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Villeneuve d'Ascq, FR
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Patent Application
MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE
Publication number
20160181041
Publication date
Jun 23, 2016
DELFMEMS SAS
Anne-Sophie Rollier
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS STRUCTURE WITH MULTILAYER MEMBRANE
Publication number
20160181040
Publication date
Jun 23, 2016
DELFMEMS SAS
Renaud Robin
B81 - MICRO-STRUCTURAL TECHNOLOGY
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