the motor 69 in such a way that, from among the stop members 73a-73d of
When thermal electrons are emitted from the cathode 16 in this state, X-rays of wavelength corresponding to the metal of which the facing X-ray generation zone (any one of 27A, 27B, 27C, and 27D) is formed are emitted from that X-ray generation zone, and a portion thereof are extracted to the outside from the X-ray window 28 of
As shown in
In
Further, the four assist units 43a-43d are also provided at different positions within the surface 36c. The assist units 43a-43d are also provided at uniformity with respect to the center axis X1 of the bellows 36. Further, the four stopper devices 44a-44d are provided at different positions within this surface 36c. The stopper devices 44a-44d are provided at uniformity with respect to the center axis X1 of the bellows 36.
In the present description, “uniformity” of the plurality of members refers to a state of arrangement of the plurality of members in such, a way that when equal forces are applied to the members in the same direction, the point of application of the resultant force which is a force synthesized from, these forces is generally aligned with the center axis X1 of the bellows 36 serving as the seal member. Here, the term “generally” in the wording “generally aligned” is used in a sense that includes cases in which the point of application of the resultant force diverges from the center axis X1 by an extent such that the anode unit 24 supported by the anode support body 32 as shown in
Specifically, in
Additionally, when forces of equal magnitude are applied in the same direction to the two linear guides 42a and 42b, the point of application of the resultant force thereof is generally aligned with the center axis X1 of the bellows 36. More specifically, the linear guide 42a and the linear guide 42b have a point-symmetrical positional relationship in relation to the center axis X1 of the bellows 36. Also, within the surface 36c of the second flange 36b, the linear guide 42a and the linear guide 42b have a line-symmetrical relationship in relation to a line B-B passing through the center axis X1 of the bellows 36. Moreover, the linear guide 42a and the linear guide 42b are arranged equidistantly from the center axis X1 of the bellows 36, and at equal intervals of 180°.
The four assist units 43a-43d are arranged at the four corners of a hypothetical oblong L centered on the center axis X1. Therefore, when forces of equal magnitude are applied in the same direction to the assist units 43a-43d, the point of application of the resultant force thereof is generally aligned with the center axis X1 of the bellows 36. More specifically, the assist units 43a-43d hate a point-symmetrical positional relationship in reaction to the center axis X1 of the bellows 36. Also, within the surface 36c of the second flange 36b, the assist units 43a-43d have a line-symmetrical relationship in relation to the line B-B and the line C-C, respectively, which pass through the center axis X1 of the bellows 36.
Further, when forces of equal magnitude are applied in
the same direction to the four stopper devices 44a-44d, the point of application of the resultant force thereof is generally aligned with the center axis X1 of the bellows 36. More specifically, the stopper devices 44a-44d have a point-symmetrical positional relationship in relation to the center axis X1 of the bellows 36. Also, within the surface 36c of the second flange 36b, the stopper devices 44a-44d have a line-symmetrical relationship in relation to the line B-B and the line C-C, respectively, which pass through the center axis X1 of the bellows 36. The stopper devices 44a-44d are arranged equidistantly from the center axis X1 of the bellows 36, and at equal intervals of 180°.
As shown above, in the present embodiment, the plurality of air cylinders 41a, 41b, the plurality of linear guides 42a, 42b, the plurality of assist units 43a-43d, and the plurality of stopper devices 44a-44d are respectively arranged with uniformity in relation to the center axis X1 of the bellows 36, and therefore when the anode unit 24, driven by the air cylinders 41a, 41b, undergoes advancing and retracting motion with respect to the casing 25, the anode 17 experiences proper parallel motion with no lateral swaying or tilting. Consequently, the five X-ray generation zones 27A-27E in
In the present embodiment, the stop members 73a-73e of
By contrast, in the present embodiment, any one of the plurality of stop members 73a-73e of different heights can be selectively interposed between the anode support body 32 and the casing 25, so as to adjust the relative positions of the anode 17 supported by the anode support, body 32 and the cathode 16 supported by the casing 25, whereby the relative positions of the cathode 16 and the X-ray generation zones 27A-27E an the anode 17 can be adjusted with high accuracy.
(Other Embodiments)
While the present invention has been described above in terms of its presently preferred embodiment, the present invention is not limited to this embodiment, and various modifications are possible within the scope of the invention disclosed in the claims.
For example, in the aforedescribed embodiment, the rotating plate 68 was employed as the mobile platform as shown in
When working the present invention, it is not always necessary to employ guide means like the linear guides 42a, 42b shown in
The reason for forming a single X-ray generation zone from a plurality of different types of metals is so as to be able to generate X-rays of different wavelengths (i.e. different energies) from a single X-ray generation zone. Such an X-ray generation structure is disclosed by way of a striped target, for example, in Japanese latent Publication No. 5437180.
In the present embodiment, it is acceptable to employ three or more types of metals to form a single X-ray generation zone.
1. X-ray diffractometer (X-ray analyzer), 2. X-ray generator, 3. goniometer, 4. θ-rotation, platform, 5. 2θ-rotation platform, 6. detector arm, 7. divergence slit, 10. specimen holder, 11. scattering slit, 12. receiving slit, 13. two-dimensional X-ray detector ( X-ray detection means), 14. two-dimensional sensor, 16. cathode, 17. rotating anode, 20. θ-rotation driving device, 21.2θ-rotation driving device, 23. o-ring, 24. anode unit, 25. casing, 26. anode housing (anode support body), 27A, 27B, 27C, 27D, 27E. X-ray generation zones, 29. base, 30. rotating shaft, 31. water passage, 32. anode support body, 34. exhaust device, 35. flange, 36. bellows, 36a. first flange of bellows, 36b. second flange of bellows (support plate), 36C. surface of second flange, 38. magnetic seal device, 40. motor (rotation driving device), 41a, 41b. air cylinders (driving means), 42a, 42b. linear guides (guiding means), 43a, 44b, 44c, 44d. assist units (elastic force imparting means), 44a, 44b, 44c, 44d. stopper devices (stopper means), 46. water supply port, 47. water discharge port, 48. cylinder body, 49. output rod, 50. bolt, 51. first air connection port, 52. second air connection port, 55. dovetail tail units, 56. dovetail groove units, 57a, 57b. support column, 58. dovetail tail, 59. dovetail groove member, 62. through-hole, 63. compression spring, 64. spring cover, 68. rotating plate (mobile platform), 69. electric motor (mobile platform driving means), 70. motor body, 71. output shaft, 73a, 73b, 73c, 73d, 73e. stop members, 74. Retaining rings, 75. Compression springs (elastic members), F. X-ray focal point, H. internal space, P1-P5. height of stop member, Q. gap, R. region sandwiched by casing and support plate, Cf. focusing circle, Cg. goniometer circle, R1. X-rays, R2. diffracted X-rays, S. specimen, X0. center axis line of anode housing, X1. center axis line of support plate and bellows.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2014-186170 | Sep 2014 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2015/073165 | 8/18/2015 | WO | 00 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO2016/039091 | 3/17/2016 | WO | A |
| Number | Name | Date | Kind |
|---|---|---|---|
| 20050190887 | Kim | Sep 2005 | A1 |
| 20150170869 | Heid | Jun 2015 | A1 |
| 20150279608 | Miyaoka | Oct 2015 | A1 |
| 20160329185 | Miyaoka | Nov 2016 | A1 |
| Number | Date | Country |
|---|---|---|
| 44-23539 | Oct 1969 | JP |
| 3-043251 | Apr 1991 | JP |
| 2007-525807 | Sep 2007 | JP |
| 2008-269933 | Nov 2008 | JP |
| Entry |
|---|
| International Search Report (PCT/ISA/210) dated Nov. 17, 2015, by the Japan Patent Office as the International Searching Authority for International Application No. PCT/JP2015/073165. |
| Written Opinion (PCT/ISA/237) dated Nov. 17, 2015, by the Japan Patent Office as the International Searching Authority for International Application No. PCT/JP2015/073165. |
| Number | Date | Country | |
|---|---|---|---|
| 20170236678 A1 | Aug 2017 | US |
