TREA

Brooks Automation Germany GmbH

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Patents Grantslast 30 patents

  • Information Patent Grant

    Simultaneous wafer ID reading
    • Patent number 10,096,500
    • Issue date Oct 9, 2018
    • Brooks Automation Germany GmbH
    • David Barker
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Semiconductor cleaner systems and methods
    • Patent number 10,096,461
    • Issue date Oct 9, 2018
    • Brooks Automation Germany, GmbH
    • Lutz Rebstock
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

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