CARL ZEISS SMS LTD

Organization

KARMIEL, IL

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining an effect of one or more pixel...
- Patent number 11,914,289
- Issue date Feb 27, 2024
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for removing a particle from a mask system
- Patent number 11,774,870
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for compensating defects of a mask blank
- Patent number 11,385,539
- Issue date Jul 12, 2022
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for determining positions of a plurality of pi...
- Patent number 11,366,383
- Issue date Jun 21, 2022
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for performing an aerial image simulation of a...
- Patent number 11,366,382
- Issue date Jun 21, 2022
- Carl Zeiss SMT GmbH
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system and method for correcting mask defects using the system
- Patent number 11,249,294
- Issue date Feb 15, 2022
- Carl Zeiss SMT GmbH
- Markus Seesselberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting the critical dimension uniformity of a photom...
- Patent number 10,578,975
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Thomas Thaler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for generating a predetermined three-dimension...
- Patent number 10,353,295
- Issue date Jul 16, 2019
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and apparatus for determining a critical dimension variation...
- Patent number 10,157,804
- Issue date Dec 18, 2018
- Carl Zeiss SMS Ltd.
- Rainer Pforr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for imparting direction-selective light attenu...
- Patent number 10,114,294
- Issue date Oct 30, 2018
- Carl Zeiss SMS Ltd
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for correcting errors on a wafer processed by...
- Patent number 10,061,192
- Issue date Aug 28, 2018
- Carl Zeiss SMT GmbH
- Dirk Beyer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for compensating at least one defect of an opt...
- Patent number 9,798,249
- Issue date Oct 24, 2017
- Carl Zeiss SMT GmbH
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for the determination of laser correcting tool...
- Patent number 9,753,366
- Issue date Sep 5, 2017
- Carl Zeiss SMS Ltd
- Vladimir Dmitriev
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Surface defect repair by irradiation
- Patent number 9,690,191
- Issue date Jun 27, 2017
- Carl Zeiss SMS Ltd
- Sergey Oshemkov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Correction of errors of a photolithographic mask using a joint opti...
- Patent number 9,658,527
- Issue date May 23, 2017
- Carl Zeiss SMS Ltd
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for locally deforming an optical element for p...
- Patent number 9,606,444
- Issue date Mar 28, 2017
- Carl Zeiss SMS Ltd
- Vladimir Dmitriev
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for correcting errors on a wafer processed by...
- Patent number 9,436,080
- Issue date Sep 6, 2016
- Carl Zeiss SMS GmbH
- Dirk Beyer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining the performance of a photolithographic mask
- Patent number 9,431,212
- Issue date Aug 30, 2016
- Carl Zeiss SMS GmbH
- Markus Waiblinger
- G01 - MEASURING TESTING
Information Patent Grant
Method for establishing distortion properties of an optical system...
- Patent number 9,366,637
- Issue date Jun 14, 2016
- Carl Zeiss SMS GmbH
- Mario Laengle
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring a lithography mask or a mask blank
- Patent number 9,354,048
- Issue date May 31, 2016
- Carl Zeiss SMS GmbH
- Carola Blaesing-Bangert
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining the registration of a structure on a photoma...
- Patent number 9,303,975
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Michael Arnz
- G01 - MEASURING TESTING
Information Patent Grant
Grating-assisted autofocus device and autofocusing method for an im...
- Patent number 9,297,994
- Issue date Mar 29, 2016
- Carl Zeiss SMS GmbH
- Sascha Perlitz
- G02 - OPTICS
Information Patent Grant
Microscope and method for characterizing structures on an object
- Patent number 9,268,124
- Issue date Feb 23, 2016
- Carl Zeiss SMS GmbH
- Holger Seitz
- G02 - OPTICS
Information Patent Grant
Method for analyzing a photomask
- Patent number 9,261,775
- Issue date Feb 16, 2016
- Carl Zeiss SMS GmbH
- Anthony Garetto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature sensor and method for measuring a temperature change
- Patent number 9,255,876
- Issue date Feb 9, 2016
- Carl Zeiss SMS GmbH
- Dietmar Schnier
- G01 - MEASURING TESTING
Information Patent Grant
Method for characterizing a structure on a mask and device for carr...
- Patent number 9,213,003
- Issue date Dec 15, 2015
- Carl Zeiss SMS GmbH
- Sascha Perlitz
- G01 - MEASURING TESTING
Information Patent Grant
Analyses of measurement data
- Patent number 9,207,530
- Issue date Dec 8, 2015
- Carl Zeiss SMS Ltd
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for simulating an aerial image
- Patent number 9,207,544
- Issue date Dec 8, 2015
- Carl Zeiss SMS GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension uniformity correction by scanner signature control
- Patent number 9,134,112
- Issue date Sep 15, 2015
- Carl Zeiss SMS Ltd
- Ofir Sharoni
- G01 - MEASURING TESTING
Information Patent Grant
Microscope and microscopy method for space-resolved measurement of...
- Patent number 9,134,626
- Issue date Sep 15, 2015
- Carl Zeiss SMS GmbH
- Hans-Juergen Mann
- G02 - OPTICS

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CORRECTING ERRORS IN PHOTOLITHOGRAPHIC MASKS WHILE AVOID...
- Publication number 20240280892
- Publication date Aug 22, 2024
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZING A DEFECT CORRECTION FOR AN OPTI...
- Publication number 20230408911
- Publication date Dec 21, 2023
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM
- Publication number 20230053667
- Publication date Feb 23, 2023
- Carl Zeiss SMT GMBH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A...
- Publication number 20210263406
- Publication date Aug 26, 2021
- Carl Zeiss SMT GMBH
- Vladimir Dmitriev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING AN EFFECT OF ONE OR MORE PIXEL...
- Publication number 20210124259
- Publication date Apr 29, 2021
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR COMPENSATING DEFECTS OF A MASK BLANK
- Publication number 20200159111
- Publication date May 21, 2020
- Carl Zeiss SMS Ltd.
- Joachim Welte
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING POSITIONS OF A PLURALITY OF PI...
- Publication number 20200124959
- Publication date Apr 23, 2020
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR CORRECTING MASK DEFECTS USING THE SYSTEM
- Publication number 20190170991
- Publication date Jun 6, 2019
- Carl Zeiss SMT GMBH
- Markus Seesselberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Correcting the Critical Dimension Uniformity of a Photom...
- Publication number 20190107783
- Publication date Apr 11, 2019
- Carl Zeiss SMT GMBH
- Thomas Thaler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR IMPARTING DIRECTION-SELECTIVE LIGHT ATTENU...
- Publication number 20170176866
- Publication date Jun 22, 2017
- CARL ZEISS SMS LTD.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR GENERATING A PREDETERMINED THREE-DIMENSION...
- Publication number 20170010540
- Publication date Jan 12, 2017
- CARL ZEISS SMS LTD.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY...
- Publication number 20160342080
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Dirk Beyer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE DEFECT REPAIR BY IRRADIATION
- Publication number 20160004151
- Publication date Jan 7, 2016
- CARL ZEISS SMS LTD.
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING PARTICLE MICROSCOPE AND METHOD FOR DETERMINING A POSITION...
- Publication number 20150380210
- Publication date Dec 31, 2015
- CARL ZEISS SMS GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING A LITHOGRAPHY MASK OR A MASK BLANK
- Publication number 20150330777
- Publication date Nov 19, 2015
- CARL ZEISS SMS GMBH
- Carola Blaesing-Bangert
- G01 - MEASURING TESTING
Information Patent Application
Method and device for examining a mask
- Publication number 20150198541
- Publication date Jul 16, 2015
- CARL ZEISS SMS GMBH
- Thomas Trautzsch
- G01 - MEASURING TESTING
Information Patent Application
EMULATION OF REPRODUCTION OF MASKS CORRECTED BY LOCAL DENSITY VARIA...
- Publication number 20150198798
- Publication date Jul 16, 2015
- CARL ZEISS SMS GMBH
- Holger Seitz
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC...
- Publication number 20150169997
- Publication date Jun 18, 2015
- CARL ZEISS SMS GMBH
- Dieter Weber
- G02 - OPTICS
Information Patent Application
METHOD FOR CALIBRATING A POSITION-MEASURING SYSTEM AND POSITION-MEA...
- Publication number 20150013427
- Publication date Jan 15, 2015
- CARL ZEISS SMS GMBH
- Carola Blaesing-Bangert
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A CRITICAL DIMENSION VARIATION...
- Publication number 20140236516
- Publication date Aug 21, 2014
- CARL ZEISS SMS LTD.
- Rainer Pforr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY...
- Publication number 20140036243
- Publication date Feb 6, 2014
- CARL ZEISS SMS LTD.
- Dirk Beyer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARR...
- Publication number 20130308125
- Publication date Nov 21, 2013
- CARL ZEISS SMS GMBH
- Sascha Perlitz
- G01 - MEASURING TESTING
Information Patent Application
IRRADIATION MODULE FOR A MEASURING APPARATUS
- Publication number 20130293962
- Publication date Nov 7, 2013
- CARL ZEISS SMS GMBH
- Dietmar Schnier
- G02 - OPTICS
Information Patent Application
Global Landmark Method For Critical Dimension Uniformity Reconstruc...
- Publication number 20130263061
- Publication date Oct 3, 2013
- CARL ZEISS SMS LTD.
- Vladimir Dmitriev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK
- Publication number 20130126728
- Publication date May 23, 2013
- CARL ZEISS SMS GMBH
- Markus Waiblinger
- G01 - MEASURING TESTING
Information Patent Application
Autofocus Device and Autofocussing Method For An Imaging Device
- Publication number 20130062501
- Publication date Mar 14, 2013
- CARL ZEISS SMT GMBH
- Sascha Perlitz
- G02 - OPTICS
Information Patent Application
METHOD AND CALIBRATION MASK FOR CALIBRATING A POSITION MEASURING AP...
- Publication number 20120160007
- Publication date Jun 28, 2012
- CARL ZEISS SMS GMBH
- Norbert Kerwien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING
- Publication number 20120162755
- Publication date Jun 28, 2012
- CARL ZEISS SMS GMBH
- Ulrich Stroessner
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY...
- Publication number 20120154773
- Publication date Jun 21, 2012
- Carl Zeiss SMS GmbH
- Dirk Beyer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION OF THE RELATIVE POSITION OF TWO STRUCTURES
- Publication number 20120121205
- Publication date May 17, 2012
- CARL ZEISS SMS GMBH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

CARL ZEISS SMS LTD

Organization

Patents Grantslast 30 patents

Method and apparatus for determining an effect of one or more pixel...

Method for removing a particle from a mask system

Method and apparatus for compensating defects of a mask blank

Method and apparatus for determining positions of a plurality of pi...

Method and apparatus for performing an aerial image simulation of a...

Optical system and method for correcting mask defects using the system

Method for correcting the critical dimension uniformity of a photom...

Method and apparatus for generating a predetermined three-dimension...

Method and apparatus for determining a critical dimension variation...

Apparatus and method for imparting direction-selective light attenu...

Method and apparatus for correcting errors on a wafer processed by...

Method and apparatus for compensating at least one defect of an opt...

Method and apparatus for the determination of laser correcting tool...

Surface defect repair by irradiation

Correction of errors of a photolithographic mask using a joint opti...

Method and apparatus for locally deforming an optical element for p...

Method and apparatus for correcting errors on a wafer processed by...

Method for determining the performance of a photolithographic mask

Method for establishing distortion properties of an optical system...

Method for measuring a lithography mask or a mask blank

Method for determining the registration of a structure on a photoma...

Grating-assisted autofocus device and autofocusing method for an im...

Microscope and method for characterizing structures on an object

Method for analyzing a photomask

Temperature sensor and method for measuring a temperature change

Method for characterizing a structure on a mask and device for carr...

Analyses of measurement data

Method for simulating an aerial image

Critical dimension uniformity correction by scanner signature control

Microscope and microscopy method for space-resolved measurement of...

Patents Applicationslast 30 patents

METHOD FOR CORRECTING ERRORS IN PHOTOLITHOGRAPHIC MASKS WHILE AVOID...

METHOD AND APPARATUS FOR OPTIMIZING A DEFECT CORRECTION FOR AN OPTI...

METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM

METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A...

METHOD AND APPARATUS FOR DETERMINING AN EFFECT OF ONE OR MORE PIXEL...

METHOD AND APPARATUS FOR COMPENSATING DEFECTS OF A MASK BLANK

METHOD AND APPARATUS FOR DETERMINING POSITIONS OF A PLURALITY OF PI...

OPTICAL SYSTEM AND METHOD FOR CORRECTING MASK DEFECTS USING THE SYSTEM

Method for Correcting the Critical Dimension Uniformity of a Photom...

APPARATUS AND METHOD FOR IMPARTING DIRECTION-SELECTIVE LIGHT ATTENU...

METHOD AND APPARATUS FOR GENERATING A PREDETERMINED THREE-DIMENSION...

METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY...

SURFACE DEFECT REPAIR BY IRRADIATION

SCANNING PARTICLE MICROSCOPE AND METHOD FOR DETERMINING A POSITION...

METHOD FOR MEASURING A LITHOGRAPHY MASK OR A MASK BLANK

Method and device for examining a mask

EMULATION OF REPRODUCTION OF MASKS CORRECTED BY LOCAL DENSITY VARIA...

APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC...

METHOD FOR CALIBRATING A POSITION-MEASURING SYSTEM AND POSITION-MEA...

METHOD AND APPARATUS FOR DETERMINING A CRITICAL DIMENSION VARIATION...

METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY...

METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARR...

IRRADIATION MODULE FOR A MEASURING APPARATUS

Global Landmark Method For Critical Dimension Uniformity Reconstruc...

METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK

Autofocus Device and Autofocussing Method For An Imaging Device

METHOD AND CALIBRATION MASK FOR CALIBRATING A POSITION MEASURING AP...

MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING

METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY...

DETERMINATION OF THE RELATIVE POSITION OF TWO STRUCTURES