Claims
- 1. An X-ray inspection system that examines an item under inspection located at an inspection region, the system comprising:
an X-ray source located at the inspection region that exposes the item under inspection to X-ray radiation, and that is constructed and arranged to be movable in any of a first dimension, a second dimension and a third dimension; an X-ray detector located at the inspection region that detects X-ray radiation as modified by the item under inspection, and that is constructed and arranged to be movable in the first dimension and the second dimension; a controller coupled to each of the X-ray source and the X-ray detector, that controls movement of the X-ray source and the X-ray detector in the first and second dimensions; and a processor coupled to the controller that is configured to receive detection information from the X-ray detector, to process the detection information, and to provide processed information; wherein the controller is also configured to control movement of the X-ray source and the X-ray detector independently of each other in any of collinear directions and different directions to provide a plurality of X-ray views of the item under inspection at varying examination angles of the X-ray radiation.
- 2. The X-ray inspection system as claimed in claim 1, wherein the controller is additionally configured to control movement of the X-ray source in the third dimension so as to provide varying levels of zoom of the processed information.
- 3. The X-ray inspection system as claimed in claim 1, further comprising an operator interface, coupled to the controller and the processor, that is configured to receive instructions from an operator input, to provide the instructions to the controller to control the movement of any of the X-ray source and the X-ray detector, and that is configured to receive and to present the processed information to an operator.
- 4. The X-ray inspection system as claimed in claim 1, wherein the processor is configured to process the plurality of X-ray views to create a tiled scout view of the item under inspection.
- 5. The X-ray inspection system as claimed in claim 4, wherein the processor is configured to create the tiled scout view of an entire item under inspection.
- 6. The X-ray inspection system as claimed in claim 4, wherein the processor is further configured to receive information about the item under inspection from a remote inspection device and to locate a region of interest in the item under inspection based on the information received.
- 7. The X-ray inspection system as claimed in claim 6, wherein the information about the item under inspection comprises an image, and the processor is further configured to compare at least two fiducial points in the image with at least two corresponding fiducial points in the tiled scout view and to align the image and the tiled scout view to locate the region of interest in the tiled scout view.
- 8. The X-ray inspection system as claimed in claim 6, wherein the controller is further configured to automatically position the X-ray source and the X-ray detector for a further inspection of the region of interest in the item under inspection, in response to the information received by the processor.
- 9. The X-ray inspection system as claimed in claim 8, further comprising an energy sensitive detector coupled to the processor, that detects X-ray radiation in a predetermined energy window that is scattered by the item under inspection, and wherein the processor performs a coherent scatter X-ray analysis of the item under inspection.
- 10. The X-ray inspection system as claimed in claim 1, further comprising a conveyor constructed and arranged to move the item under inspection in the first dimension to the inspection region, and wherein the controller is further configured to control movement of the conveyor in the first dimension.
- 11. The X-ray inspection system as claimed in claim 10, further comprising a linear actuator responsive to the controller and coupled to the conveyor, that moves the conveyor in the first dimension.
- 12. The X-ray inspection system as claimed in claim 1, wherein the X-ray source is constructed and arranged to expose the item under inspection with a cone-shaped beam of X-ray radiation.
- 13. The X-ray inspection system as claimed in claim 12, wherein the X-ray source has a focal spot size of less than approximately 100 μm, so as to provide a high resolution X-ray inspection system.
- 14. The X-ray inspection system as claimed in claim 1, wherein the X-ray detector comprises a two-dimensional amorphous silicon X-ray detector array.
- 15. The X-ray inspection system as claimed in claim 2, further comprising a plurality of linear actuators responsive to the controller and coupled to each of the X-ray source and the X-ray detector, that move the X-ray source in any of the first, second and third dimensions, and move the X-ray detector in any of the first and second dimensions.
- 16. The X-ray inspection system as claimed in claim 1, wherein the X-ray source comprises a dual-energy source that emits low energy X-ray radiation and high energy X-ray radiation.
- 17. The X-ray inspection system as claimed in claim 16, wherein the processor is configured to determine an effective atomic number of a material within the item under inspection, based on a measured attenuation through the material of the high energy X-ray radiation and a measured attenuation through the material of the low energy X-ray radiation.
- 18. The X-ray inspection system as claimed in claim 1, wherein the controller is further configured to repeatedly move the X-ray source and the X-ray detector in a predetermined manner so as to perform a Computed Laminography measurement of the item under inspection.
- 19. The X-ray system as claimed in claim 1, wherein the processor is coupled to a network and is configured to provide the processed information to a remote operator interface via the network.
- 20. The X-ray system as claimed in claim 19, wherein the network comprises any one of the Internet, a public telephone network and a local area network.
- 21. The X-ray system as claimed in claim 1, further comprising a device, responsive to the processor, that rotates the item under inspection to provide up to a 360 degree rotation of the item under inspection.
- 22. An X-ray inspection system, comprising:
an X-ray source located at an inspection region that exposes the item under inspection to X-ray radiation, and that is constructed and arranged to be movable in any of the first dimension, a second dimension and a third dimension; an X-ray detector located at the inspection region that detects X-ray radiation as modified by the item under inspection, and that is constructed and arranged to be movable in the first dimension and the second dimension; a controller coupled to each of the X-ray source and the X-ray detector, that controls movement of the X-ray source and the X-ray detector in the first and second dimensions; and a processor coupled to the controller that is configured to receive detection information from the X-ray detector, to process the detection information, and to provide processed information; wherein the controller is also configured to control movement of the X-ray source in the third dimension so as to provide varying levels of zoom of the processed information.
- 23. The X-ray system as claimed in claim 22, further comprising a conveyor constructed and arranged to move the item under inspection in the first dimension to the inspection region, and wherein the controller is also configured to control movement of the conveyor in the first dimension.
- 24. The X-ray system as claimed in claim 22, wherein the controller is additionally configured to control movement of the X-ray source and the X-ray detector independently of each other, in any of collinear directions and different directions, to provide a plurality of X-ray views of the item under inspection at varying examination angles of the X-ray radiation.
- 25. The X-ray system as claimed in claim 24, further comprising an operator interface, coupled to the controller and the processor, that is configured to receive instructions from an operator input, to provide the instructions to the controller to control the movement of any of the X-ray source and the X-ray detector, and that is configured to receive and to present the processed information to an operator.
- 26. The X-ray system as claimed in claim 25, wherein the processor is configured to process the plurality of X-ray views to create a tiled scout view of the item under inspection, and to provide the tiled scout view to the operator interface.
- 27. The system as claimed in claim 26, wherein the processor is further configured to receive information about the item under inspection from a remote inspection device and to locate a region of interest in the item under inspection based on the information received.
- 28. A high resolution X-ray inspection system constructed and arranged to examine an item under inspection located at an inspection region, the high resolution X-ray inspection system comprising:
a high resolution X-ray source located at the inspection region that exposes the item under inspection to X-ray radiation, the X-ray source having a focal spot size that is less than approximately 100 μm, the X-ray source being constructed and arranged to be movable in any of a first dimension, a second dimension, and a third dimension; an X-ray detector located at the inspection region that detects X-ray radiation as modified by the item under inspection, and that is constructed and arranged to be movable in the first dimension and the second dimension; a controller coupled to each of the X-ray source and the X-ray detector, configured to control movement of the X-ray source and the X-ray detector in the first and second dimensions; and a processor that is configured to receive detection information from the X-ray detector, to process the detection information, and to provide processed information.
- 29. The high resolution X-ray inspection system as claimed in claim 28, wherein the X-ray detector comprises a two-dimensional amorphous silicon high resolution X-ray detector array having 1024×1024 pixels.
- 30. The high resolution X-ray inspection system as claimed in claim 28, further comprising a conveyor constructed and arranged to move the item under inspection in the first dimension to the inspection region.
- 31. The high resolution X-ray inspection system as claimed in claim 30, wherein the controller is also configured to control movement of the conveyor in the first direction.
- 32. The high resolution X-ray inspection system as claimed in claim 28, further including an operator interface, coupled to the controller, that is configured to receive instructions from an operator input, to provide the instructions to the controller to control the movement of any of the X-ray source and the X-ray detector, and that is configured to receive the processed information and to present the processed information to an operator.
- 33. The high resolution X-ray inspection system as claimed in claim 28, wherein the controller is additionally configured to control movement of the X-ray source and the X-ray detector independently of each other in any of collinear directions and different directions to provide a plurality of X-ray views of the item under inspection at varying examination angles of the X-ray radiation.
- 34. The high resolution X-ray inspection system as claimed in claim 33, wherein the processor is configured to process the plurality of X-ray views to create a tiled scout view of the item under inspection.
- 35. The high resolution X-ray inspection system as claimed in claim 28, wherein the controller is also configured to control movement of the X-ray source in the third dimension so as to provide varying levels of zoom of the processed information.
- 36. A method of inspecting an item with an X-ray system, the method comprising acts of:
exposing the item to X-ray radiation from an X-ray source; detecting the X-ray radiation modified by the item with an X-ray detector; processing information provided by the X-ray detector to provide processed information; moving the X-ray source in any of a first dimension and a second dimension to expose the item to X-ray radiation at a plurality of positions; and moving the X-ray detector, independently of the X-ray source, in any of the first dimension and the second dimension to detect the X-ray radiation at a plurality of examination angles.
- 37. The method as claimed in claim 36, further comprising an act of moving the X-ray source in a third dimension so as to provide varying levels of zoom of the processed information.
- 38. The method as claimed in claim 36, further comprising an act of moving the item with a conveyor, in the first dimension to a region of inspection.
- 39. The method as claimed in claim 36, further comprising an act of providing the processed information at the plurality of examination angles to an operator interface.
- 40. The method as claimed in claim 39, wherein the act of processing the information comprises creating a tiled scout view of the item from X-ray images obtained at each of the plurality of positions.
- 41. The method as claimed in claim 40, wherein the act of providing the processed information comprises providing the tiled scout view to the operator interface.
- 42. The method as claimed in claim 40, wherein the act of creating the tiled scout view comprises creating a tiled scout view of an entire item under inspection.
- 43. The method as claimed in claim 40, further comprising acts of:
receiving from a remote inspection device information about the item; and locating a region of interest in the item based on the information received.
- 44. The method as claim on claim 43, wherein the information received comprises an image and the act of locating the region of interest in the item comprises acts of:
locating in the image at least two fiducial points; locating in the tiled scout view at least two corresponding fiducial points; aligning the tiled scout view with the image based on a location of the fiducial points; and locating the region of interest in the tiled scout view based on a location of the region of interest in the image.
- 45. The method as claimed in claim 43, further comprising an act of automatically positioning the X-ray source and the X-ray detector for a further inspection of the region of interest, in response to the information received.
- 46. The method as claimed in claim 36, wherein the act of exposing the item to X-ray radiation comprises an act of exposing the item to a cone-shaped beam of X-ray radiation.
- 47. The method as claimed in claim 36, wherein the act of exposing the item to X-ray radiation comprises exposing the item to X-ray radiation from an X-ray source having a focal spot size of less than approximately 100 μm.
- 48. The method as claimed in claim 36, wherein the act of exposing the item to X-ray radiation comprises exposing the item to high energy X-ray radiation and exposing the item to low energy X-ray radiation.
- 49. The method as claimed in claim 48, wherein the act of processing the information comprises:
measuring a first attenuation of the high energy X-ray radiation; measuring a second attenuation of the low X-ray radiation; and determining an effective atomic number of a material within the item based on the first and second attenuation.
- 50. The method as claimed in claim 36, wherein the acts of moving the X-ray source and moving the X-ray detector comprise repeatedly moving the X-ray source and the X-10 ray detector in a predetermined manner so as to perform a Computed Laminography measurement of the item.
- 51. The method as claimed in claim 36, further comprising acts of:
detecting with an energy sensitive detector, X-ray radiation scattered by the item; and performing a coherent scatter X-ray analysis of the item.
- 52. The method as claimed in claim 36, further comprising an act of providing the processed information to a remote operator interface.
- 53. The method as claimed in claim 36, further comprising an act of rotating the item up to 360 degrees.
- 54. A method of inspecting an item with an X-ray inspection system, the method comprising acts of:
exposing the item to X-ray radiation from an X-ray source; detecting the X-ray radiation modified by the item with an X-ray detector; processing information provided by the X-ray detector to provide processed information; moving the X-ray source in any of a first dimension and a second dimension to expose the item to X-ray radiation at a plurality of positions; moving the X-ray detector in any of the first dimension and the second dimension to detect the X-ray radiation at a plurality of positions; and moving the X-ray source in a third dimension so as to provide varying levels of zoom of the processed information.
- 55. The method as claimed in claim 54, further comprising an act of providing the processed information to an operator interface.
- 56. The method as claimed in claim 54, wherein the act of moving the X-ray detector comprises moving the X-ray detector independently of the X-ray source, so as to detect the X-ray radiation at a plurality of examination angles and so as to provide the processed information at the plurality of examination angles.
- 57. The method as claimed in claim 56, wherein the act of processing the information comprises creating a tiled scout view of the item from X-ray images obtained at each of the plurality of positions; and
wherein the act of providing the processed information comprises providing the tiled scout view.
- 58. The method as claimed in claim 54, further comprising an act of moving the item with a conveyor, in a first dimension to a region of inspection.
- 59. The method as claimed in claim 54, further comprising acts of:
receiving from a remote inspection device information about the item; and locating a region of interest in the item based on the information received.
- 60. A method for inspecting an item with an X-ray inspection system, the method comprising acts of:
exposing the item to X-ray radiation from a high resolution X-ray source having a focal spot size of less than approximately 100 μm; detecting the X-ray radiation modified by the item with a high resolution X-ray detector; processing information provided by the X-ray detector to provide processed information; moving the X-ray source in any of a first dimension and a second dimension to expose the item to X-ray radiation at a plurality of positions; and moving the X-ray detector in any of the first dimension and the second dimension to detect the X-ray radiation at a plurality of positions.
- 61. The method as claimed in claim 60, further comprising an act of moving the item with a conveyor, in the first dimension to a region of inspection.
- 62. The method as claimed in claim 60, further comprising an act of providing the processed information to an operator interface.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of application Ser. No. 10/115,443, filed on Apr. 3, 2002, entitled “X-RAY INSPECTION SYSTEM,” which in turn claims priority under 35 U.S.C. § 119(e) to U.S. Provisional Application Serial No. 60/281,117, entitled “X-RAY INSPECTION SYSTEM,” filed on Apr. 3, 2001, which is herein incorporated by reference in its entirety.
Provisional Applications (1)
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Number |
Date |
Country |
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60281117 |
Apr 2001 |
US |
Continuations (1)
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Number |
Date |
Country |
Parent |
10115443 |
Apr 2002 |
US |
Child |
10732581 |
Dec 2003 |
US |