Brooks Automation GmbH

Organization

Jena, DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Reticle compartment and diffusor plate
- Patent number 11,171,024
- Issue date Nov 9, 2021
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stackable substrate carriers
- Patent number 10,770,323
- Issue date Sep 8, 2020
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Redundantable robot assembly for workpiece transfer
- Patent number 9,889,558
- Issue date Feb 13, 2018
- Brooks Automation, GmbH
- Lutz Rebstock
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer mechanism with multiple wafer handling capability
- Patent number 9,728,436
- Issue date Aug 8, 2017
- Brooks Automation, GmbH
- Farzad Tabrizi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking station for substrate transport containers
- Patent number 6,641,348
- Issue date Nov 4, 2003
- Brooks Automation GmbH
- Klaus Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for controlling the drive of mechanisms operating separately...
- Patent number 6,551,049
- Issue date Apr 22, 2003
- Brooks Automation GmbH
- Lawrence R. Gravell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Integrated material management module
- Patent number 6,418,352
- Issue date Jul 9, 2002
- Brooks Automation GmbH
- Raymond W. Ellis
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device and method for detecting and distinguishing shelf-forming su...
- Patent number 6,403,945
- Issue date Jun 11, 2002
- Brooks Automation GmbH
- Manfred Roessler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loading and unloading station for semiconductor processing installa...
- Patent number 6,375,403
- Issue date Apr 23, 2002
- Brooks Automation, GmbH
- Andreas Mages
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for sensing wafer-shaped objects and shelves in a...
- Patent number 6,211,514
- Issue date Apr 3, 2001
- Brooks Automation GmbH
- Klaus Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for controlling the drive of mechanisms operating separately...
- Patent number 6,205,881
- Issue date Mar 27, 2001
- Brooks Automation GmbH
- Lawrence R. Gravell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device for the transfer of an object between at least two locations
- Patent number 6,099,059
- Issue date Aug 8, 2000
- Brooks Automation GmbH
- Klaus Schultz
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Loading and unloading station for semiconductor processing installa...
- Patent number 6,071,059
- Issue date Jun 6, 2000
- Brooks Automation GmbH
- Andreas Mages
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CONTROLLING A PLC USING A PC PROGRAM
- Publication number 20230384753
- Publication date Nov 30, 2023
- Brooks Automation GmbH
- Fan LI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CONTROLLING A PLC USING A PC PROGRAM
- Publication number 20220107617
- Publication date Apr 7, 2022
- Brooks Automation GmbH
- Fan LI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RETICLE COMPARTMENT AND DIFFUSOR PLATE
- Publication number 20200357673
- Publication date Nov 12, 2020
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM
- Publication number 20200203201
- Publication date Jun 25, 2020
- Brooks Automation GmbH
- Alexander WENDEL
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CONTROLLING A PLC USING A PC PROGRAM
- Publication number 20200174438
- Publication date Jun 4, 2020
- Brooks Automation GmbH
- Fan LI
- G05 - CONTROLLING REGULATING
Information Patent Application
INSPECTION SYSTEM AND METHOD OF INSPECTION FOR SUBSTRATE CONTAINERS
- Publication number 20200158661
- Publication date May 21, 2020
- Brooks Automation GmbH
- Alexander WENDEL
- G01 - MEASURING TESTING
Information Patent Application
RETICLE COMPARTMENT AND DIFFUSOR PLATE
- Publication number 20190189483
- Publication date Jun 20, 2019
- Brooks Automation GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
- Publication number 20180330940
- Publication date Nov 15, 2018
- Brooks Automation GmbH
- Lutz Rebstock
- B08 - CLEANING

Brooks Automation GmbH

Organization

Patents Grantslast 30 patents

Reticle compartment and diffusor plate

Stackable substrate carriers

Redundantable robot assembly for workpiece transfer

Transfer mechanism with multiple wafer handling capability

Docking station for substrate transport containers

Device for controlling the drive of mechanisms operating separately...

Integrated material management module

Device and method for detecting and distinguishing shelf-forming su...

Loading and unloading station for semiconductor processing installa...

Device and method for sensing wafer-shaped objects and shelves in a...

Device for controlling the drive of mechanisms operating separately...

Device for the transfer of an object between at least two locations

Loading and unloading station for semiconductor processing installa...

Patents Applicationslast 30 patents

METHOD FOR CONTROLLING A PLC USING A PC PROGRAM

METHOD FOR CONTROLLING A PLC USING A PC PROGRAM

RETICLE COMPARTMENT AND DIFFUSOR PLATE

METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM

METHOD FOR CONTROLLING A PLC USING A PC PROGRAM

INSPECTION SYSTEM AND METHOD OF INSPECTION FOR SUBSTRATE CONTAINERS

RETICLE COMPARTMENT AND DIFFUSOR PLATE

SEMICONDUCTOR CLEANER SYSTEMS AND METHODS