Adolph Slaby Instituut Forschungsgesellschaft fur Plasmatechnologie und Mikrostrukturierung mbH

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Berlin, DE

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Method for determining absolute plasma parameters
- Patent number 5,705,931
- Issue date Jan 6, 1998
- Adolph Slaby Instituut Forschungsgesellschaft fur Plasmatechnologie und Mikro...
- Michael Klick
- H01 - BASIC ELECTRIC ELEMENTS

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