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Advanced Micro-Fabrication Equipment Inc
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CHICAGO, IL, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma treatment apparatus, lower electrode assembly and forming me...
Patent number
12,261,012
Issue date
Mar 25, 2025
ADVANCED MICRO-FABRICATION EQUIPMENT INC.
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning apparatus and method, and film growth reaction apparatus a...
Patent number
9,382,619
Issue date
Jul 5, 2016
Advanced Micro-Fabrication Equipment, Inc.
Yinxin Jiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS
Publication number
20250179640
Publication date
Jun 5, 2025
ADVANCED MICRO-FABRICATION EQUIPMENT INC.
Zhenyu ZHENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Assembly and method for delivering a reactant material onto a subst...
Publication number
20070166459
Publication date
Jul 19, 2007
Advanced Micro-Fabrication Equipment, Inc.
Frank P. Chang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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