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Patents Grants
last 30 patents
Information
Patent Grant
Real-time microseismic magnitude calculation method and device base...
Patent number
11,789,173
Issue date
Oct 17, 2023
Chinese Academy of Sciences, Institute of Geology and Geophysics
Shaojiang Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pressure gauge chip and manufacturing process thereof
Patent number
11,255,740
Issue date
Feb 22, 2022
Chinese Academy of Sciences Institute of Geology and Geophysics
Kevin Chau
E21 - EARTH DRILLING MINING
Information
Patent Grant
Method of making a dual-cavity pressure sensor die
Patent number
11,226,251
Issue date
Jan 18, 2022
Chinese Academy of Sciences Institute of Geology and Geophysics
Yiming Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tri-axial MEMS accelerometer
Patent number
10,900,995
Issue date
Jan 26, 2021
Chinese Academy of Sciences Institute of Geology and Geophysics
Chen Sun
G01 - MEASURING TESTING
Information
Patent Grant
Dual-cavity pressure sensor die and the method of making same
Patent number
10,809,141
Issue date
Oct 20, 2020
Chinese Academy of Sciences Institute of Geology and Geophysics
Yiming Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS strain gauge sensor and manufacturing method
Patent number
10,775,248
Issue date
Sep 15, 2020
Chinese Academy of Sciences Institute of Geology and Geophysics
Man Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure gauge sensor and manufacturing method
Patent number
10,768,064
Issue date
Sep 8, 2020
Chinese Academy of Sciences Institute of Geology and Geophysics
Kevin Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
Patent number
10,647,570
Issue date
May 12, 2020
Chinese Academy of Sciences Institute of Geology and Geophysics
Lianzhong Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
Patent number
10,392,247
Issue date
Aug 27, 2019
Chinese Academy of Sciences Institute of Geology and Geophysics
Lianzhong Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tri-axial MEMS accelerometer
Patent number
9,829,504
Issue date
Nov 28, 2017
Chinese Academy of Sciences Institute of Geology and Geophysics
Chen Sun
G01 - MEASURING TESTING
Information
Patent Grant
Accelerometer and its fabrication technique
Patent number
9,828,242
Issue date
Nov 28, 2017
Chinese Academy of Sciences Institute of Geology and Geophysics
Du Li Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS anti-phase vibratory gyroscope
Patent number
9,618,342
Issue date
Apr 11, 2017
Chinese Academy of Sciences Institute of Geology and Geophysics
Lian Zhong Yu
G01 - MEASURING TESTING
Information
Patent Grant
Accelerometer and its fabrication technique
Patent number
9,476,903
Issue date
Oct 25, 2016
Chinese Academy of Sciences Institute of Geology and Geophysics
Du Li Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Accelerometer and its fabrication technique
Patent number
9,170,271
Issue date
Oct 27, 2015
Chinese Academy of Sciences Institute of Geology and Geophysics
Du Li Yu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method of Making a Dual-Cavity Pressure Sensor Die
Publication number
20210003468
Publication date
Jan 7, 2021
Chinese Academy of Sciences Institute of Geology and Geophysics
Yiming ZHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
Publication number
20190382264
Publication date
Dec 19, 2019
Chinese Academy of Sciences Institute of Geology and Geophysics
Lianzhong YU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE GAUGE CHIP AND MANUFACTURING PROCESS THEREOF
Publication number
20190113411
Publication date
Apr 18, 2019
Chinese Academy of Sciences Institute of Geology and Geophysics
Man WONG
G01 - MEASURING TESTING
Information
Patent Application
TRI-AXIAL MEMS ACCELEROMETER
Publication number
20180045753
Publication date
Feb 15, 2018
Chinese Academy of Sciences Institute of Geology and Geophysics
Chen Sun
G01 - MEASURING TESTING
Information
Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
Publication number
20170336437
Publication date
Nov 23, 2017
Chinese Academy of Sciences Institute of Geology and Geophysics
Lianzhong YU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACCELEROMETER AND ITS FABRICATION TECHNIQUE
Publication number
20170008761
Publication date
Jan 12, 2017
Chinese Academy of Sciences Institute of Geology and Geophysics
Du Li YU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ANTI-PHASE VIBRATORY GYROSCOPE
Publication number
20160238390
Publication date
Aug 18, 2016
Chinese Academy of Sciences Institute of Geology and Geophysics
Lian Zhong Yu
G01 - MEASURING TESTING
Information
Patent Application
SYMMETRICAL MEMS ACCELEROMETER AND ITS FABRICATION PROCESS
Publication number
20160018436
Publication date
Jan 21, 2016
Chinese Academy of Sciences Institute of Geology and Geophysics
Lianzhong YU
G01 - MEASURING TESTING
Information
Patent Application
TRI-AXIAL MEMS ACCELEROMETER
Publication number
20140338452
Publication date
Nov 20, 2014
Chinese Academy of Sciences Institute of Geology and Geophysics
Chen Sun
G01 - MEASURING TESTING
Information
Patent Application
ACCELEROMETER AND ITS FABRICATION TECHNIQUE
Publication number
20140097508
Publication date
Apr 10, 2014
Chinese Academy of Sciences Institute of Geology and Geophysics
Du Li YU
G01 - MEASURING TESTING
Information
Patent Application
ACCELEROMETER AND ITS FABRICATION TECHNIQUE
Publication number
20140069191
Publication date
Mar 13, 2014
Chinese Academy of Sciences Institute of Geology and Geophysics
Du Li YU
B81 - MICRO-STRUCTURAL TECHNOLOGY
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