Patent Application
20200058462
One aspect of the present invention relates to an X-ray tube and an X-ray generation device.
X-ray tubes described in Patent Literatures 1 and 2 have been known. The X-ray tube described in Patent Literature 1 has a target base on which a target is disposed, a target holder for fixing the target base, and a mechanism for shifting the target base in a plane perpendicular to an electron beam optical axis. The X-ray tube described in Patent Literature 2 includes a tube body capable of evacuating an inside of the X-ray tube, a target provided inside the tube body, a mechanism for shifting the target inside the tube body, and an X-ray emission window provided in the tube body.
Patent Literature 1: Japanese Patent No. 3812165
Patent Literature 2: Japanese Unexamined Patent Publication No. 2001-35428
According to the X-ray tube, electron beams incident therein may damage the target. In this case, a dose of generated X-rays may decrease. Accordingly, there has been demanded such a configuration which shifts the target to allow the electron beams to enter a position of the target other than the damaged position. For meeting this demand, the X-ray tube described in Patent Literature 1 shifts the target base exposed to the outside of the X-ray tube to shift the target. In this case, a space between the target base to be shifted and the target holder needs to be airtightly sealed. However, the target is difficult to shift while maintaining sufficient airtightness.
Meanwhile, in case of the X-ray tube described in Patent Literature 2, the target is housed inside the tube body, and is shifted inside the tube body. Accordingly, sufficient airtightness can be secured during the shift of the target. However, a focus to object distance (FOD) increases in a state that the target and the X-ray emission window are disposed away from each other. For increasing a geometrical magnification of a test object on a captured image at the time of imaging the test object using the X-ray tube, it is desirable to reduce the FOD, which is the distance from an X-ray focus to the test object.
One aspect of the present invention has been developed in consideration of the aforementioned circumstances. An object of the present invention to provide an X-ray tube and an X-ray generation device capable of shifting a target while reducing an FOD.
An X-ray tube according to one aspect of the present invention includes: a vacuum housing configured to include an internal space, the internal space being vacuum; a target unit disposed in the internal space, and configured to include a target configured to generate an X-ray by using an electron beam incident therein, and a target support unit configured to support the target, the X-ray generated by the target being transmitted through the target support unit; an X-ray emission window provided so as to face the target support unit, and configured to seal an opening of the vacuum housing, the X-rays transmitted through the target support unit being transmitted through the X-ray emission window; an elastic member configured to press the target unit in such a direction as to approach the X-ray emission window; and a target shift unit configured to shift the target unit pressed by the elastic member in a direction crossing an incidence direction of the electron beam.
According to the X-ray tube having this configuration, the target unit is pressed by the elastic member in such a direction as to approach the X-ray emission window. The target is thus brought close to the X-ray emission window. In this case, the target can be maintained in the state close to the X-ray emission window even when the target unit is shifted by the target shift unit. Accordingly, a shift of the target is achievable while reducing an FOD.
According to the X-ray tube of one aspect of the present invention, the target unit may include a target holding unit connected to the target shift unit, and configured to hold the target and the target support unit. The elastic member may press the target holding unit. This configuration can reduce physical stress caused by the shift of the target unit and the press by the elastic member, and directly applied to the target and the target support unit.
According to the X-ray tube of one aspect of the present invention, the elastic member may be made of metal. This configuration can reduce gas release from the elastic member.
According to the X-ray tube of one aspect of the present invention, the vacuum housing may include an elastic member support unit provided on an opposite side of the target unit from the X-ray emission window in the internal space, and configured to support the target unit via the elastic member. A positioning portion that positions the elastic member may be provided in at least one of the target unit and the elastic member support unit. This configuration can position the elastic member, and reduce a change of the FOD.
According to the X-ray tube of one aspect of the present invention, the positioning portion may be a groove provided in either one of the target unit and the elastic member support unit. The elastic member may be slidably held relative to either the target unit or the elastic member support unit between the target unit and the elastic member support unit so as to be accommodated in the groove. This configuration allows sliding of the target unit while securely positioning the elastic member in the groove during a shift of the target unit by the target shift unit. Accordingly, this configuration can reduce a change of the pressing direction of the pressing force of the elastic member as a result of the shift of the target unit, and maintain a fixed positional relationship between the target unit and the X-ray emission window.
The X-ray tube of one aspect of the present invention may further include a guide unit configured to guide a shift of the target unit shifted by the target shift unit. This configuration can reduce a shift of the target unit in an unintended direction.
According to the X-ray tube of one aspect of the present invention, the guide unit may include: a recess provided in either one of the target unit and the vacuum housing, and elongated in the shift direction of the target unit shifted by the target shift unit; and a protrusion provided in the other one of the target unit and the vacuum housing, and configured to enter the recess. This configuration can guide the shift of the target unit along the recess and the protrusion.
According to the X-ray tube of one aspect of the present invention, the elastic member may press the target unit in such a manner as to bring the target unit into contact with an inner wall surface of vacuum housing. This configuration can position the target unit on the inner wall surface of the vacuum housing, and reduce a change of the FOD.
According to the X-ray tube of one aspect of the present invention, the target unit may be shifted by the target shift unit in such a manner as to slide on an inner wall surface of the vacuum housing. At least one of a region of the target unit in contact with the inner wall surface and a region of the inner wall surface in contact with the target unit may include a rough surface portion that has surface roughness higher than surface roughness of a surface of the target support unit. This configuration can reduce a contact area between the target unit and the vacuum housing in contact with each other, thereby reducing resistance caused during the shift of the target unit.
According to the X-ray tube of one aspect of the present invention, the X-ray emission window may be separated from the target support unit. This configuration can facilitate the shift of the target unit, and reduce a possibility of friction between the X-ray emission window and the target support unit caused as a result of the shift.
According to the X-ray tube of one aspect of the present invention, the target unit may include a through hole that communicates with an inside of a separation space defined between the target support unit and the X-ray emission window, and with an outside of the separation space. This configuration can efficiently evacuate the separation space using the through holes.
An X-ray generation device according to one aspect of the present invention includes: the X-ray tube described above; a housing configured to house at least a part of the X-ray tube, insulating oil being sealed into the housing; and a power supply electrically connected to the X-ray tube via a power supply unit.
The X-ray generation device configured as above also offers the above-mentioned effect for shifting the target while reducing the FOD by using the X-ray tube described above.
Provided according to one aspect of the present invention is an X-ray tube and an X-ray generation device capable of shifting a target while reducing an FOD.
Part (a) of
An embodiment will be hereinafter described in detail with reference to the drawings. In the following description, identical or corresponding elements are given identical reference numerals, and the same description will be not be repeated.
As shown in
The vacuum housing 10 has a substantially cylindrical external shape. The vacuum housing 10 includes a head unit 4 made of a metal material (e.g., stainless steel), and an insulating valve 2 made of an insulating material (e.g., glass). The X-ray emission window 30 is fixed to the head unit 4. The head unit 4 has a main body 11 and an upper cover 12. The electron gun 110 is fixed to the insulating valve 2. The insulating valve 2 has a recess 116 folded and extended from an end facing the X-ray emission window 30 toward the X-ray emission window 30. The insulating valve 2 further includes a stem portion 115 so provided as to seal an end of the recess 116 on the X-ray emission window 30 side. The stern portion 115 holds the electron gun 110 at a predetermined position in the internal space R via a stem pin S used for power supply or other purposes. More specifically, the recess 116 increases a creepage distance between the head unit 4 and the electron gun 110 to improve withstand voltage characteristics, and positions the electron gun 110 close to the target T in the internal space R to easily produce a microfocus electron beam as the electron beam B.
The electron gun 110 includes a heater 111 constituted by a filament which generates heat when energized, a cathode 112 heated by the heater 111 to function as an electron emission source, and a first grid electrode 113 which controls an amount of electrons released from the cathode 112, and a second grid electrode 114 which has a cylindrical shape and focuses electrons having passed through the first grid electrode 113 toward the target T. The X-ray tube 1 is fixed to one end of a cylindrical member 70 described below. A not-shown exhaust pipe is attached to the X-ray tube 1. The X-ray tube 1 is vacuum-sealed by evacuating the inside through the exhaust pipe.
The housing C of the X-ray generation device 100 includes the cylindrical member 70, and a power supply portion case 84 which houses the power supply portion 80. The cylindrical member 70 is made of metal. The cylindrical member 70 has a cylindrical shape having openings at both ends. The insulating valve 2 of the X-ray tube 1 is inserted into an opening 70a on one end side of the cylindrical member 70. In this manner, the cylindrical member 70 houses at least a part of the X-ray tube 1. An attachment flange 3 of the X-ray tube 1 is brought into contact with one end surface of the cylindrical member 70, and fixed to the one end surface by a screw or the like. In this manner, the X-ray tube 1 seals the opening 70a while fixed at the opening 70a of the cylindrical member 70. Insulating oil 71, which is a liquid electrical insulating material, is sealed into the cylindrical member 70.
The power supply portion 80 has a function of supplying power to the X-ray tube 1. The power supply portion 80 includes an insulating block 81 made of epoxy resin, and an internal substrate 82 which includes a high-voltage generation circuit molded into the insulating block 81. The power supply portion 80 is housed in the power supply portion case 84 having a rectangular box shape. The other end side of the cylindrical member 70 (side opposite to the one end side corresponding to the X-ray tube 1 side) is fixed to the power supply portion 80. In this manner, an opening 70b on the other end side of the cylindrical member 70 is sealed, and the insulating oil 71 is airtightly sealed into the cylindrical member 70.
A high-voltage power supply unit 90, which includes a cylindrical socket electrically connected to the internal substrate 82, is disposed on the insulating block 81. The power supply portion 80 is electrically connected to the X-ray tube 1 via the high-voltage power supply unit 90. More specifically, one end of the high-voltage power supply unit 90 on the X-ray tube 1 side is electrically connected to a stem pin S inserted into the recess 116 of the insulating valve 2 of the X-ray tube 1 and projecting from the stem portion 115. In addition, the other end of the high-voltage power supply unit 90 on the power supply portion 80 side is fixed to the insulating block 81 while electrically connected to the internal substrate 82. The insulating block 81 includes a wall portion 83 which is annular and coaxial with the X-ray tube 1. The wall portion 83 projects in such a manner as to shield a connection portion between the cylindrical member 70 and the power supply portion 80 from the high-voltage power supply unit 90 in a state that the wall portion 83 is separated from the X-ray tube 1 and the cylindrical member 70. According to the present embodiment, the target T (anode) is set to a ground potential. A negative high voltage (e.g., from −10 kV to −500 kV) is supplied from the power supply portion 80 to the electron gun 110 via the high-voltage power supply unit 90.
In the description of the present embodiment, an emission direction side of an X-ray from the X-ray tube 1 is simply referred to as an “X-ray emission side” or an “upper side”. According to the present embodiment, assuming that a tube axis of the X-ray tube 1 is an “axis TA”, that an axis in a direction where the electron beam B enters the target T is an “axis BA”, and that an axis in a direction where the X-ray X is emitted is an “axis XA”, the electron beam B emitted from the electron gun 110 travels in the internal space R toward the target T in a direction coaxial with the axis TA, and enters the target T on the axis TA in a direction perpendicular to the target T to generate an X-ray. In this case, the axis TA, the axis BA, and the axis XA are all coaxial with each other, and therefore are also collectively referred to as an axis AX.
The head unit 4 is provided on the X-ray emission side of the vacuum housing 10 as a wall defining the internal space R. The head unit 4 includes the main body 11 and the upper cover 12 made of a metal material (e.g., stainless steel). The head unit 4 potentially corresponds to the anode of the X-ray tube 1. The main body 11 has a cylindrical shape. The main body 11 potentially corresponds to the anode of the X-ray tube 1. The main body 11 has a substantially cylindrical shape coaxial with the axis AX, and has openings at both ends. The upper cover 12 is fixed to an opening 11 a at one end of the main body 11 on the X-ray emission side. The main body 11 communicates with the insulating valve 2 coaxial with the axis AX at an opening at the other end on the electron gun 110 side (see
The upper cover 12 is provided in such a manner as to close the opening 11 a at one end on the X-ray emission side of the main body 11 in a state that the upper cover 12 is electrically connected with the main body 11. The upper cover 12 has a disk shape coaxial with the axis AX. A recess 13 which has a circular cross section concentric with the upper cover 12 is formed in an upper surface of the upper cover 12. An opening 14 which has a circular cross section concentric with the upper cover 12 is formed in a bottom surface of the recess 13, and constitutes an X-ray passage hole coaxial with the axis AX.
The vacuum housing 10 further includes a support base (elastic member support unit) 15. The support base 15 has a disk shape disposed coaxially with the axis AX. The support base 15 is disposed in parallel to the upper cover 12 with a predetermined clearance left from the upper cover 12 in such a manner as to separate a space containing the target T (target unit 20) and a space containing the electron gun 110 in the internal space R. The support base 15 is installed on the lower side of the target unit 20 (electron gun 110 side opposite to X-ray emission window 30 side). The target unit 20 is placed on the support base 15 via the elastic member 40. The support base 15 supports the target unit 20 via the elastic member 40. The support base 15 includes an electron beam passage hole 16 which is a through hole having a circular cross section and coaxial with the axis AX, i.e., concentric with the support base 15. The electron beam passage hole 16 is a hole through which the electron beam B traveling toward the target T passes. The space containing the target T (target unit 20) and the space containing the electron gun 110 communicate with each other via at least the electron beam passage hole 16.
The target unit 20 is disposed in the internal space R. The target unit 20 includes the target T, a target shift plate (target holding unit) 21, and a target support substrate (target support unit) 23. The target T generates an X-ray by receiving the electron beam B. For example, the target T is constituted by tungsten. As described below, the target T is provided in a film shape at least on the lower surface of the target support substrate 23.
The target shift plate 21 holds the target T and the target support substrate 23. The target shift plate 21 shifts the target T in a shift direction A which is a predetermined direction crossing an incidence direction (application direction) of the electron beam B. The shift direction A herein is one direction crossing the incidence direction of the electron beam B into the target T, i.e., the axis BA (axis AX) at right angles, and also is a radial direction of the vacuum housing 10. The target shift plate 21 has a disk shape having a center axis extending in a direction along the axis BA (axis AX). The target shift plate 21 is shifted by the shift mechanism 50 such that the center axis moves in parallel to the shift direction A. The target shift plate 21 is made of a material having heat conductivity higher than a certain value, a coefficient of heat expansion close to that coefficient of the target support substrate 23, and less damaged or producing less foreign matters by friction than the target support substrate 23. For example, the target shift plate 21 is made of molybdenum. The target shift plate 21 is in contact with an inner wall surface of the upper cover 12, and is disposed in parallel to the upper cover 12.
A circular protrusion 24 coaxial with the target shift plate 21 is formed on an upper surface of the target shift plate 21. The circular protrusion 24 enters the opening 14 of the upper cover 12 in a state of contact between the target shift plate 21 and the upper cover 12. The circular protrusion 24 has an outer diameter smaller than an inner diameter of the opening 14. More specifically, the circular protrusion 24 has an eternal shape capable of shifting for a predetermined distance in the shift direction A within a separation space R2 described below and defined by the opening 14. The circular protrusion 24 includes a through hole 25 having a circular cross section and concentric with the target shift plate 21. The through hole 25 is an electron beam passage hole through which the electron beam B traveling toward the target T passes. The target shift plate 21 has a hole 27 into which the pin 51 of the shift mechanism 50 is inserted. The hole 27 is framed on one side in the shift direction A. The target shift plate 21 is connected to the shift mechanism 50 via the hole 27.
As shown in
As shown in
The X-ray emission window 30 is provided on the upper cover 12 of the vacuum housing 10 in such a position as to face the target support substrate 23. The X-ray emission window 30 is separated from the target support substrate 23. The X-ray emission window 30 is kept in such a size and a shape as to contain an X-ray emission portion of the target support substrate 23 as viewed coaxially with the axis AX (i.e., as viewed from above or as viewed in a direction facing the X-ray emission window 30 from outside). The X-ray emission window 30 constitutes a second X-ray transmission window through which an X-ray transmitted through the target support substrate 23 is transmitted. The X-ray emission window 30 has a disk shape. For example, the X-ray emission window 30 is made of a material having high X-ray transparency, such as beryllium and diamond. The X-ray emission window 30 is disposed coaxially with the axis AX on the bottom surface of the recess 13 of the upper cover 12. The X-ray emission window 30 seals the opening 14 of the vacuum housing 10. Specifically, the X-ray emission window 30 seals and holds, in a vacuum state, the opening 14 at an X-ray emission portion facing the target unit 20.
The elastic member 40 presses the target unit 20 in such a direction as to approach the X-ray emission window 30. For example, the elastic member 40 is constituted by a substantially conical coil spring coaxial with the target shift plate 21. The elastic member 40 is made of metal. For example, the elastic member 40 is made of nickel chromium alloy. The elastic member 40 presses the target unit 20 in such a manner as to bring the target unit 20 into contact with the lower surface (inner wall surface of vacuum housing 10) of the upper cover 12.
The elastic member 40 is interposed between the target shift plate 21 and the support base 15. Specifically, the elastic member 40 is disposed between the target shift plate 21 and the support base 15 while compressing a substantially conical shape of the coil spring and deforming the conical shape into a substantially conical shape having a side surface less inclined. The elastic member 40 presses the lower surface of the target shift plate 21 toward the X-ray emission side with respect to the upper surface of the support base 15. For example, a spring constant of the elastic member 40, which is a conical coil spring, is in a range from 0.01 N/mm to 1 N/mm, and more specifically, 0.05 N/mm to 0.5 N/mm.
The shift mechanism 50 is a mechanism for shifting the target unit 20, which has been pressed by the elastic member 40, in the shift direction A. The shift mechanism 50 shifts the target unit 20 using a screw. The shift mechanism 50 has the pin 51, a crown 52, a screwing mechanism 53 and bellows 54.
The pin 51 is inserted from the housing space I of the main body 11 into the hole 27 of the target shift plate 21 through the communication hole 11b of the main body 11. The pin 51 advances and retreats (moves forward and backward) in the shift direction A. The communication hole 11b has a circular cross section having a diameter equal to or larger than a moving range of the pin 51. The crown 52 is a knob for operating the shift mechanism 50, and is disposed outside the housing space I. The screwing mechanism 53 is a mechanism which converts rotation of the crown 52 into linear movement of the pin 51. The bellows 54 are provided within the housing space I. The bellows 54 seal and hold the housing space I in a vacuum state, and expand and contract along with movement of the pin 51 while maintaining the vacuum state the housing space I. The bellows 54 are made of metal, and reduce gas release from the bellows 54.
According to the present embodiment, at least one of the upper surface of the target shift plate 21 (region contacting upper cover 12) and the lower surface of the upper cover 12 (region contacting target shift plate 21) is a rough surface portion having higher surface roughness than that of the surface of the target support substrate 23. In this case, at least one of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 is roughened. The surface roughness of at least one of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 is in a range from Rz 25 to Rz 0.025, for example, more specifically, in a range from Rz 6.3 to Rz 0.4.
The target shift plate 21 has a pair of through holes 26 formed around the circular protrusion 24 with the circular protrusion 24 interposed between the through holes 26. The pair of through holes 26, which are disposed on one side and the other side of the circular protrusion 24 in the shift direction A, penetrate the target shift plate 21 in a thickness direction. The through holes 26 communicate with the inside of the separation space R2, which is defined between the target support substrate 23 and the X-ray emission window 30 in the internal space R, and with the outside of the separation space R2. The through holes 26 allow air in the separation space R2 to flow out of the separation space R2 during vacuum drawing of the inside of the vacuum housing 10.
The X-ray tube 1 also includes a guide unit 60 which guides a shift of the target unit 20 shifted by the shift mechanism 50. The guide unit 60 includes a recess 61 provided in the lower surface of the target shift plate 21 and elongated in the shift direction A, and a protrusion 62 provided on the upper surface of the support base 15 and having a circular shape which surrounds the electron beam passage hole 16 in such a shape as to be concentric with the support base 15. The target unit 20 and the support base 15 are separated by an elastic force of the elastic member 40 so as to be spatially separated from each other without contact between a lower side surface of the recess 61 and an upper side surface of the protrusion 62. The recess 61 has a predetermined length in the shift direction A. The recess 61 is disposed concentrically with the target shift plate 21 and radially inside the annular groove 29 of the target shift plate 21, and surrounds the through hole 25 and the pair of through holes 26. A short axis length (length in the direction perpendicular to the shift direction A) of the recess 61 is substantially equal to a diameter of the protrusion 62, while a long axis length of the recess 61 (predetermined length in the shift direction A) is larger than the diameter of the protrusion 62. More specifically, the recess 61 has a shape substantially equal to a shape obtained by projecting a locus produced when the protrusion 62 moves for a predetermined distance in the shift direction A (region through which the protrusion 62 passes). The protrusion 62 has a circular shape concentric with the support base 15, and protrudes upward. A distal end side of the protrusion 62 enters the recess 61.
Accordingly, movement of the recess 61, and consequent movement of the target shift plate 21 (target unit 20) are permitted in the shift direction A within a range of a predetermined length in directions crossing the X-ray emission direction at right angles (protrusion 62 and recess 61 do not interfere with each other). On the other hand, movement of the recess 61, and consequent movement of the target shift plate 21 (target unit 20) are regulated in a direction other than the shift direction A in directions crossing the X-ray emission direction at right angles (protrusion 62 and recess 61 interfere with each other).
According to the X-ray tube 1 configured as described above, the electron beam B is emitted from the electron gun 110 disposed in the internal space R, and enters the target T to generate the X-ray X. The generated X-ray X passes through the target support substrate 23, and then passes through the X-ray emission window 30. Thereafter, the X-ray-X is emitted to the outside of the X-ray tube 1, and applied to a test object.
At this time, the crown 52 of the shift mechanism 50 is rotated to move the pin 51 in the shift direction A by a screwing action of the screwing mechanism 53. In this case, as shown in (a) and (b) of
According to the X-ray tube 1 and the X-ray generation device 100 of the present embodiment described above, the target unit 20 is pressed by the elastic member 40 in such a direction as to approach the X-ray emission window 30. As a result, the target T is brought close to the X-ray emission window 30. Subsequently, the target unit 20 is shifted by the shift mechanism 50, in which condition the state of the target T close to the X-ray emission window 30 is maintained even when the incidence position of the electron beam B into the target T changes.
More specifically, the X-ray tube 1 has a double window structure constituted by the target support substrate 23 and the X-ray emission window 30 to achieve a shift of the target support substrate 23 and a consequent shift of the target T. In this case, the target support substrate 23 is pressed against the X-ray emission window 30 to reduce the FOD by decreasing the distance between the target T and the X-ray emission window 30 as much as possible. Accordingly, a shift of the target is achievable while reducing the FOD in the present embodiment. Moreover, the X-ray tube 1 changes the incidence position of the electron beam B into the target T not by bending the electron beam B with deflection, but by shifting the target T while fixing the state of incidence of the electron beam B perpendicularly to the target T. In this case, a stable focused state of the electron beam B can be maintained. This stable state is particularly effective when a microfocus X-ray is required with high stability. Moreover, the focus of the X-ray X is constantly located at the same position even when the incidence position of the electron beam B into the target T is shifted. Accordingly, readjustment relative to an external device such as an X-ray imaging element is unnecessary. Furthermore, all the axis TA, the axis XA, and the axis BA are coaxial with each other. Accordingly, design and manufacture of an X-ray tube having desired characteristics are facilitated.
According to the present embodiment, the target unit 20 includes the target shift plate 21. The elastic member 40 presses the target shift plate 21. This configuration reduces physical stress caused by the shift of the target unit 20 and the press by the elastic member 40, and directly applied to the target T and the target support substrate 23. This configuration reduces an adverse effect of physical stress on the target T and the target support substrate 23 which considerably affect generation of X-rays, and therefore achieves generation of stable X-rays. Moreover, strength sufficient for physical stress need not be considered in selecting materials of the target T and the target support substrate 23. Accordingly, these materials can be selected with emphasis on the characteristics or heat dissipation of the X-ray generation.
According to the present embodiment, the elastic member 40 is made of metal. This configuration reduces gas release from the elastic member 40, and therefore achieves stable generation of X-rays. At the time of evacuation of the X-ray tube 1, the X-ray tube 1 may be heated and evacuated to increase the degree of vacuum. When the elastic member 40 is made of metal, a quality change of the material, a change of elasticity or the like of the elastic member 40 as a result of heating can be reduced.
According to the present embodiment, the annular groove 29 is provided in the lower surface of the target shift plate 21 of the target unit 20 as a positioning portion for positioning the elastic member 40. This configuration can position the elastic member 40, maintain the position of the elastic member 40 at a fixed position (hold with stabilization of the position), and reduce a change of the FOD.
According to the present embodiment, the elastic member 40 is slidably held on the upper surface of the support 15 between the target unit 20 and the support base 15 so as to be accommodated in the annular groove 29. This configuration allows sliding of the target unit 20 on the support base 15 while securely positioning the elastic member 40 in the annular groove 29 during the shift of the target unit 20. Accordingly, this configuration can reduce a change of the pressing direction of the elastic member 40 caused as a result of the shift of the target unit 20. This configuration therefore can maintain a fixed positional relationship between the target unit 20 and the X-ray emission window 30. Moreover, this configuration can move the elastic member 40 along with the target unit 20 during the shift of the target unit 20, and thereby maintain the fixed positional relationship between the elastic member 40 and the target unit 20. Accordingly, this configuration can reduce a biased pressing force applied to the target unit 20, or a change of distribution of the pressing force caused by the effect of the shift.
According to the present embodiment, the guide unit 60 is provided to guide a shift of the target unit 20 shifted by the shift mechanism 50. This configuration can reduce a shift of the target unit 20 in an unintended direction. In this case, a shift of the target unit 20 in a random direction decreases, wherefore the electron incidence position into the target T is securely recognizable. Accordingly, use of a portion previously used for X-ray generation again is avoidable.
According to the present embodiment, the guide unit 60 includes the recess 61 provided in the target shift plate 21, and the protrusion 62 provided on the support base 15 and entering the recess 61. This configuration can guide the shift of the target unit 20 by using the recess 61 and the protrusion 62. Accordingly, the configuration of the guide unit 60 can be simplified.
According to the present embodiment, the elastic member 40 presses the target unit 20 such that the target unit 20 comes into contact with the lower surface of the upper cover 12. This configuration can position the target unit 20 on the lower surface of the upper cover 12, maintain the position of the target unit 20 at a fixed position (holding with stabilization), and reduce a change of the FOD. Moreover, this configuration can easily conduct heat of the target unit 20 to the upper cover 12, wherefore heat dissipation of the target T improves.
According to the present embodiment, at least one of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 is a rough surface portion having surface roughness higher than surface roughness of the surface of the target support substrate 23. This configuration can reduce a contact area between the target unit 20 and the vacuum housing 10 in contact with each other, thereby reducing resistance caused during the shift of the target unit 20. For reducing the resistance during the shift of the target unit 20, it is also preferable that the contact portion between the target shift plate 21 and the upper cover 12, i.e., the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 are made of materials different from each other. Concerning this respect, the target shift plate 21 is made of molybdenum, while the upper cover 12 is made of stainless steel according to the present embodiment. When surface smooth members are in surface contact with each other under vacuum, a large force may be required to change a positional relationship of the respective surface smooth members. This force may damage the shift mechanism 50 or the target shift plate 21. However, the rough surface portion thus provided can facilitate the shift of the target unit 20, and reduce damage of the shift mechanism 50 or the target shift plate 21.
According to the present embodiment, the X-ray emission window 30 is separated from the target support substrate 23. This configuration can facilitate the shift of the target unit 20, and reduce a possibility of friction between the X-ray emission window 30 and the target support substrate 23 (possibility of breakage or generation of foreign matters by friction) caused as a result of the shift. Moreover, strength sufficient for physical stress need not be considered in selecting materials of the X-ray emission window 30 and the target support substrate 23. Accordingly, these materials can be selected with emphasis on transparency of the X-ray X or heat dissipation. The X-ray emission window 30 also has the function for vacuum-sealing, and therefore may be recessed toward the internal space R side. When the X-ray emission window 30 is in contact with the target support substrate 23, the target support substrate 23 is also recessed. In this case, the incidence state of the electron beam B into the target T may change, wherefore a focal diameter of the generated X-ray X or the FOD may change, for example. However, by separating the X-ray emission window 30 from the target support substrate 23, stability of the generated X-ray X improves.
According to the present embodiment, the target unit 20 includes the through holes 26 communicating with the inside and the outside of the separation space R2. This configuration can efficiently evacuate the separation space R2 using the through holes 26. When gas such as air remains in the separation space R2 which is a space near the target T heated to have a high temperature by incidence of the electron beam B, members in the vicinity of the separation space R2 (e.g., target support substrate 23 or X-ray emission window 30) react with the gas and deteriorate easily. However, by efficiently evacuating the separation space R2, remaining gas decreases, and deterioration of the members is avoidable.
When the target T is damaged by the electron beam B incident therein, for example, the shift mechanism 50 shifts the target T to allow the electron beam B to enter a position of the target T other than the damaged portion. In this manner, decrease in a dose of X-rays is avoidable. The X-ray tube 1 is constituted by a vacuum-sealed X-ray tube. Accordingly, complicated maintenance is not required. The elastic member 40 and the bellows 54 are made of metal. This configuration can reduce lowering of the degree of vacuum in the X-ray tube 1 as a result of gas discharge in comparison with the elastic member 40 and the bellows 54 made of resin, and also increase temperature tolerance to cope with a tube baking process.
One aspect of the present invention is not limited to the embodiment described herein.
According to the above embodiment, the elastic member 40 is constituted by the coil spring made of metal and having a substantially conical shape. However, the number, material, structure, type and the like of the elastic member 40 are not specifically limited. Various types of member may be employed as long as the target unit 20 can be pressed in such a direction as to approach the X-ray emission window 30. For example, the elastic member 40 may be constituted by a plurality of coil springs, or a leaf spring. Moreover, the elastic member 40 may be fixed to the main body 11 or the upper cover 12, unlike the configuration of the above embodiment in which the support base 15 as an elastic member support unit is provided.
According to the above embodiment, the target unit 20 shifts in the shift direction A. However, the shift direction of the target unit 20 is not specifically limited. The shift direction may be any direction crossing the incidence direction of the electron beam B (up-down direction in
According to the above embodiment, all the axis TA, the axis XA and the axis BA are coaxial with each other. However, the respective axes TA, XA, and BA may be different axes. According to the above embodiment, the shift mechanism 50 uses a screw to shift the target unit 20. However, the shift mechanism 50 is not specifically limited. Various types of mechanism may be used as long as the target unit 20 pressed by the elastic member 40 can be shifted in the shift direction A. The shift mechanism 50 may be a mechanism for manually shifting the target unit 20, or may be a mechanism for electrically and automatically shifting the target unit 20.
According to the above embodiment, the guide unit 60 is constituted by the recess 61 and the protrusion 62. However, the guide unit 60 is not specifically limited, but may be any unit as long as the shift of the target unit 20 by the shift mechanism 50 can be guided. According to the above embodiment, the annular groove 29 as the positioning portion of the elastic member 40 is provided in the target shift plate 21. However, a positioning portion may be formed in the support base 15 instead of or in addition to the annular groove 29. In this case, the elastic member 40 may be brought into a state slidably held on the target shift plate 21, instead of or in addition to the state slidably held on the upper surface of the support base 15.
According to the above embodiment, the positioning portion of the elastic member 40 may limit (regulate) the shift of the elastic member 40 within a predetermined range, rather than fixing the elastic member 40. In this case, the elastic member 40 may slide within the predetermined range of the positioning portion during the shift of the target unit 20.
According to the above embodiment, at least one of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 is a rough surface portion. However, other configurations may be adopted. Only a part of the upper surface of the target shift plate 21 may be a rough surface, or only a part of the lower surface of the upper cover 12 may be a rough surface. Alternatively, at least a combination of these parts may be adopted.
According to the above embodiment, the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 are not particularly surface-treated. However, at least one of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 may be subjected to surface treatment for preventing easy junction to the other side (e.g., oxidation treatment or nitridation treatment). According to the above embodiment, coating is not particularly formed on each of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12. However, coating for reducing frictional force (e.g., metal coating softer than the upper surface of the target shift plate 21 or the lower surface of the upper cover 12) may be formed on at least one of the upper surface of the target shift plate 21 and the lower surface of the upper cover 12. According to the above embodiment, the upper surface of the target shift plate 21 and the lower surface of the upper cover 12 are in contact with each other. However, resistance during the shift of the target unit 20 may be reduced by interposing a bearing or a spherical member between the upper surface of the target shift plate 21 and the lower surface of the upper cover 12.
According to the above embodiment, a space is formed between the support base 15 and the X-ray emission window 30. However, the space between the support base 15 and the X-ray emission window 30 may be filled with a material having high heat conductivity. In this case, heat of the target unit 20 can be easily conducted to the X-ray emission window 30, wherefore heat dissipation of the target unit 20 improves. In this case, the route of the electron beam B or the X-ray X is not filled with the material to eliminate effect on incidence of the electron beam B or emission of the X-ray X. While the X-ray emission window 30 is separated from the target support substrate 23 in the above embodiment, the X-ray emission window 30 may be in contact with the target support substrate 23. This configuration further reduces the FOD, and dissipates heat generated at the target T through the X-ray emission window 30.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2017-090042 | Apr 2017 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2018/006981 | 2/26/2018 | WO | 00 |
