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Pirani+capacitive sensor
- Patent number 5,962,791
- Issue date Oct 5, 1999
- Balzers Aktiengellschaft
- Urs Walchli
- G01 - MEASURING TESTING
Information Patent Grant
Method for realizing a filter edge, optical thin-film and optical d...
- Patent number 5,493,442
- Issue date Feb 20, 1996
- Balzers Aktiengellschaft
- Jurgen Buchholz
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

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