BEIJING U-PRECISION TECH CO., LTD.

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Patents Grantslast 30 patents

Information Patent Grant
Laser interference photolithography system
- Patent number 12,038,690
- Issue date Jul 16, 2024
- Tsinghua University
- Leijie Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane grating calibration system
- Patent number 11,940,349
- Issue date Mar 26, 2024
- Tsinghua University
- Leijie Wang
- G01 - MEASURING TESTING
Information Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
- Patent number 11,703,361
- Issue date Jul 18, 2023
- BEIJING U-PRECISION TECH CO., LTD.
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Two-degree-of-freedom heterodyne grating interferometry measurement...
- Patent number 11,307,018
- Issue date Apr 19, 2022
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic-fluid momentum sphere
- Patent number 10,597,172
- Issue date Mar 24, 2020
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic levitation reaction sphere
- Patent number 10,532,832
- Issue date Jan 14, 2020
- Tsinghua University
- Ming Zhang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Six-degree-of-freedom displacement measurement method for exposure...
- Patent number 9,995,569
- Issue date Jun 12, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coarse motion and fine motion integrated reticle stage driven by pl...
- Patent number 9,904,183
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetically suspended coarse motion and fine motion integrated ret...
- Patent number 9,791,789
- Issue date Oct 17, 2017
- Tsinghua University
- Ming Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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Patents Applicationslast 30 patents

Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
- Publication number 20240264534
- Publication date Aug 8, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...
- Publication number 20240061352
- Publication date Feb 22, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM
- Publication number 20240053683
- Publication date Feb 15, 2024
- Tsinghua University
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM AND METHOD
- Publication number 20230417532
- Publication date Dec 28, 2023
- BEIJING U-PRECISION TECH CO., LTD.
- Guohua SUN
- G01 - MEASURING TESTING
Information Patent Application
HETERODYNE FIBER INTERFEROMETER DISPLACEMENT MEASURING SYSTEM AND M...
- Publication number 20230408250
- Publication date Dec 21, 2023
- BEIJING U-PRECISION TECH CO.. LTD.
- Guohua SUN
- G01 - MEASURING TESTING
Information Patent Application
HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRAC...
- Publication number 20230366667
- Publication date Nov 16, 2023
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
- Publication number 20230280658
- Publication date Sep 7, 2023
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
PLANE GRATING CALIBRATION SYSTEM
- Publication number 20220260452
- Publication date Aug 18, 2022
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM
- Publication number 20210262834
- Publication date Aug 26, 2021
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G01 - MEASURING TESTING
Information Patent Application
TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...
- Publication number 20210164772
- Publication date Jun 3, 2021
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
MAGNETIC-FLUID MOMENTUM SPHERE
- Publication number 20180273212
- Publication date Sep 27, 2018
- TSINGHUA UNIVERSITY
- Yu ZHU
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Application
MAGNETIC LEVITATION REACTION SPHERE
- Publication number 20180170581
- Publication date Jun 21, 2018
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G05 - CONTROLLING REGULATING
Information Patent Application
SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...
- Publication number 20180080757
- Publication date Mar 22, 2018
- TSINGHUA UNIVERSITY
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Application
COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...
- Publication number 20170115580
- Publication date Apr 27, 2017
- TSINGHUA UNIVERSITY
- Yu ZHU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...
- Publication number 20170052461
- Publication date Feb 23, 2017
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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Trademarklast 30 trademarks

Information Trademark
88918463 - U IPRECISION
- Serial number 88918463
- Filing date May 15, 2020
- Beijing U-precision Tech Co., Ltd.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

BEIJING U-PRECISION TECH CO., LTD.

Organization

Patents Grantslast 30 patents

Laser interference photolithography system

Plane grating calibration system

Five-degree-of-freedom heterodyne grating interferometry system

Two-degree-of-freedom heterodyne grating interferometry measurement...

Magnetic-fluid momentum sphere

Magnetic levitation reaction sphere

Six-degree-of-freedom displacement measurement method for exposure...

Coarse motion and fine motion integrated reticle stage driven by pl...

Magnetically suspended coarse motion and fine motion integrated ret...

Patents Applicationslast 30 patents

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM

EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...

LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM

INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM AND METHOD

HETERODYNE FIBER INTERFEROMETER DISPLACEMENT MEASURING SYSTEM AND M...

HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRAC...

DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...

PLANE GRATING CALIBRATION SYSTEM

FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM

TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...

MAGNETIC-FLUID MOMENTUM SPHERE

MAGNETIC LEVITATION REACTION SPHERE

SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...

COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...

MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...

Trademarklast 30 trademarks

88918463 - U IPRECISION