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Advanced Refurbishment Technologies LLC d/b/a ARTSemi LLC
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Austin, TX, US
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Patents Applications
last 30 patents
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Patent Application
COMPACT REMOTE PLASMA SOURCE FOR HDP CVD CHAMBERS
Publication number
20240087852
Publication date
Mar 14, 2024
Advanced Refurbishment Technologies LLC d/b/a ARTSemi LLC
Christopher William Lewis
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
System and Method for Endpoint Detection of a Process in a Chamber
Publication number
20090041925
Publication date
Feb 12, 2009
ADVANCED REFURBISHMENT TECHNOLOGIES LLC
Christopher William Lewis
B08 - CLEANING