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  • Information Patent Application

    Combination CVD/ALD method and source
    • Publication number 20140193579
    • Publication date Jul 10, 2014
    • ASM INTERNATIONAL N.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Combination CVD/ALD method and source
    • Publication number 20120164329
    • Publication date Jun 28, 2012
    • ASM INTERNATIONAL N.V.
    • Tom Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOW RESISTIVITY METAL CARBONITRIDE THIN FILM DEPOSITION BY ATOMIC L...
    • Publication number 20080317955
    • Publication date Dec 25, 2008
    • ASM INTERNATIONAL N.V.
    • Wei-Min Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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