AMSL NETHERLANDS B.V.

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Servo control system, lithographic apparatus and control method
- Patent number 8,830,442
- Issue date Sep 9, 2014
- AMSL Netherlands B.V.
- Youssef Karel Maria De Vos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of preparing a substrate for lithography, a substrate, a dev...
- Patent number 8,114,568
- Issue date Feb 14, 2012
- AMSL Netherlands B.V.
- Marcus Theodoor Wilhelmus Van Der Heijden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,750,949
- Issue date Jun 15, 2004
- AMSL Netherlands B.V.
- Erik Roelof Loopstra
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT LITHOGRAPHY ALIGNMENT METHOD AND APPARATUS
- Publication number 20120021140
- Publication date Jan 26, 2012
- AMSL NETHERLANDS B.V.
- Johan Frederik Dijksman
- B82 - NANO-TECHNOLOGY
Information Patent Application
Projection System, Lithographic Apparatus, Method of Projecting a B...
- Publication number 20110194088
- Publication date Aug 11, 2011
- AMSL NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...
- Publication number 20090231707
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY

Trademarklast 30 trademarks