ADVANCED MICRO-FABRICATION EQUIPMENT, INC. CHINA

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SHANGHAI, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming a plasma resistant coating, compon...
- Patent number 12,123,089
- Issue date Oct 22, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Jiao Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom electrode assembly, plasma processing apparatus, and method...
- Patent number 12,094,693
- Issue date Sep 17, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Jiangtao Pei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone temperature control plasma reactor
- Patent number 12,094,695
- Issue date Sep 17, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor
- Patent number 12,087,548
- Issue date Sep 10, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Leyi Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system
- Patent number 12,080,570
- Issue date Sep 3, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor having a variable coupling of low frequency RF power...
- Patent number 12,062,524
- Issue date Aug 13, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone heating apparatus, bottom electrode assembly, plasma pro...
- Patent number 12,046,458
- Issue date Jul 23, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Sha Rin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency electrode assembly for plasma processing apparatus,...
- Patent number 11,875,970
- Issue date Jan 16, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Longbao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor having a function of tuning low frequency RF power d...
- Patent number 11,830,747
- Issue date Nov 28, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency power supply system, plasma processor, and frequenc...
- Patent number 11,682,541
- Issue date Jun 20, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner assembly for vacuum treatment apparatus, and vacuum treatment...
- Patent number 11,676,803
- Issue date Jun 13, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,670,515
- Issue date Jun 6, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin assembly, an electrostatic chuck and a processing apparatu...
- Patent number 11,626,314
- Issue date Apr 11, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion-resistant gas delivery assembly, and plasma processing ap...
- Patent number 11,621,149
- Issue date Apr 4, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yilong Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor and processing method
- Patent number 11,545,342
- Issue date Jan 3, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system and operating method of the same
- Patent number 11,538,705
- Issue date Dec 27, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Larry Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,515,168
- Issue date Nov 29, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform pumping dual-station vacuum processor
- Patent number 11,387,084
- Issue date Jul 12, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yuejun Gong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma etching apparatus
- Patent number 11,373,843
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process apparatus with low particle contamination and method...
- Patent number 11,371,141
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor and heating apparatus therefor
- Patent number 11,363,680
- Issue date Jun 14, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion-resistant structure for a gas delivery system in a plasma...
- Patent number 11,348,763
- Issue date May 31, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Zengdi Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas showerhead, manufacturing method, and plasma apparatus includin...
- Patent number 11,309,165
- Issue date Apr 19, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor for ultra-high aspect ratio etching and etching meth...
- Patent number 11,189,496
- Issue date Nov 30, 2021
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Gerald Zheyao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve MOCVD reaction process by forming protective film
- Patent number 10,822,721
- Issue date Nov 3, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Xiaoming He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switchable matching network and an inductively coupled plasma proce...
- Patent number 10,685,811
- Issue date Jun 16, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Processing chamber, combination of processing chamber and loadlock,...
- Patent number 10,685,814
- Issue date Jun 16, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature adjusting apparatus and method for a focus ring
- Patent number 10,593,520
- Issue date Mar 17, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Lei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device of changing gas flow pattern and a wafer processing method a...
- Patent number 10,529,577
- Issue date Jan 7, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- TuQiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma confinement apparatus, and method for confining a plasma
- Patent number 10,187,965
- Issue date Jan 22, 2019
- ADVANCED MICRO-FABRICATION EQUIPMENT, INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20240392437
- Publication date Nov 28, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Can XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...
- Publication number 20240071724
- Publication date Feb 29, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE AND RETRACTABLE SEALING PART THEREOF
- Publication number 20220384157
- Publication date Dec 1, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Zhihao WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS, LOWER ELECTRODE ASSEMBLY AND FORMING ME...
- Publication number 20220351933
- Publication date Nov 3, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER ELECTRODE ASSEMBLY AND PLASMA PROCESSING DEVICE
- Publication number 20220246406
- Publication date Aug 4, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Yichuan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR
- Publication number 20220208521
- Publication date Jun 30, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Leyi TU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD...
- Publication number 20220165551
- Publication date May 26, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Jiangtao PEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF ADJUSTING THE SAME
- Publication number 20220157570
- Publication date May 19, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Mingming WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE HEATING APPARATUS, BOTTOM ELECTRODE ASSEMBLY, PLASMA PRO...
- Publication number 20220148859
- Publication date May 12, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Sha RIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD FOR MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL IN...
- Publication number 20220005677
- Publication date Jan 6, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210358781
- Publication date Nov 18, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Heng TAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...
- Publication number 20210172049
- Publication date Jun 10, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Jiao DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Corrosion-Resistant Gas delivery Assembly, and Plasma Processing Ap...
- Publication number 20210151294
- Publication date May 20, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Yilong SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...
- Publication number 20210118716
- Publication date Apr 22, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSOR AND PROCESSING METHOD
- Publication number 20210066043
- Publication date Mar 4, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIO FREQUENCY POWER SUPPLY SYSTEM, PLASMA PROCESSOR, AND FREQUENC...
- Publication number 20210057188
- Publication date Feb 25, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINER ASSEMBLY FOR VACUUM TREATMENT APPARATUS, AND VACUUM TREATMENT...
- Publication number 20200388467
- Publication date Dec 10, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...
- Publication number 20200381213
- Publication date Dec 3, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Zengdi LIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SHOWERHEAD, MANUFACTURING METHOD, AND PLASMA APPARATUS INCLUDIN...
- Publication number 20200321193
- Publication date Oct 8, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR FOR ULTRA-HIGH ASPECT RATIO ETCHING AND ETCHING METH...
- Publication number 20200251345
- Publication date Aug 6, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Gerald Zheyao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Reactor and Heating Apparatus Therefor
- Publication number 20200214087
- Publication date Jul 2, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control Apparatus for Semiconductor Processing Equipmen...
- Publication number 20200211873
- Publication date Jul 2, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Electrode Assembly for Plasma Processing Apparatus,...
- Publication number 20200194231
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Longbao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194276
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194230
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitively Coupled Plasma Etching Apparatus
- Publication number 20200194275
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Yunwen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...
- Publication number 20200185196
- Publication date Jun 11, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-ZONE TEMPERATURE CONTROL PLASMA REACTOR
- Publication number 20200161104
- Publication date May 21, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MATCHING NETWORK AND AN INDUCTIVELY COUPLED PLASMA PROCE...
- Publication number 20200090908
- Publication date Mar 19, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Kui Zhao
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...
- Publication number 20200083087
- Publication date Mar 12, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
88559165 - PRIMO NANOVA
- Serial number 88559165
- Registration number 5996326
- Filing date Aug 1, 2019
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
88179524 - PRIMO HD-RIE
- Serial number 88179524
- Filing date Nov 2, 2018
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
88179574 - PRISMO A8
- Serial number 88179574
- Filing date Nov 2, 2018
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
88179554 - PRISMO HIT3
- Serial number 88179554
- Filing date Nov 2, 2018
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
88103798 - PRIMO TWIN-STAR
- Serial number 88103798
- Filing date Sep 4, 2018
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
79245575 - PRISMO A7
- Serial number 79245575
- Registration number 5864824
- Filing date May 3, 2018
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- 7 - Machines and machine tools
Information Trademark
87736919 - PRIMO MATRIX
- Serial number 87736919
- Registration number 5651155
- Filing date Dec 28, 2017
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
87669168 - PRIMO SSC AD-RIE
- Serial number 87669168
- Registration number 5692875
- Filing date Nov 2, 2017
- Advanced Micro-Fabrication Equipment Inc. China
- 7 - Machines and machine tools
Information Trademark
86802966 - PRIMO NANOVA
- Serial number 86802966
- Filing date Oct 29, 2015
- Advanced Micro-Fabrication Equipment, Inc. China
- 7 - Machines and machine tools

ADVANCED MICRO-FABRICATION EQUIPMENT, INC. CHINA

Organization

Patents Grantslast 30 patents

Method and apparatus for forming a plasma resistant coating, compon...

Bottom electrode assembly, plasma processing apparatus, and method...

Multi-zone temperature control plasma reactor

Plasma reactor

Semiconductor processing system

Plasma reactor having a variable coupling of low frequency RF power...

Multi-zone heating apparatus, bottom electrode assembly, plasma pro...

Radio frequency electrode assembly for plasma processing apparatus,...

Plasma reactor having a function of tuning low frequency RF power d...

Radio frequency power supply system, plasma processor, and frequenc...

Liner assembly for vacuum treatment apparatus, and vacuum treatment...

Capacitively coupled plasma etching apparatus

Lift pin assembly, an electrostatic chuck and a processing apparatu...

Corrosion-resistant gas delivery assembly, and plasma processing ap...

Plasma processor and processing method

Plasma processing system and operating method of the same

Capacitively coupled plasma etching apparatus

Uniform pumping dual-station vacuum processor

Capacitively coupled plasma etching apparatus

Plasma process apparatus with low particle contamination and method...

Plasma reactor and heating apparatus therefor

Corrosion-resistant structure for a gas delivery system in a plasma...

Gas showerhead, manufacturing method, and plasma apparatus includin...

Plasma reactor for ultra-high aspect ratio etching and etching meth...

Method to improve MOCVD reaction process by forming protective film

Switchable matching network and an inductively coupled plasma proce...

Processing chamber, combination of processing chamber and loadlock,...

Temperature adjusting apparatus and method for a focus ring

Device of changing gas flow pattern and a wafer processing method a...

Plasma confinement apparatus, and method for confining a plasma

Patents Applicationslast 30 patents

VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD

METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...

PLASMA PROCESSING DEVICE AND RETRACTABLE SEALING PART THEREOF

PLASMA TREATMENT APPARATUS, LOWER ELECTRODE ASSEMBLY AND FORMING ME...

LOWER ELECTRODE ASSEMBLY AND PLASMA PROCESSING DEVICE

PLASMA REACTOR

BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD...

PLASMA PROCESSING APPARATUS AND METHOD OF ADJUSTING THE SAME

MULTI-ZONE HEATING APPARATUS, BOTTOM ELECTRODE ASSEMBLY, PLASMA PRO...

CONTROL METHOD FOR MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL IN...

SEMICONDUCTOR PROCESSING SYSTEM

METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...

Corrosion-Resistant Gas delivery Assembly, and Plasma Processing Ap...

ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...

PLASMA PROCESSOR AND PROCESSING METHOD

RADIO FREQUENCY POWER SUPPLY SYSTEM, PLASMA PROCESSOR, AND FREQUENC...

LINER ASSEMBLY FOR VACUUM TREATMENT APPARATUS, AND VACUUM TREATMENT...

CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...

GAS SHOWERHEAD, MANUFACTURING METHOD, AND PLASMA APPARATUS INCLUDIN...

PLASMA REACTOR FOR ULTRA-HIGH ASPECT RATIO ETCHING AND ETCHING METH...

Plasma Reactor and Heating Apparatus Therefor

Temperature Control Apparatus for Semiconductor Processing Equipmen...

Radio Frequency Electrode Assembly for Plasma Processing Apparatus,...

Capacitively Coupled Plasma Etching Apparatus

Capacitively Coupled Plasma Etching Apparatus

Capacitively Coupled Plasma Etching Apparatus

METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...

MULTI-ZONE TEMPERATURE CONTROL PLASMA REACTOR

SWITCHABLE MATCHING NETWORK AND AN INDUCTIVELY COUPLED PLASMA PROCE...

LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...

Trademarklast 30 trademarks

88559165 - PRIMO NANOVA

88179524 - PRIMO HD-RIE

88179574 - PRISMO A8

88179554 - PRISMO HIT3

88103798 - PRIMO TWIN-STAR

79245575 - PRISMO A7

87736919 - PRIMO MATRIX

87669168 - PRIMO SSC AD-RIE

86802966 - PRIMO NANOVA