Advanced Mask Inspection Technology, Inc.

Organization

Yokohama-shi, JP

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection apparatus, image alignment method, displacement...
- Patent number 7,809,181
- Issue date Oct 5, 2010
- Advanced Mask Inspection Technology Inc.
- Kyoji Yamashita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image correction method and apparatus for use in pattern inspection...
- Patent number 7,796,803
- Issue date Sep 14, 2010
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image density-adapted automatic mode switchable pattern correction...
- Patent number 7,787,686
- Issue date Aug 31, 2010
- Advanced Mask Inspection Technology
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Beam irradiation apparatus with deep ultraviolet light emission dev...
- Patent number 7,781,749
- Issue date Aug 24, 2010
- Advanced Mask Inspection Technology, Inc.
- Shinichi Imai
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus and method with enhanced test image co...
- Patent number 7,764,825
- Issue date Jul 27, 2010
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus and method with local critical dimensi...
- Patent number 7,756,318
- Issue date Jul 13, 2010
- Advanced Mask Inspection Technology Inc.
- Yuichi Nakatani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image correcting method
- Patent number 7,706,623
- Issue date Apr 27, 2010
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Photomask inspection apparatus comparing optical proximity correcti...
- Patent number 7,664,308
- Issue date Feb 16, 2010
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,656,516
- Issue date Feb 2, 2010
- Advanced Mask Inspection Technology Inc.
- Shinichi Imai
- G01 - MEASURING TESTING
Information Patent Grant
Target workpiece inspection apparatus, image alignment method, and...
- Patent number 7,655,904
- Issue date Feb 2, 2010
- Advanced Mask Inspection Technology Inc.
- Kyoji Yamashita
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece inspection apparatus, workpiece inspection method and com...
- Patent number 7,643,668
- Issue date Jan 5, 2010
- Advanced Mask Inspection Technology Inc.
- Yuichi Nakatani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Die-to-database photomask defect detection using region data to mod...
- Patent number 7,639,863
- Issue date Dec 29, 2009
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Die-to-die photomask defect detection using region data to modify i...
- Patent number 7,630,535
- Issue date Dec 8, 2009
- Advanced Mask Inspection Technology Inc.
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus with high-accuracy pattern...
- Patent number 7,627,164
- Issue date Dec 1, 2009
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus using linear predictive mod...
- Patent number 7,627,165
- Issue date Dec 1, 2009
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample inspection apparatus, image alignment method, and program-re...
- Patent number 7,577,288
- Issue date Aug 18, 2009
- Advanced Mask Inspection Technology Inc.
- Kyoji Yamashita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image density-adapted automatic mode switchable pattern correction...
- Patent number 7,565,032
- Issue date Jul 21, 2009
- Advanced Mask Inspection Technology, Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of operating laser light source
- Patent number 7,539,222
- Issue date May 26, 2009
- Advanced Mask Inspection Technology Inc.
- Kazuto Matsuki
- G02 - OPTICS
Information Patent Grant
Image correction method
- Patent number 7,539,350
- Issue date May 26, 2009
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,495,756
- Issue date Feb 24, 2009
- Advanced Mask Inspection Technology Inc.
- Shinichi Imai
- G01 - MEASURING TESTING
Information Patent Grant
Level detection apparatus
- Patent number 7,495,779
- Issue date Feb 24, 2009
- Advanced Mask Inspection Technology, Inc.
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection system using image correction scheme with object...
- Patent number 7,487,491
- Issue date Feb 3, 2009
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Light amount measurement device and light amount measurement method
- Patent number 7,388,660
- Issue date Jun 17, 2008
- Advanced Mask Inspection Technology Inc.
- Noboru Kobayashi
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece inspection apparatus assisting device, workpiece inspecti...
- Patent number 7,275,006
- Issue date Sep 25, 2007
- Advanced Mask Inspection Technology Inc.
- Yoshitake Tsuji
- G01 - MEASURING TESTING

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Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20110229009
- Publication date Sep 22, 2011
- Advanced Mask Inspection Technology Inc.
- Ikunao ISOMURA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM
- Publication number 20110044528
- Publication date Feb 24, 2011
- NuFlare Technology, Inc.
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATIC FOCUS ADJUSTING MECHANISM AND OPTICAL IMAGE ACQUISITION A...
- Publication number 20100247085
- Publication date Sep 30, 2010
- Kabushiki Kaisha Toshiba
- Masataka Shiratsuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAVELENGTH CONVERSION LIGHT SOURCE APPARATUS AND WAVELENGTH CONVERS...
- Publication number 20100128343
- Publication date May 27, 2010
- Advanced Mask Inspection Technology, Inc.
- Shinichi IMAI
- G02 - OPTICS
Information Patent Application
PHOTOMASK INSPECTION METHOD
- Publication number 20100074512
- Publication date Mar 25, 2010
- Advanced Mask Inspection Technology, Inc.
- Masatoshi HIRONO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
XY STAGE APPARATUS
- Publication number 20100073684
- Publication date Mar 25, 2010
- Advanced Mask Inspection Technology
- Noboru KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
ULTRAFINE PATTERN DISCRIMINATION USING TRANSMITTED/REFLECTED WORKPI...
- Publication number 20090304262
- Publication date Dec 10, 2009
- Advanced Mask Inspection Technology, Inc.
- Nobuyuki HARABE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASK INSPECTION APPARATUS
- Publication number 20090244530
- Publication date Oct 1, 2009
- Advanced Mask Inspection Technology, Inc.
- Susumu Iida
- G01 - MEASURING TESTING
Information Patent Application
IMAGE DENSITY-ADAPTED AUTOMATIC MODE SWITCHABLE PATTERN CORRECTION...
- Publication number 20090245619
- Publication date Oct 1, 2009
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION APPARATUS, PATTERN INSPECTION METHOD, AND COMPUT...
- Publication number 20090238441
- Publication date Sep 24, 2009
- Advanced Mask Inspection Technology, Inc.
- Kyoji YAMASHITA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIGHT POLARIZATION CONTROL USING SERIAL COMBINATION OF SURFACE-SEGM...
- Publication number 20090237909
- Publication date Sep 24, 2009
- Advanced Mask Inspection Technology, Inc.
- Riki OGAWA
- G02 - OPTICS
Information Patent Application
ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAG...
- Publication number 20090238446
- Publication date Sep 24, 2009
- Advanced Mask Inspection Technology, Inc.
- Akira Kataoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN IMAGE CORRECTING APPARATUS, PATTERN INSPECTION APPARATUS, A...
- Publication number 20090214104
- Publication date Aug 27, 2009
- Advanced Mask Inspection Technology, Inc.
- Shinji SUGIHARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BEAM IRRADIATION APPARATUS WITH DEEP ULTRAVIOLET LIGHT EMISSION DEV...
- Publication number 20090084989
- Publication date Apr 2, 2009
- Advanced Mask Inspection Technology Inc.
- Shinichi Imai
- G01 - MEASURING TESTING
Information Patent Application
MASK BLANK FOR EUV EXPOSURE AND MASK FOR EUV EXPOSURE
- Publication number 20090075184
- Publication date Mar 19, 2009
- Advanced Mask Inspection Technology Inc.
- Masatoshi HIRONO
- B82 - NANO-TECHNOLOGY
Information Patent Application
WAVELENGTH CONVERTER SYSTEM, CRYSTAL STORAGE APPARATUS, AND CRYSTAL...
- Publication number 20080291528
- Publication date Nov 27, 2008
- Advanced Mask Inspection Technology, Inc.
- Iida SUSUMU
- G02 - OPTICS
Information Patent Application
RETICLE DEFECT INSPECTION APPARATUS AND INSPECTION METHOD USING THE...
- Publication number 20080259328
- Publication date Oct 23, 2008
- Advanced Mask Inspection Technology Inc.
- Ryoichi Hirano
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS, CORRECTED IMAGE GENERATION METHOD, AN...
- Publication number 20080260234
- Publication date Oct 23, 2008
- Advanced Mask Inspection Technology
- Kyoji YAMASHITA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION M...
- Publication number 20080259323
- Publication date Oct 23, 2008
- Advanced Mask Inspection Technology Inc.
- Ryoichi Hirano
- G01 - MEASURING TESTING
Information Patent Application
LIGHTING OPTICAL APPARATUS AND SAMPLE INSPECTION APPARATUS
- Publication number 20080237489
- Publication date Oct 2, 2008
- Advanced Mask Inspection Technology Inc.
- Masatoshi HIRONO
- G02 - OPTICS
Information Patent Application
RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION M...
- Publication number 20080239290
- Publication date Oct 2, 2008
- Advanced Mask Inspection Technology, Inc.
- Toshiyuki WATANABE
- G01 - MEASURING TESTING
Information Patent Application
LEVEL DETECTION APPARATUS
- Publication number 20080231846
- Publication date Sep 25, 2008
- Advanced Mask Inspection Technology, Inc.
- Riki OGAWA
- G02 - OPTICS
Information Patent Application
MASK PATTERN INSPECTION APPARATUS WITH KOEHLER ILLUMINATION SYSTEM...
- Publication number 20080204737
- Publication date Aug 28, 2008
- Advanced Mask Inspection Technology Inc.
- Riki OGAWA
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS AND METHOD WITH ENHANCED TEST IMAGE CO...
- Publication number 20080050007
- Publication date Feb 28, 2008
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE CORRECTION METHOD AND APPARATUS FOR USE IN PATTERN INSPECTION...
- Publication number 20080050008
- Publication date Feb 28, 2008
- Advanced Mask Inspection Technology Inc.
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TARGET WORKPIECE INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, AND...
- Publication number 20080036899
- Publication date Feb 14, 2008
- Advanced Mask Inspection Technology Inc.
- Kyoji Yamashita
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, DISPLACEMENT...
- Publication number 20080037860
- Publication date Feb 14, 2008
- Advanced Mask Inspection Technology Inc.
- Kyoji Yamashita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION APPARATUS
- Publication number 20080013072
- Publication date Jan 17, 2008
- Advanced Mask Inspection Technology Inc.
- Shinichi Imai
- G02 - OPTICS
Information Patent Application
PATTERN INSPECTION APPARATUS AND METHOD WITH LOCAL CRITICAL DIMENSI...
- Publication number 20070292014
- Publication date Dec 20, 2007
- Advanced Mask Inspection Technology Inc.
- Yuichi NAKATANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection apparatus and method and workpiece tested thereby
- Publication number 20070165938
- Publication date Jul 19, 2007
- Advanced Mask Inspection Technology Inc.
- Kenichi Matsumura
- G06 - COMPUTING CALCULATING COUNTING

Advanced Mask Inspection Technology, Inc.

Organization

Patents Grantslast 30 patents

Pattern inspection apparatus, image alignment method, displacement...

Image correction method and apparatus for use in pattern inspection...

Image density-adapted automatic mode switchable pattern correction...

Beam irradiation apparatus with deep ultraviolet light emission dev...

Pattern inspection apparatus and method with enhanced test image co...

Pattern inspection apparatus and method with local critical dimensi...

Image correcting method

Photomask inspection apparatus comparing optical proximity correcti...

Pattern inspection apparatus

Target workpiece inspection apparatus, image alignment method, and...

Workpiece inspection apparatus, workpiece inspection method and com...

Die-to-database photomask defect detection using region data to mod...

Die-to-die photomask defect detection using region data to modify i...

Pattern inspection method and apparatus with high-accuracy pattern...

Pattern inspection method and apparatus using linear predictive mod...

Sample inspection apparatus, image alignment method, and program-re...

Image density-adapted automatic mode switchable pattern correction...

Method of operating laser light source

Image correction method

Pattern inspection apparatus

Level detection apparatus

Pattern inspection system using image correction scheme with object...

Light amount measurement device and light amount measurement method

Workpiece inspection apparatus assisting device, workpiece inspecti...

Patents Applicationslast 30 patents

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

INSPECTION SYSTEM

AUTOMATIC FOCUS ADJUSTING MECHANISM AND OPTICAL IMAGE ACQUISITION A...

WAVELENGTH CONVERSION LIGHT SOURCE APPARATUS AND WAVELENGTH CONVERS...

PHOTOMASK INSPECTION METHOD

XY STAGE APPARATUS

ULTRAFINE PATTERN DISCRIMINATION USING TRANSMITTED/REFLECTED WORKPI...

MASK INSPECTION APPARATUS

IMAGE DENSITY-ADAPTED AUTOMATIC MODE SWITCHABLE PATTERN CORRECTION...

PATTERN INSPECTION APPARATUS, PATTERN INSPECTION METHOD, AND COMPUT...

LIGHT POLARIZATION CONTROL USING SERIAL COMBINATION OF SURFACE-SEGM...

ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAG...

PATTERN IMAGE CORRECTING APPARATUS, PATTERN INSPECTION APPARATUS, A...

BEAM IRRADIATION APPARATUS WITH DEEP ULTRAVIOLET LIGHT EMISSION DEV...

MASK BLANK FOR EUV EXPOSURE AND MASK FOR EUV EXPOSURE

WAVELENGTH CONVERTER SYSTEM, CRYSTAL STORAGE APPARATUS, AND CRYSTAL...

RETICLE DEFECT INSPECTION APPARATUS AND INSPECTION METHOD USING THE...

PATTERN INSPECTION APPARATUS, CORRECTED IMAGE GENERATION METHOD, AN...

RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION M...

LIGHTING OPTICAL APPARATUS AND SAMPLE INSPECTION APPARATUS

RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION M...

LEVEL DETECTION APPARATUS

MASK PATTERN INSPECTION APPARATUS WITH KOEHLER ILLUMINATION SYSTEM...

PATTERN INSPECTION APPARATUS AND METHOD WITH ENHANCED TEST IMAGE CO...

IMAGE CORRECTION METHOD AND APPARATUS FOR USE IN PATTERN INSPECTION...

TARGET WORKPIECE INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, AND...

PATTERN INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, DISPLACEMENT...

PATTERN INSPECTION APPARATUS

PATTERN INSPECTION APPARATUS AND METHOD WITH LOCAL CRITICAL DIMENSI...

Pattern inspection apparatus and method and workpiece tested thereby