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Chandler, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Containment and exhaust system for substrate polishing components
Patent number
12,145,236
Issue date
Nov 19, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate carrier head and processing system
Patent number
12,023,778
Issue date
Jul 2, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for insitu adjustment of wafer slip detection...
Patent number
11,904,431
Issue date
Feb 20, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Planarized membrane and methods for substrate processing systems
Patent number
11,685,012
Issue date
Jun 27, 2023
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization carrier system
Patent number
11,376,705
Issue date
Jul 5, 2022
AXUS TECHNOLOGY LLC
Daniel R. Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for wafer backgrinding and edge trimming on on...
Patent number
9,390,903
Issue date
Jul 12, 2016
Axus Technology, LLC
Daniel R. Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for surface grinding and edge trimming workpieces
Patent number
8,944,887
Issue date
Feb 3, 2015
Axus Technology, LLC
Daniel R. Trojan
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR INSITU ADJUSTMENT OF WAFER SLIP DETECTION...
Publication number
20240399535
Publication date
Dec 5, 2024
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20240227116
Publication date
Jul 11, 2024
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20240131652
Publication date
Apr 25, 2024
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR IN-SITU MONITORING OF CHEMICAL MECHANICAL...
Publication number
20220395956
Publication date
Dec 15, 2022
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
Publication number
20220305618
Publication date
Sep 29, 2022
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CARRIER HEAD AND PROCESSING SYSTEM
Publication number
20220126419
Publication date
Apr 28, 2022
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
Publication number
20220088744
Publication date
Mar 24, 2022
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20210178548
Publication date
Jun 17, 2021
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR INSITU ADJUSTMENT OF WAFER SLIP DETECTION...
Publication number
20210031331
Publication date
Feb 4, 2021
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
TEMPERATURE CONTROLLED SUBSTRATE CARRIER AND POLISHING COMPONENTS
Publication number
20210005479
Publication date
Jan 7, 2021
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
ATMOSPHERIC PLASMA IN WAFER PROCESSING SYSTEM OPTIMIZATION
Publication number
20200381262
Publication date
Dec 3, 2020
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL MECHANICAL PLANARIZATION CARRIER SYSTEM
Publication number
20190291237
Publication date
Sep 26, 2019
AXUS TECHNOLOGY, LLC
Daniel R. Trojan
B24 - GRINDING POLISHING
Information
Patent Application
CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
Publication number
20180311784
Publication date
Nov 1, 2018
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL PLANARIZATION CARRIER SYSTEM
Publication number
20170355062
Publication date
Dec 14, 2017
AXUS TECHNOLOGY, LLC
Daniel R. Trojan
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR WAFER BACKGRINDING AND EDGE TRIMMING ON ON...
Publication number
20140073223
Publication date
Mar 13, 2014
AXUS TECHNOLOGY, LLC
Daniel R. Trojan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SURFACE GRINDING AND EDGE TRIMMING WORKPIECES
Publication number
20120202406
Publication date
Aug 9, 2012
AXUS TECHNOLOGY, LLC
Daniel R. Trojan
B24 - GRINDING POLISHING
Trademark
last 30 trademarks
Information
Trademark
97571811 - AQUARIUS
Serial number
97571811
Registration number
7580874
Filing date
Aug 30, 2022
Axus Technology, LLC
7 - Machines and machine tools
Information
Trademark
97571803 - AQUARIUS
Serial number
97571803
Registration number
7580873
Filing date
Aug 30, 2022
Axus Technology, LLC
7 - Machines and machine tools
Information
Trademark
90127472 - CAPSTONE
Serial number
90127472
Registration number
6413042
Filing date
Aug 20, 2020
Axus Technology, LLC
7 - Machines and machine tools
Information
Trademark
87830822 - AXUS TECHNOLOGY
Serial number
87830822
Registration number
6848991
Filing date
Mar 12, 2018
Axus Technology, LLC
7 - Machines and machine tools
Information
Trademark
77735460 - AXUS TECHNOLOGY
Serial number
77735460
Registration number
3884791
Filing date
May 12, 2009
Axus Technology LLC
7 - Machines and machine tools