Applied Komatsu Technlology, Inc.

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Tokyo, JP

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Collimated sputtering of semiconductor and other films
- Patent number 6,362,097
- Issue date Mar 26, 2002
- Applied Komatsu Technlology, Inc.
- Richard Ernest Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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