BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD

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BEIJING, CN

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Patents Grantslast 30 patents

Information Patent Grant
Rapid thermal processing system with cooling system
- Patent number 12,362,194
- Issue date Jul 15, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece support for a thermal processing system
- Patent number 12,352,306
- Issue date Jul 8, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure control system for a multi-head processing chamber of a pl...
- Patent number 12,347,661
- Issue date Jul 1, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
- Patent number 12,347,677
- Issue date Jul 1, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with outer gas channel insert
- Patent number 12,340,981
- Issue date Jun 24, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Configurable faraday shield
- Patent number 12,334,312
- Issue date Jun 17, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
- Patent number 12,308,209
- Issue date May 20, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma strip tool with movable insert
- Patent number 12,283,467
- Issue date Apr 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- B08 - CLEANING
Information Patent Grant
Hybrid plasma source array
- Patent number 12,266,503
- Issue date Apr 1, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly for plasma processing apparatus
- Patent number 12,261,073
- Issue date Mar 25, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,183,558
- Issue date Dec 31, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 12,174,616
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co. Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooled shield for ICP source
- Patent number 12,159,770
- Issue date Dec 3, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etch process using plasma in conjunction with a rapid...
- Patent number 12,159,789
- Issue date Dec 3, 2024
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post etch defluorination process
- Patent number 12,148,608
- Issue date Nov 19, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Vijay Vaniapura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen injection for arc lamps
- Patent number 12,120,780
- Issue date Oct 15, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc lamp with forming gas for thermal processing systems
- Patent number 12,119,216
- Issue date Oct 15, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly for plasma processing apparatus
- Patent number 12,119,254
- Issue date Oct 15, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and processing system
- Patent number 12,087,608
- Issue date Sep 10, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Support plate for localized heating in thermal processing systems
- Patent number 12,080,568
- Issue date Sep 3, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid thermal processing system with cooling system
- Patent number 12,068,177
- Issue date Aug 20, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,046,489
- Issue date Jul 23, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual frequency matching circuit for inductively coupled plasma (ICP...
- Patent number 12,040,159
- Issue date Jul 16, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preheat processes for millisecond anneal system
- Patent number 12,027,427
- Issue date Jul 2, 2024
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for hydrogen assisted atmospheric radical oxidation
- Patent number 12,014,920
- Issue date Jun 18, 2024
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing workpiece, plasma processing apparatus and se...
- Patent number 12,009,220
- Issue date Jun 11, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Fei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin assembly for a plasma processing apparatus
- Patent number 12,009,184
- Issue date Jun 11, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Changle Guan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable mode plasma chamber utilizing tunable plasma potential
- Patent number 12,002,652
- Issue date Jun 4, 2024
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly for plasma processing apparatus
- Patent number 12,002,701
- Issue date Jun 4, 2024
- Mattson Technology, Inc.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
Plasma Strip Tool With Movable Insert
- Publication number 20250218740
- Publication date Jul 3, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- B08 - CLEANING
Information Patent Application
PLASMA SOURCE COOLING SYSTEM
- Publication number 20250218737
- Publication date Jul 3, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Songjae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES
- Publication number 20250216154
- Publication date Jul 3, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid Plasma Source Array
- Publication number 20250201517
- Publication date Jun 19, 2025
- Beijing E-Town Semiconductor Technology Co., LTD
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Assembly for Plasma Processing Apparatus
- Publication number 20250191958
- Publication date Jun 12, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
- Publication number 20250167008
- Publication date May 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250112030
- Publication date Apr 3, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Kenneth Scott Alexander Butcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control System For Adaptive Control Of A Thermal Processing System
- Publication number 20250093852
- Publication date Mar 20, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Structure for Thermal Processing Systems
- Publication number 20250096032
- Publication date Mar 20, 2025
- Mattson Technology, Inc.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid...
- Publication number 20250062133
- Publication date Feb 20, 2025
- Mattson Technology, Inc.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cooled Shield for ICP Source
- Publication number 20250062103
- Publication date Feb 20, 2025
- Mattson Technology, Inc.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW CONTROL METHOD FOR AIR FLOTATION CYCLONE OPERATION OF LOW-P...
- Publication number 20250022726
- Publication date Jan 16, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION ELEMENT AND HEAT TREATMENT DEVICE CONTAINING THE SAME
- Publication number 20250022725
- Publication date Jan 16, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD FOR SEMICONDUCTOR PROCESS
- Publication number 20250022720
- Publication date Jan 16, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-PRESSURE OXIDATION TREATMENT METHOD AND DEVICE FOR SEMICONDUCTO...
- Publication number 20250014892
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS PLATFORM
- Publication number 20250014931
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Haiwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS
- Publication number 20250014935
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND ACCURATE TEMPERATURE MEASUREMENT METHO...
- Publication number 20240426746
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...
- Publication number 20240430986
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER AND OXIDATION DEVICE
- Publication number 20240412950
- Publication date Dec 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Jianmin JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Apparatus And Processing System
- Publication number 20240404858
- Publication date Dec 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Workpiece Processing Apparatus and Methods for the Treatment of Wor...
- Publication number 20240404797
- Publication date Dec 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rapid Thermal Processing System With Cooling System
- Publication number 20240379390
- Publication date Nov 14, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING WORKPIECE, PLASMA PROCESSING APPARATUS AND SE...
- Publication number 20240355634
- Publication date Oct 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Fei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240347356
- Publication date Oct 17, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP...
- Publication number 20240339298
- Publication date Oct 10, 2024
- Mattson Technology, Inc.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20240304502
- Publication date Sep 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
- Publication number 20240297019
- Publication date Sep 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20240290664
- Publication date Aug 29, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- G01 - MEASURING TESTING

BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD

Organization

Patents Grantslast 30 patents

Rapid thermal processing system with cooling system

Workpiece support for a thermal processing system

Pressure control system for a multi-head processing chamber of a pl...

Enhanced ignition in inductively coupled plasmas for workpiece proc...

Workpiece processing apparatus with outer gas channel insert

Configurable faraday shield

Workpiece processing apparatus with plasma and thermal processing s...

Plasma strip tool with movable insert

Hybrid plasma source array

Electrostatic chuck assembly for plasma processing apparatus

Workpiece processing apparatus with thermal processing systems

Control system for adaptive control of a thermal processing system

Support structure for thermal processing systems

Cooled shield for ICP source

Atomic layer etch process using plasma in conjunction with a rapid...

Post etch defluorination process

Nitrogen injection for arc lamps

Arc lamp with forming gas for thermal processing systems

Electrostatic chuck assembly for plasma processing apparatus

Transfer apparatus and processing system

Support plate for localized heating in thermal processing systems

Rapid thermal processing system with cooling system

Workpiece processing apparatus with thermal processing systems

Dual frequency matching circuit for inductively coupled plasma (ICP...

Preheat processes for millisecond anneal system

Apparatus for hydrogen assisted atmospheric radical oxidation

Method for processing workpiece, plasma processing apparatus and se...

Lift pin assembly for a plasma processing apparatus

Variable mode plasma chamber utilizing tunable plasma potential

Electrostatic chuck assembly for plasma processing apparatus

Patents Applicationslast 30 patents

Plasma Strip Tool With Movable Insert

PLASMA SOURCE COOLING SYSTEM

THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES

Hybrid Plasma Source Array

Electrostatic Chuck Assembly for Plasma Processing Apparatus

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

Control System For Adaptive Control Of A Thermal Processing System

Support Structure for Thermal Processing Systems

Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid...

Cooled Shield for ICP Source

AIRFLOW CONTROL METHOD FOR AIR FLOTATION CYCLONE OPERATION OF LOW-P...

GAS DISTRIBUTION ELEMENT AND HEAT TREATMENT DEVICE CONTAINING THE SAME

TEMPERATURE CONTROL METHOD FOR SEMICONDUCTOR PROCESS

LOW-PRESSURE OXIDATION TREATMENT METHOD AND DEVICE FOR SEMICONDUCTO...

PROCESS PLATFORM

ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA PROCESSING APPARATUS

HEAT TREATMENT APPARATUS AND ACCURATE TEMPERATURE MEASUREMENT METHO...

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...

REACTION CHAMBER AND OXIDATION DEVICE

Transfer Apparatus And Processing System

Workpiece Processing Apparatus and Methods for the Treatment of Wor...

Support Plate for Localized Heating in Thermal Processing Systems

Rapid Thermal Processing System With Cooling System

METHOD FOR PROCESSING WORKPIECE, PLASMA PROCESSING APPARATUS AND SE...

Workpiece Processing Apparatus with Thermal Processing Systems

Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP...

Preheat Processes for Millisecond Anneal System

Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential

Transmission-Based Temperature Measurement of a Workpiece in a Ther...