Carl Zeiss Laser Optics GmbH

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Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Mirror with dielectric coating
- Patent number 9,297,936
- Issue date Mar 29, 2016
- Carl Zeiss Laser Optics GmbH
- Jeffrey Erxmeyer
- G02 - OPTICS
Information Patent Grant
Optical arrangement for converting an incident light beam, method f...
- Patent number 9,042,032
- Issue date May 26, 2015
- Carl Zeiss Laser Optics GmbH
- Holger Muenz
- G02 - OPTICS
Information Patent Grant
Illumination apparatus and method for controlling energy of a laser...
- Patent number 8,723,073
- Issue date May 13, 2014
- Cymer, LLC
- Bernhard Weigl
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Holding arrangement for an optical element
- Patent number 8,508,868
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Holding arrangement for an optical element
- Patent number 8,456,771
- Issue date Jun 4, 2013
- Carl Zeiss Laser Optics GmbH
- Ulrich Weber
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical system having heat dissipation arrangement
- Patent number 8,456,615
- Issue date Jun 4, 2013
- Carl Zeiss Laser Optics GmbH
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Optical arrangement, method of use, and method for determining a di...
- Patent number 8,441,729
- Issue date May 14, 2013
- Carl Zeiss Laser Optics GmbH
- Bernd Kleemann
- G02 - OPTICS
Information Patent Grant
Reflective optical element for use in an EUV system
- Patent number 8,342,701
- Issue date Jan 1, 2013
- Carl Zeiss Laser Optics GmbH
- Holger Kierey
- G02 - OPTICS
Information Patent Grant
Method for measuring a spectrum of a narrowband light source, and s...
- Patent number 8,289,520
- Issue date Oct 16, 2012
- Carl Zeiss Laser Optics GmbH
- Johannes Kraus
- G01 - MEASURING TESTING
Information Patent Grant
Optical delay module for lengthening the propagation path of a ligh...
- Patent number 8,141,785
- Issue date Mar 27, 2012
- Carl Zeiss Laser Optics GmbH
- Alois Herkommer
- G02 - OPTICS
Information Patent Grant
Optical system and method for shaping a profile of a laser beam
- Patent number 7,944,615
- Issue date May 17, 2011
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical illumination system for creating a line beam
- Patent number 7,864,429
- Issue date Jan 4, 2011
- Carl Zeiss Laser Optics GmbH
- Holger Muenz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical devices and related systems and methods
- Patent number 7,629,572
- Issue date Dec 8, 2009
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Grant
Optical illumination system for creating a line beam
- Patent number 7,538,948
- Issue date May 26, 2009
- Carl Zeiss Laser Optics GmbH
- Holger Muenz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical delay module for lenghtening the propagation path of a ligh...
- Patent number 7,486,707
- Issue date Feb 3, 2009
- Carl Zeiss Laser Optics GmbH
- Alois Herkommer
- G02 - OPTICS
Information Patent Grant
Optical imaging system for imaging at least two planes of a light b...
- Patent number 7,477,438
- Issue date Jan 13, 2009
- Carl Zeiss Laser Optics GmbH
- Alois Herkommer
- G01 - MEASURING TESTING
Information Patent Grant
Method and optical arrangement for beam guiding of a light beam wit...
- Patent number 7,321,468
- Issue date Jan 22, 2008
- Carl Zeiss Laser Optics GmbH
- Alois Herkommer
- G02 - OPTICS
Information Patent Grant
Optical grating and method for the manufacture of such an optical g...
- Patent number 7,187,499
- Issue date Mar 6, 2007
- Carl Zeiss Laser Optics GmbH
- Bernd Kleemann
- G02 - OPTICS
Information Patent Grant
Method for manufacturing a blazed grating, such a blazed grating an...
- Patent number 7,175,773
- Issue date Feb 13, 2007
- Carl Zeiss Laser Optics GmbH
- Klaus Heidemann
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Optical arrangement, optical grating and method for the manufacture...
- Patent number 7,092,161
- Issue date Aug 15, 2006
- Carl Zeiss Laser Optics GmbH
- Bernd Kleemann
- G02 - OPTICS
Information Patent Grant
Optical arrangement, Littrow grating for use in an optical arrangem...
- Patent number 6,762,881
- Issue date Jul 13, 2004
- Carl Zeiss Laser Optics GmbH
- Bernd Kleemann
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL IMAGING DEVICE AND IMAGING METHOD FOR MICROSCOPY
- Publication number 20150124075
- Publication date May 7, 2015
- Carl Zeiss SMT GMBH
- Alexander Epple
- G02 - OPTICS
Information Patent Application
METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT
- Publication number 20150092170
- Publication date Apr 2, 2015
- CARL ZEISS LASER OPTICS GmbH
- Oli Ehrler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
- Publication number 20150083938
- Publication date Mar 26, 2015
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN THE EUV WAVELEN...
- Publication number 20150009480
- Publication date Jan 8, 2015
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY
- Publication number 20130176614
- Publication date Jul 11, 2013
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS
Information Patent Application
MIRROR WITH DIELECTRIC COATING
- Publication number 20130083411
- Publication date Apr 4, 2013
- CARL ZEISS LASER OPTICS GmbH
- Jeffrey ERXMEYER
- G02 - OPTICS
Information Patent Application
HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
- Publication number 20120154935
- Publication date Jun 21, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
- Publication number 20120154895
- Publication date Jun 21, 2012
- CARL ZEISS LASER OPTICS GmbH
- Holger Muenz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
- Publication number 20120153189
- Publication date Jun 21, 2012
- CARL ZEISS LASER OPTICS GmbH
- Johannes Wangler
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
- Publication number 20120140341
- Publication date Jun 7, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BANDWIDTH NARROWING MODULE FOR SETTING A SPECTRAL BANDWIDTH OF A LA...
- Publication number 20120099612
- Publication date Apr 26, 2012
- CARL ZEISS LASER OPTICS GmbH
- Markus Deubel
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM
- Publication number 20110051267
- Publication date Mar 3, 2011
- CARL ZEISS LASER OPTICS GmbH
- Holger Kierey
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM HAVING AN OPTICAL ARRANGEMENT
- Publication number 20110025992
- Publication date Feb 3, 2011
- CARL ZEISS LASER OPTICS GmbH
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT, METHOD OF USE, AND METHOD FOR DETERMINING A DI...
- Publication number 20100328775
- Publication date Dec 30, 2010
- CARL ZEISS LASER OPTICS GmbH
- Bernd Kleemann
- G02 - OPTICS
Information Patent Application
METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND S...
- Publication number 20100079765
- Publication date Apr 1, 2010
- CARL ZEISS LASER OPTICS GmbH
- Johannes Kraus
- G01 - MEASURING TESTING
Information Patent Application
CONTINUOUS COATING INSTALLATION, METHODS FOR PRODUCING CRYSTALLINE...
- Publication number 20100024865
- Publication date Feb 4, 2010
- CARL ZEISS LASER OPTICS GmbH
- Arvind Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR SHAPING A PROFILE OF ALASER BEAM
- Publication number 20090244712
- Publication date Oct 1, 2009
- CARL ZEISS LASER OPTICS GmbH
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL ILLUMINATION SYSTEM FOR CREATING A LINE BEAM
- Publication number 20090231718
- Publication date Sep 17, 2009
- CARL ZEISS LASER OPTICS GmbH
- Holger Muenz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ILLUMINATION APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER...
- Publication number 20090201955
- Publication date Aug 13, 2009
- CARL ZEISS LASER OPTICS GmbH
- Bernhard Weigl
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR COATING AN OPTICAL COMPONENT FOR A LASER ARRANGEMENT AND...
- Publication number 20090027776
- Publication date Jan 29, 2009
- CARL ZEISS LASER OPTICS GmbH
- Michael Schall
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM
- Publication number 20080316748
- Publication date Dec 25, 2008
- CARL ZEISS LASER OPTICS GmbH
- Raphael Egger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Optical grating and method for the manufacture of such an optical g...
- Publication number 20060227425
- Publication date Oct 12, 2006
- CARL ZEISS LASER OPTICS GMBH
- Bernd Kleemann
- G02 - OPTICS
Information Patent Application
Optical arrangement, optical grating and method for the manufacture...
- Publication number 20050030627
- Publication date Feb 10, 2005
- CARL ZEISS LASER OPTICS GMBH
- Bernd Kleemann
- G02 - OPTICS
Information Patent Application
Apparatus for compressing the bandwidth of a light beam
- Publication number 20040091012
- Publication date May 13, 2004
- CARL ZEISS LASER OPTICS GMBH
- Alois Herkommer
- G02 - OPTICS

Carl Zeiss Laser Optics GmbH

Organization

Patents Grantslast 30 patents

Mirror with dielectric coating

Optical arrangement for converting an incident light beam, method f...

Illumination apparatus and method for controlling energy of a laser...

Holding arrangement for an optical element

Holding arrangement for an optical element

Optical system having heat dissipation arrangement

Optical arrangement, method of use, and method for determining a di...

Reflective optical element for use in an EUV system

Method for measuring a spectrum of a narrowband light source, and s...

Optical delay module for lengthening the propagation path of a ligh...

Optical system and method for shaping a profile of a laser beam

Optical illumination system for creating a line beam

Optical devices and related systems and methods

Optical illumination system for creating a line beam

Optical delay module for lenghtening the propagation path of a ligh...

Optical imaging system for imaging at least two planes of a light b...

Method and optical arrangement for beam guiding of a light beam wit...

Optical grating and method for the manufacture of such an optical g...

Method for manufacturing a blazed grating, such a blazed grating an...

Optical arrangement, optical grating and method for the manufacture...

Optical arrangement, Littrow grating for use in an optical arrangem...

Patents Applicationslast 30 patents

OPTICAL IMAGING DEVICE AND IMAGING METHOD FOR MICROSCOPY

METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT

COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE

REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN THE EUV WAVELEN...

EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY

MIRROR WITH DIELECTRIC COATING

HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT

OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE

OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE

HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT

BANDWIDTH NARROWING MODULE FOR SETTING A SPECTRAL BANDWIDTH OF A LA...

REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM

OPTICAL SYSTEM HAVING AN OPTICAL ARRANGEMENT

OPTICAL ARRANGEMENT, METHOD OF USE, AND METHOD FOR DETERMINING A DI...

METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND S...

CONTINUOUS COATING INSTALLATION, METHODS FOR PRODUCING CRYSTALLINE...

OPTICAL SYSTEM AND METHOD FOR SHAPING A PROFILE OF ALASER BEAM

OPTICAL ILLUMINATION SYSTEM FOR CREATING A LINE BEAM

ILLUMINATION APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER...

METHOD FOR COATING AN OPTICAL COMPONENT FOR A LASER ARRANGEMENT AND...

ILLUMINATION SYSTEM

Optical grating and method for the manufacture of such an optical g...

Optical arrangement, optical grating and method for the manufacture...

Apparatus for compressing the bandwidth of a light beam

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