Chinese Academy of Sciences Institute of Geology and Geophysics

Organization

  • Beijing, CN

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Method of Making a Dual-Cavity Pressure Sensor Die

    • Publication number 20210003468
    • Publication date Jan 7, 2021
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Yiming ZHANG
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER

    • Publication number 20190382264
    • Publication date Dec 19, 2019
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Lianzhong YU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    PRESSURE GAUGE CHIP AND MANUFACTURING PROCESS THEREOF

    • Publication number 20190113411
    • Publication date Apr 18, 2019
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Man WONG
    • G01 - MEASURING TESTING
  • Information Patent Application

    TRI-AXIAL MEMS ACCELEROMETER

    • Publication number 20180045753
    • Publication date Feb 15, 2018
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Chen Sun
    • G01 - MEASURING TESTING
  • Information Patent Application

    FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER

    • Publication number 20170336437
    • Publication date Nov 23, 2017
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Lianzhong YU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    ACCELEROMETER AND ITS FABRICATION TECHNIQUE

    • Publication number 20170008761
    • Publication date Jan 12, 2017
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Du Li YU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    MEMS ANTI-PHASE VIBRATORY GYROSCOPE

    • Publication number 20160238390
    • Publication date Aug 18, 2016
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Lian Zhong Yu
    • G01 - MEASURING TESTING
  • Information Patent Application

    SYMMETRICAL MEMS ACCELEROMETER AND ITS FABRICATION PROCESS

    • Publication number 20160018436
    • Publication date Jan 21, 2016
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Lianzhong YU
    • G01 - MEASURING TESTING
  • Information Patent Application

    TRI-AXIAL MEMS ACCELEROMETER

    • Publication number 20140338452
    • Publication date Nov 20, 2014
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Chen Sun
    • G01 - MEASURING TESTING
  • Information Patent Application

    ACCELEROMETER AND ITS FABRICATION TECHNIQUE

    • Publication number 20140097508
    • Publication date Apr 10, 2014
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Du Li YU
    • G01 - MEASURING TESTING
  • Information Patent Application

    ACCELEROMETER AND ITS FABRICATION TECHNIQUE

    • Publication number 20140069191
    • Publication date Mar 13, 2014
    • Chinese Academy of Sciences Institute of Geology and Geophysics
    • Du Li YU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY

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