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Allentown, PA, US
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Patents Grants
last 30 patents
Patents Applications
last 30 patents
Information
Patent Application
Slurry Slip Stream Controller For CMP System
Publication number
20170355059
Publication date
Dec 14, 2017
Confluense LLC
Stephen J. Benner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Active Tribology Management of CMP Polishing Material
Publication number
20110177623
Publication date
Jul 21, 2011
CONFLUENSE LLC
Stephen J. Benner
B24 - GRINDING POLISHING
Information
Patent Application
In-line effluent analysis method and apparatus for CMP process control
Publication number
20090287340
Publication date
Nov 19, 2009
Confluense LLC
Stephen J. Benner
G05 - CONTROLLING REGULATING
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