ADAPTIVE PLASMA TECHNOLOGY CORP.

Organization

GYEONGGI-DO, KR

Organizations

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Particle trapping apparatus for preventing an error of a pressure m...
- Patent number 11,841,284
- Issue date Dec 12, 2023
- Adaptive Plasma Technology Corp.
- Woo Hyung Choi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for monitoring an exchanging process of a semiconductor p...
- Patent number 11,538,702
- Issue date Dec 27, 2022
- Adaptive Plasma Technology Corp.
- Woo Hyung Choi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Structure variable type of a plasma source coil and a method for co...
- Patent number 11,315,764
- Issue date Apr 26, 2022
- Adaptive Plasma Technology Corp.
- Woo Hyung Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separate plasma source coil and method of controlling the same
- Patent number 10,825,655
- Issue date Nov 3, 2020
- Adaptive Plasma Technology Corp.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma chamber having plasma source coil and method for etching the...
- Patent number 7,524,395
- Issue date Apr 28, 2009
- Adaptive Plasma Technology Corp.
- Nam Hun Kim
- H01 - BASIC ELECTRIC ELEMENTS

Please log in for detailed analytics

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR ETCHING WITH A PLASMA
- Publication number 20240096594
- Publication date Mar 21, 2024
- Adaptive Plasma Technology Corp.
- Woo Hyung CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE TRAPPING APPARATUS FOR PREVENTING AN ERROR OF A PRESSURE M...
- Publication number 20230324246
- Publication date Oct 12, 2023
- Adaptive Plasma Technology Corp.
- Woo Hyung CHOI
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCK WITH MULTIPLE HEATER ZONES
- Publication number 20230187251
- Publication date Jun 15, 2023
- Adaptive Plasma Technology Corp.
- Woo Hyung CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MONITORING AN EXCHANGING PROCESS OF A SEMICONDUCTOR P...
- Publication number 20220216082
- Publication date Jul 7, 2022
- Adaptive Plasma Technology Corp.
- Woo Hyung CHOI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
STRUCTURE VARIABLE TYPE OF A PLASMA SOURCE COIL AND A METHOD FOR CO...
- Publication number 20210335583
- Publication date Oct 28, 2021
- Adaptive Plasma Technology Corp.
- Woo Hyung CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR EXCHANGING AN ARTICLE OF A SEMI-CONDUCTOR PROCESS AND...
- Publication number 20210335651
- Publication date Oct 28, 2021
- Adaptive Plasma Technology Corp.
- Woo Hyung CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Source For Uniform Plasma Distribution in Plasma Chamber
- Publication number 20080178806
- Publication date Jul 31, 2008
- ADAPTIVE PLASMA TECHNOLOGY CORP.
- Nam Hun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck And Chuck Base Having Cooling Path For Cooling...
- Publication number 20070274020
- Publication date Nov 29, 2007
- ADAPTIVE PLASMA TECHNOLOGY CORPORATION
- Hee Yong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method And Apparatus For Seasoning Semiconductor Apparatus Of Sensi...
- Publication number 20070201016
- Publication date Aug 30, 2007
- ADAPTIVE PLASMA TECHNOLOGY CORP.
- Yeong Su Song
- G01 - MEASURING TESTING
Information Patent Application
Plasma etching method and apparatus for manufacturing a semiconduct...
- Publication number 20030180971
- Publication date Sep 25, 2003
- Adaptive Plasma Technology Corporation
- Nam-Hun Kim
- H01 - BASIC ELECTRIC ELEMENTS

Please log in for detailed analytics

Trademarklast 30 trademarks

Information Trademark
79029965 - SELEX
- Serial number 79029965
- Registration number 3237728
- Filing date Oct 13, 2005
- ADAPTIVE PLASMA TECHNOLOGY; CORPORATION
- 7 - Machines and machine tools
Information Trademark
79031744 - APTC ADAPTIVE PLASMA TECHNOLOGY
- Serial number 79031744
- Registration number 3445381
- Filing date Aug 5, 2005
- ADAPTIVE PLASMA TECHNOLOGY; CORPORATION
- 7 - Machines and machine tools

ADAPTIVE PLASMA TECHNOLOGY CORP.

Organization

Patents Grantslast 30 patents

Particle trapping apparatus for preventing an error of a pressure m...

Apparatus for monitoring an exchanging process of a semiconductor p...

Structure variable type of a plasma source coil and a method for co...

Separate plasma source coil and method of controlling the same

Plasma chamber having plasma source coil and method for etching the...

Patents Applicationslast 30 patents

SYSTEM FOR ETCHING WITH A PLASMA

PARTICLE TRAPPING APPARATUS FOR PREVENTING AN ERROR OF A PRESSURE M...

ELECTROSTATIC CHUCK WITH MULTIPLE HEATER ZONES

APPARATUS FOR MONITORING AN EXCHANGING PROCESS OF A SEMICONDUCTOR P...

STRUCTURE VARIABLE TYPE OF A PLASMA SOURCE COIL AND A METHOD FOR CO...

APPARATUS FOR EXCHANGING AN ARTICLE OF A SEMI-CONDUCTOR PROCESS AND...

Plasma Source For Uniform Plasma Distribution in Plasma Chamber

Electrostatic Chuck And Chuck Base Having Cooling Path For Cooling...

Method And Apparatus For Seasoning Semiconductor Apparatus Of Sensi...

Plasma etching method and apparatus for manufacturing a semiconduct...

Trademarklast 30 trademarks

79029965 - SELEX

79031744 - APTC ADAPTIVE PLASMA TECHNOLOGY