BROOKS AUTOMATION (GERMANY) GMBH

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Mistelgau, DE

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Patents Grantslast 30 patents

Information Patent Grant
Humidity control in semiconductor systems
- Patent number 12,148,642
- Issue date Nov 19, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 12,087,603
- Issue date Sep 10, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic handling buffer for bare stocker
- Patent number 11,978,652
- Issue date May 7, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle compartment and diffusor plate
- Patent number 10,727,098
- Issue date Jul 28, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removable compartments for workpiece stocker
- Patent number 10,643,878
- Issue date May 5, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 10,593,576
- Issue date Mar 17, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Container storage add-on for bare workpiece stocker
- Patent number 10,529,609
- Issue date Jan 7, 2020
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor stocker systems and methods
- Patent number 10,453,722
- Issue date Oct 22, 2019
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Tool compiler
- Patent number 10,452,362
- Issue date Oct 22, 2019
- Brooks Automation (Germany) GmbH
- Francois Tanguy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Cleaning systems and methods for semiconductor substrate storage ar...
- Patent number 10,065,222
- Issue date Sep 4, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 10,043,651
- Issue date Aug 7, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Semiconductor cleaner systems and methods
- Patent number 10,026,604
- Issue date Jul 17, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Grant
Clean transfer robot
- Patent number 9,943,969
- Issue date Apr 17, 2018
- Brooks Automation (Germany) GmbH
- David Barker
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Buffer station for stocker system
- Patent number 9,919,871
- Issue date Mar 20, 2018
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Inventory monitoring of live-storage systems by means of RFID
- Patent number 8,955,748
- Issue date Feb 17, 2015
- Brooks Automation (Germany) GmbH
- Gerald Dittrich
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION SYSTEM
- Publication number 20250006527
- Publication date Jan 2, 2025
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20240226969
- Publication date Jul 11, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- B08 - CLEANING
Information Patent Application
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
- Publication number 20240006210
- Publication date Jan 4, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230418169
- Publication date Dec 28, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM
- Publication number 20230187244
- Publication date Jun 15, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Alexander WENDEL
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
- Publication number 20230170240
- Publication date Jun 1, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...
- Publication number 20230135865
- Publication date May 4, 2023
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
Integrated handling system for semiconductor articles
- Publication number 20230085278
- Publication date Mar 16, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20230062287
- Publication date Mar 2, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CORE MODULE FOR SEMICONDUCTOR PRODUCTION FACILITY MACHINERY
- Publication number 20230017221
- Publication date Jan 19, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230011873
- Publication date Jan 12, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
- Publication number 20210057255
- Publication date Feb 25, 2021
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM
- Publication number 20210050237
- Publication date Feb 18, 2021
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TOOL COMPILER
- Publication number 20200050435
- Publication date Feb 13, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Francois TANGUY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20200051845
- Publication date Feb 13, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHOD FOR CLEANING A SYNTHETIC SURFACE
- Publication number 20200043766
- Publication date Feb 6, 2020
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20190148133
- Publication date May 16, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20190139803
- Publication date May 9, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION
- Publication number 20190019709
- Publication date Jan 17, 2019
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...
- Publication number 20180369885
- Publication date Dec 27, 2018
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20180350589
- Publication date Dec 6, 2018
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
TOOL COMPILER
- Publication number 20180239594
- Publication date Aug 23, 2018
- BROOKS AUTOMATION (GERMANY) GmbH
- Francois TANGUY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
- Publication number 20170338139
- Publication date Nov 23, 2017
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20170162413
- Publication date Jun 8, 2017
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz REBSTOCK
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20170025288
- Publication date Jan 26, 2017
- BROOKS AUTOMATION (GERMANY) GmbH
- Lutz Rebstock
- B08 - CLEANING
Information Patent Application
INVENTORY MONITORING OF LIVE-STORAGE SYSTEMS BY MEANS OF RFID
- Publication number 20130075470
- Publication date Mar 28, 2013
- BROOKS AUTOMATION (GERMANY) GMBH
- Gerald Dittrich
- G06 - COMPUTING CALCULATING COUNTING

BROOKS AUTOMATION (GERMANY) GMBH

Organization

Patents Grantslast 30 patents

Humidity control in semiconductor systems

Inspection system

Automatic handling buffer for bare stocker

Reticle compartment and diffusor plate

Removable compartments for workpiece stocker

Inspection system

Container storage add-on for bare workpiece stocker

Semiconductor stocker systems and methods

Tool compiler

Cleaning systems and methods for semiconductor substrate storage ar...

Semiconductor cleaner systems and methods

Semiconductor cleaner systems and methods

Clean transfer robot

Buffer station for stocker system

Inventory monitoring of live-storage systems by means of RFID

Patents Applicationslast 30 patents

INSPECTION SYSTEM

METHOD FOR CLEANING A SYNTHETIC SURFACE

METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...

Integrated handling system for semiconductor articles

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

CORE MODULE FOR SEMICONDUCTOR PRODUCTION FACILITY MACHINERY

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

INSPECTION SYSTEM

TOOL COMPILER

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

METHOD FOR CLEANING A SYNTHETIC SURFACE

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION

CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE AR...

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

TOOL COMPILER

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS

INVENTORY MONITORING OF LIVE-STORAGE SYSTEMS BY MEANS OF RFID

Trademarklast 30 trademarks