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Film forming apparatus
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Patent number 8,377,210
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Issue date Feb 19, 2013
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Anelva Corporation
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Shinji Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film forming apparatus
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Patent number 7,935,187
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Issue date May 3, 2011
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Anelva Corporation
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Shinji Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin-film disposition apparatus
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Patent number 7,267,724
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Issue date Sep 11, 2007
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Anelva Corporation
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Masahiko Tanaka
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer stage with a magnet
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Patent number 7,164,571
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Issue date Jan 16, 2007
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Anelva Corporation
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Sunil Wickramanayaka
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H01 - BASIC ELECTRIC ELEMENTS
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Cleaning gas and etching gas
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Patent number 7,138,364
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Issue date Nov 21, 2006
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Asahi Glass Company, Limited
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Yutaka Ohira
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dry etching method for magnetic material
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Patent number 7,060,194
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Issue date Jun 13, 2006
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Anelva Corporation
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Yoshimitsu Kodaira
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Brine supply unit
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Patent number 7,011,744
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Issue date Mar 14, 2006
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Choshu Industry Co., Ltd.
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Tomio Takamura
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G05 - CONTROLLING REGULATING
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Ionization apparatus
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Patent number 7,005,634
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Issue date Feb 28, 2006
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Anelva Corporation
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Yoshiro Shiokawa
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H01 - BASIC ELECTRIC ELEMENTS
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Silicon oxide film formation method
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Patent number 6,955,836
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Issue date Oct 18, 2005
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Anelva Corporation
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Akira Kumagai
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILM FORMING APPARATUS
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Publication number 20130133571
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Publication date May 30, 2013
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ANELVA CORPORATION
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Shinji Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILM FORMING APPARATUS
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Publication number 20110192344
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Publication date Aug 11, 2011
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ANELVA CORPORATION
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Shinji Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Electrostatic chuck device
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Publication number 20090122459
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Publication date May 14, 2009
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ANELVA CORPORATION
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Shigeru Mizuno
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H01 - BASIC ELECTRIC ELEMENTS
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Electrostatic chuck device
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Publication number 20090059462
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Publication date Mar 5, 2009
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ANELVA CORPORATION
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Shigeru Mizuno
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma Processing Apparatus
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Publication number 20090044910
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Publication date Feb 19, 2009
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ANELVA CORPORATION
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Tomoaki Osada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF CLEANING A CVD DEVICE
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Publication number 20080276957
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Publication date Nov 13, 2008
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ANELVA CORPORATION
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Hiroshi Nogami
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILM FORMING APPARATUS
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Publication number 20080178796
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Publication date Jul 31, 2008
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ANELVA CORPORATION
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Shinji Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Surface processing apparatus
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Publication number 20080113149
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Publication date May 15, 2008
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ANELVA CORPORATION
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Akihiro Egami
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H01 - BASIC ELECTRIC ELEMENTS
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MAGNETORESISTANCE EFFECT DEVICE
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Publication number 20080055793
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Publication date Mar 6, 2008
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ANELVA CORPORATION
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David D. Djayaprawira
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CVD system and substrate cleaning method
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Publication number 20080044589
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Publication date Feb 21, 2008
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ANELVA CORPORATION
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Kazuo Ichikawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Electrostatic chuck device
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Publication number 20060158823
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Publication date Jul 20, 2006
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ANELVA CORPORATION
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Shigeru Mizuno
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H01 - BASIC ELECTRIC ELEMENTS
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Vacuum Processing Apparatus
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Publication number 20050217576
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Publication date Oct 6, 2005
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ANELVA CORPORATION
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Keiji Ishibashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer Stage
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Publication number 20050185359
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Publication date Aug 25, 2005
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ANELVA CORPORATION
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Sunil Wickramanayaka
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H01 - BASIC ELECTRIC ELEMENTS
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Film forming apparatus
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Publication number 20050115830
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Publication date Jun 2, 2005
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ANELVA CORPORATION
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Shinji Furukawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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