Cymer, Inc.

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Radiation source testing
- Patent number 12,169,363
- Issue date Dec 17, 2024
- Cymer, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Series of stacked confocal pulse stretchers for speckle reduction
- Patent number 12,166,327
- Issue date Dec 10, 2024
- Cymer, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system for controlling bursts of pulses of radiation
- Patent number 12,130,558
- Issue date Oct 29, 2024
- Cymer, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature control apparatus
- Patent number 12,124,053
- Issue date Oct 22, 2024
- Cymer, LLC
- Eric Anders Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing fretting corrosion in a gas discharge chamber support device
- Patent number 12,125,695
- Issue date Oct 22, 2024
- Cymer, LLC
- Thomas Dickson Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Burst statistics data aggregation filter
- Patent number 12,007,696
- Issue date Jun 11, 2024
- Cymer, LLC
- Matthew Minakais
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming multiple aerial images in a single lithography exposure pass
- Patent number 12,001,144
- Issue date Jun 4, 2024
- Cymer, LLC
- Willard Earl Conley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas monitoring system
- Patent number 11,988,966
- Issue date May 21, 2024
- Cymer, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrodes for laser chambers having extended lifetime
- Patent number 11,987,871
- Issue date May 21, 2024
- Cymer, LLC
- Leyla Ramin
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Gas management system
- Patent number 11,949,202
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas management system
- Patent number 11,949,203
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy correction module for an optical source apparatus
- Patent number 11,947,268
- Issue date Apr 2, 2024
- Cymer, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination of measurement error in an etalon
- Patent number 11,860,036
- Issue date Jan 2, 2024
- Cymer, LLC
- Russell Allen Burdt
- G01 - MEASURING TESTING
Information Patent Grant
Method of compensating wavelength error induced by repetition rate...
- Patent number 11,803,126
- Issue date Oct 31, 2023
- Cymer, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of optical component alignment
- Patent number 11,799,261
- Issue date Oct 24, 2023
- Cymer, LLC
- Hong Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical element for a deep ultraviolet light source
- Patent number 11,784,452
- Issue date Oct 10, 2023
- Cymer, LLC
- Saptaparna Das
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for extending electrode life in a laser cha...
- Patent number 11,777,271
- Issue date Oct 3, 2023
- Cymer, LLC
- Thomas Patrick Duffey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
- Patent number 11,768,438
- Issue date Sep 26, 2023
- Cymer, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography system bandwidth control
- Patent number 11,769,982
- Issue date Sep 26, 2023
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine detection in a gas discharge light source
- Patent number 11,754,541
- Issue date Sep 12, 2023
- Cymer, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,749,520
- Issue date Sep 5, 2023
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for imaging using narrowed bandwidth
- Patent number 11,747,739
- Issue date Sep 5, 2023
- ASML Netherlands
- Willard Earl Conley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reducing speckle in an excimer light source
- Patent number 11,686,951
- Issue date Jun 27, 2023
- Cymer, LLC
- Wilhelmus Patrick Elisabeth Maria op 't Root
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nonwoven screens for dust trapping in laser discharge chambers
- Patent number 11,614,012
- Issue date Mar 28, 2023
- Cymer, LLC
- Ulrich Niemann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Spectral feature control apparatus
- Patent number 11,561,407
- Issue date Jan 24, 2023
- Cymer, LLC
- Eric Anders Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming multiple aerial images in a single lithography exposure pass
- Patent number 11,526,082
- Issue date Dec 13, 2022
- Cymer, LLC
- Willard Earl Conley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
- Patent number 11,526,083
- Issue date Dec 13, 2022
- Cymer, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for tuning discharge performance in a laser chamber
- Patent number 11,349,273
- Issue date May 31, 2022
- Cymer, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,127,582
- Issue date Sep 21, 2021
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser light energy and dose control using repetition rate based gai...
- Patent number 11,081,852
- Issue date Aug 3, 2021
- Cymer, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPECTRAL FEATURE CONTROL APPARATUS
- Publication number 20250013066
- Publication date Jan 9, 2025
- CYMER, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PREDICTION APPARATUS AND METHOD FOR OPTICAL SOURCE
- Publication number 20240319612
- Publication date Sep 26, 2024
- CYMER, LLC
- Russell Allen BURDT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS
- Publication number 20240310736
- Publication date Sep 19, 2024
- CYMER, LLC
- Willard Earl Conley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE
- Publication number 20240291226
- Publication date Aug 29, 2024
- CYMER, LLC
- Siyu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
- Publication number 20240283210
- Publication date Aug 22, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR ACTIVELY CONTROLLING A CAVITY LENGTH OF AN OPTICAL ASSEMBLY
- Publication number 20240258756
- Publication date Aug 1, 2024
- CYMER, LLC
- Saptaparna Das
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...
- Publication number 20240222927
- Publication date Jul 4, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...
- Publication number 20240152063
- Publication date May 9, 2024
- CYMER, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTIMIZATION OF LITHOGRAPHIC PROCESS BASED ON BANDWIDTH AND SPECKLE
- Publication number 20240045341
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Willard Earl CONLEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PULSED POWER CIRCUITS USING HYBRID NON-LINEAR MAGNETIC MATERIALS AN...
- Publication number 20240039234
- Publication date Feb 1, 2024
- CYMER, LLC
- Yuda Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER
- Publication number 20240039228
- Publication date Feb 1, 2024
- CYMER, LLC
- Mohammad Taghi Mohebbi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...
- Publication number 20240036475
- Publication date Feb 1, 2024
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC SWITCH WITH IMPEDANCE CONTROL FOR AN OPTICAL SYSTEM
- Publication number 20240030673
- Publication date Jan 25, 2024
- CYMER, LLC
- Changqi You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT
- Publication number 20240030671
- Publication date Jan 25, 2024
- CYMER, LLC
- Hong Ye
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT
- Publication number 20240014621
- Publication date Jan 11, 2024
- CYMER, LLC
- Hong Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF MODULATING A WAVELENGTH OF AN EXCIMER L...
- Publication number 20240006838
- Publication date Jan 4, 2024
- CYMER, LLC
- James Michael Simonelli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL COMPONENT FOR DEEP ULTRAVIOLET LIGHT SOURCE
- Publication number 20230375934
- Publication date Nov 23, 2023
- CYMER, LLC
- John Theodore Melchior
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROMAGNETIC SHIELD FOR A SEALING MECHANISM OF A LASER CHAMBER
- Publication number 20230320047
- Publication date Oct 5, 2023
- CYMER, LLC
- Mohammad Amin Khamehchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREDICTIVE CALIBRATION SCHEDULING APPARATUS AND METHOD
- Publication number 20230266168
- Publication date Aug 24, 2023
- CYMER, LLC
- Mohammad Taghi Mohebbi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT
- Publication number 20230231352
- Publication date Jul 20, 2023
- CYMER, LLC
- Hong Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH
- Publication number 20230223734
- Publication date Jul 13, 2023
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...
- Publication number 20230163551
- Publication date May 25, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS
- Publication number 20230152707
- Publication date May 18, 2023
- CYMER, LLC
- Willard Earl Conley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION OF MEASUREMENT ERROR IN AN ETALON
- Publication number 20230142333
- Publication date May 11, 2023
- CYMER, LLC
- Russell Allen Burdt
- G01 - MEASURING TESTING
Information Patent Application
SPECTRAL FEATURE CONTROL APPARATUS
- Publication number 20230124587
- Publication date Apr 20, 2023
- CYMER, LLC
- Eric Anders Mason
- G02 - OPTICS
Information Patent Application
REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE
- Publication number 20230087803
- Publication date Mar 23, 2023
- CYMER, LLC
- Thomas Dickson Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREDICTIVE CONTROL OF A PULSED LIGHT BEAM
- Publication number 20230055090
- Publication date Feb 23, 2023
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...
- Publication number 20230040812
- Publication date Feb 9, 2023
- CYMER, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER
- Publication number 20230016894
- Publication date Jan 19, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...
- Publication number 20230017337
- Publication date Jan 19, 2023
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
87158424 - SMARTLITHO
- Serial number 87158424
- Filing date Sep 1, 2016
- Cymer, LLC
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86319882 - DYNAPULSE
- Serial number 86319882
- Registration number 4847076
- Filing date Jun 25, 2014
- Cymer, LLC
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86319872 - DYNAPULSE
- Serial number 86319872
- Registration number 5023057
- Filing date Jun 25, 2014
- Cymer, LLC
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85939675 - GLX
- Serial number 85939675
- Filing date May 22, 2013
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85770535 - BEVERAGE FACTORY
- Serial number 85770535
- Registration number 4360933
- Filing date Nov 2, 2012
- Cydea, Inc.
- 35 - Advertising
Information Trademark
85572444 - CYMER DIGITAL STUDIO
- Serial number 85572444
- Filing date Mar 17, 2012
- Cymer, Inc.
- 41 - Education
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85572442 - CYMER DIGITAL STUDIO
- Serial number 85572442
- Filing date Mar 17, 2012
- Cymer, Inc.
- 25 - Clothing, footwear, headgear
Information Trademark
85572441 - CYMER DIGITAL STUDIO
- Serial number 85572441
- Filing date Mar 17, 2012
- Cymer, Inc.
- 16 - Paper, cardboard and goods made from these materials, not included in other classes
Information Trademark
85434115 - SMARTPULSE
- Serial number 85434115
- Registration number 4764811
- Filing date Sep 28, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85434105 - ONPULSE PLUS
- Serial number 85434105
- Registration number 4777421
- Filing date Sep 28, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85434128 - TCZ
- Serial number 85434128
- Filing date Sep 28, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85294378
- Serial number 85294378
- Filing date Apr 13, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85262076 - IGLX
- Serial number 85262076
- Filing date Mar 9, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85262360 - XLR
- Serial number 85262360
- Registration number 4335366
- Filing date Mar 9, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85262350 - POWER OPTICS
- Serial number 85262350
- Filing date Mar 9, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85262369 - CYMER
- Serial number 85262369
- Registration number 4104449
- Filing date Mar 9, 2011
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77378958 - GLX
- Serial number 77378958
- Filing date Jan 23, 2008
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77378779 - GLX
- Serial number 77378779
- Filing date Jan 23, 2008
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77222548 - ONPULSE
- Serial number 77222548
- Registration number 3375850
- Filing date Jul 5, 2007
- Cymer, Inc.
- 37 - Building construction
Information Trademark
77222558 - ONPULSE
- Serial number 77222558
- Registration number 3375851
- Filing date Jul 5, 2007
- Cymer, Inc.
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
76215615 - MILAS
- Serial number 76215615
- Filing date Feb 21, 2001
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76200589 - CYMERONLINE
- Serial number 76200589
- Registration number 2645278
- Filing date Jan 26, 2001
- Cymer, Inc.
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
76179957 - CYSPEC
- Serial number 76179957
- Filing date Dec 12, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76162612 - MICROINJECT
- Serial number 76162612
- Filing date Nov 9, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76145401 - VERRO
- Serial number 76145401
- Registration number 2759465
- Filing date Oct 11, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76145916 - MICROINJECT
- Serial number 76145916
- Registration number 2735217
- Filing date Oct 11, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76145400 - VERRO
- Serial number 76145400
- Filing date Oct 11, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76144610 - NANOLITH 7000
- Serial number 76144610
- Registration number 2618795
- Filing date Oct 10, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76125331 - NANOLITH
- Serial number 76125331
- Registration number 2613322
- Filing date Sep 11, 2000
- Cymer, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76100022 - CYMERNET
- Serial number 76100022
- Filing date Jul 28, 2000
- Cymer, Inc.
- 42 - Scientific and technological services and research and design relating thereto

Cymer, Inc.

Organization

Patents Grantslast 30 patents

Radiation source testing

Series of stacked confocal pulse stretchers for speckle reduction

Radiation system for controlling bursts of pulses of radiation

Spectral feature control apparatus

Reducing fretting corrosion in a gas discharge chamber support device

Burst statistics data aggregation filter

Forming multiple aerial images in a single lithography exposure pass

Gas monitoring system

Electrodes for laser chambers having extended lifetime

Gas management system

Gas management system

Energy correction module for an optical source apparatus

Determination of measurement error in an etalon

Method of compensating wavelength error induced by repetition rate...

Apparatus for and method of optical component alignment

Optical element for a deep ultraviolet light source

Method of and apparatus for extending electrode life in a laser cha...

Spectral feature selection and pulse timing control of a pulsed lig...

Lithography system bandwidth control

Fluorine detection in a gas discharge light source

Electrode for a discharge chamber

Method and apparatus for imaging using narrowed bandwidth

Reducing speckle in an excimer light source

Nonwoven screens for dust trapping in laser discharge chambers

Spectral feature control apparatus

Forming multiple aerial images in a single lithography exposure pass

Spectral feature selection and pulse timing control of a pulsed lig...

Apparatus for tuning discharge performance in a laser chamber

Electrode for a discharge chamber

Laser light energy and dose control using repetition rate based gai...

Patents Applicationslast 30 patents

SPECTRAL FEATURE CONTROL APPARATUS

PREDICTION APPARATUS AND METHOD FOR OPTICAL SOURCE

FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS

GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE

PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET

SYSTEM FOR ACTIVELY CONTROLLING A CAVITY LENGTH OF AN OPTICAL ASSEMBLY

ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...

MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...

OPTIMIZATION OF LITHOGRAPHIC PROCESS BASED ON BANDWIDTH AND SPECKLE

PULSED POWER CIRCUITS USING HYBRID NON-LINEAR MAGNETIC MATERIALS AN...

REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER

METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...

MAGNETIC SWITCH WITH IMPEDANCE CONTROL FOR AN OPTICAL SYSTEM

APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT

APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT

APPARATUS FOR AND METHOD OF MODULATING A WAVELENGTH OF AN EXCIMER L...

OPTICAL COMPONENT FOR DEEP ULTRAVIOLET LIGHT SOURCE

ELECTROMAGNETIC SHIELD FOR A SEALING MECHANISM OF A LASER CHAMBER

PREDICTIVE CALIBRATION SCHEDULING APPARATUS AND METHOD

APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT

SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH

CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...

FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS

DETERMINATION OF MEASUREMENT ERROR IN AN ETALON

SPECTRAL FEATURE CONTROL APPARATUS

REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE

PREDICTIVE CONTROL OF A PULSED LIGHT BEAM

SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...

UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER

DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...

Trademarklast 30 trademarks

87158424 - SMARTLITHO

86319882 - DYNAPULSE

86319872 - DYNAPULSE

85939675 - GLX

85770535 - BEVERAGE FACTORY

85572444 - CYMER DIGITAL STUDIO

85572442 - CYMER DIGITAL STUDIO

85572441 - CYMER DIGITAL STUDIO

85434115 - SMARTPULSE

85434105 - ONPULSE PLUS

85434128 - TCZ

85294378

85262076 - IGLX

85262360 - XLR

85262350 - POWER OPTICS