APPLIED KOMATSU TECHNOLOGY, INC

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SANTA CLARA, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Surface-treated shower head for use in a substrate processing chamber
- Patent number 6,647,993
- Issue date Nov 18, 2003
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF matching network with distributed outputs
- Patent number 6,552,297
- Issue date Apr 22, 2003
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting the endpoint of a chamber cleaning
- Patent number 6,534,007
- Issue date Mar 18, 2003
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer shuttle
- Patent number 6,517,303
- Issue date Feb 11, 2003
- Applied Komatsu Technology, Inc.
- John M. White
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Etching aluminum over refractory metal with successive plasmas
- Patent number 6,472,329
- Issue date Oct 29, 2002
- Applied Komatsu Technology, Inc.
- Haruhiro Harry Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer shuttle having a magnetic drive
- Patent number 6,471,459
- Issue date Oct 29, 2002
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for white powder reduction in silicon nitride...
- Patent number 6,468,601
- Issue date Oct 22, 2002
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-function chamber for a substrate processing system
- Patent number 6,435,868
- Issue date Aug 20, 2002
- Applied Komatsu Technology, Inc.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated and cooled vacuum chamber shield
- Patent number 6,432,203
- Issue date Aug 13, 2002
- Applied Komatsu Technology, Inc.
- Russell Black
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support frame for substrates
- Patent number 6,371,712
- Issue date Apr 16, 2002
- Applied Komatsu Technology, Inc.
- John M. White
- C30 - CRYSTAL GROWTH
Information Patent Grant
RF matching network with distributed outputs
- Patent number 6,359,250
- Issue date Mar 19, 2002
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition using a finger type shadow frame
- Patent number 6,355,108
- Issue date Mar 12, 2002
- Applied Komatsu Technology, Inc.
- Tae Kyung Won
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing amorphous silicon based films having controlle...
- Patent number 6,352,910
- Issue date Mar 5, 2002
- Applied Komatsu Technology, Inc.
- William R. Harshbarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolation valves
- Patent number 6,308,932
- Issue date Oct 30, 2001
- Applied Komatsu Technology, Inc.
- Gary C. Ettinger
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method of annealing large area glass substrates
- Patent number 6,294,219
- Issue date Sep 25, 2001
- Applied Komatsu Technology, Inc.
- Chuang-Chuang Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling gas flow in a substrate processing system
- Patent number 6,286,230
- Issue date Sep 11, 2001
- Applied Komatsu Technology, Inc.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tilted sputtering target with shield to block contaminants
- Patent number 6,267,851
- Issue date Jul 31, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated substrate processing systems and methods
- Patent number 6,257,045
- Issue date Jul 10, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Modular substrate processing system
- Patent number 6,235,634
- Issue date May 22, 2001
- Applied Komatsu Technology, Inc.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating a substrate support in a substrate handling chamber
- Patent number 6,225,601
- Issue date May 1, 2001
- Applied Komatsu Technology, Inc.
- Emanuel Beer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated substrate processing system
- Patent number 6,215,897
- Issue date Apr 10, 2001
- Applied Komatsu Technology, Inc.
- Emanuel Beer
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for substrate transfer and processing
- Patent number 6,213,704
- Issue date Apr 10, 2001
- Applied Komatsu Technology, Inc.
- John M. White
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Automated substrate processing systems and methods
- Patent number 6,205,870
- Issue date Mar 27, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer shuttle having a magnetic drive
- Patent number 6,206,176
- Issue date Mar 27, 2001
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source with multiple magnetic flux sources each having a fer...
- Patent number 6,204,607
- Issue date Mar 20, 2001
- Applied Komatsu Technology, Inc.
- Albert R. Ellingboe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Autoclave bonding of sputtering target assembly
- Patent number 6,199,259
- Issue date Mar 13, 2001
- Applied Komatsu Technology, Inc.
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-function chamber for a substrate processing system
- Patent number 6,193,507
- Issue date Feb 27, 2001
- Applied Komatsu Technology, Inc.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating element with a diamond sealing material
- Patent number 6,191,390
- Issue date Feb 20, 2001
- Applied Komatsu Technology, Inc.
- Carl A. Sorensen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-treated shower head for use in a substrate processing chamber
- Patent number 6,182,603
- Issue date Feb 6, 2001
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for electrostatically maintaining substrate fl...
- Patent number 6,177,023
- Issue date Jan 23, 2001
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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Patents Applicationslast 30 patents

Information Patent Application
Heated and cooled vacuum chamber shield
- Publication number 20050150757
- Publication date Jul 14, 2005
- Applied Komatsu Technology, Inc.
- Russell Black
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate transfer shuttle
- Publication number 20030190220
- Publication date Oct 9, 2003
- Applied Komatsu Technology, Inc.
- John M. White
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Detecting the endpoint of a chamber cleaning
- Publication number 20030159711
- Publication date Aug 28, 2003
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF matching network with distributed outputs
- Publication number 20020046989
- Publication date Apr 25, 2002
- Applied Komatsu Technology, Inc.
- Wendell T. Blonigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-function chamber for a substrate processing system
- Publication number 20010000747
- Publication date May 3, 2001
- Applied Komatsu Technology, Inc.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
75533080 - CLEANLINC
- Serial number 75533080
- Filing date Aug 7, 1998
- Applied Komatsu Technology, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74520678 - APPLIED KOMATSU TECHNOLOGY
- Serial number 74520678
- Filing date May 3, 1994
- APPLIED KOMATSU TECHNOLOGY, INC.
- 7 - Machines and machine tools
Information Trademark
74521151
- Serial number 74521151
- Filing date May 3, 1994
- APPLIED KOMATSU TECHNOLOGY, INC.
- 7 - Machines and machine tools
Information Trademark
74472299 - AKT
- Serial number 74472299
- Registration number 2114392
- Filing date Dec 17, 1993
- APPLIED KOMATSU TECHNOLOGY, INC.
- 7 - Machines and machine tools

APPLIED KOMATSU TECHNOLOGY, INC

Organization

Patents Grantslast 30 patents

Surface-treated shower head for use in a substrate processing chamber

RF matching network with distributed outputs

Method and apparatus for detecting the endpoint of a chamber cleaning

Substrate transfer shuttle

Etching aluminum over refractory metal with successive plasmas

Substrate transfer shuttle having a magnetic drive

Apparatus and method for white powder reduction in silicon nitride...

Multi-function chamber for a substrate processing system

Heated and cooled vacuum chamber shield

Support frame for substrates

RF matching network with distributed outputs

Film deposition using a finger type shadow frame

Method of depositing amorphous silicon based films having controlle...

Isolation valves

Method of annealing large area glass substrates

Method of controlling gas flow in a substrate processing system

Tilted sputtering target with shield to block contaminants

Automated substrate processing systems and methods

Modular substrate processing system

Heating a substrate support in a substrate handling chamber

Automated substrate processing system

Method and apparatus for substrate transfer and processing

Automated substrate processing systems and methods

Substrate transfer shuttle having a magnetic drive

Plasma source with multiple magnetic flux sources each having a fer...

Autoclave bonding of sputtering target assembly

Multi-function chamber for a substrate processing system

Heating element with a diamond sealing material

Surface-treated shower head for use in a substrate processing chamber

Method and apparatus for electrostatically maintaining substrate fl...

Patents Applicationslast 30 patents

Heated and cooled vacuum chamber shield

Substrate transfer shuttle

Detecting the endpoint of a chamber cleaning

RF matching network with distributed outputs

Multi-function chamber for a substrate processing system

Trademarklast 30 trademarks

75533080 - CLEANLINC

74520678 - APPLIED KOMATSU TECHNOLOGY

74521151

74472299 - AKT