Echo Giken Co., Ltd.

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Technique on ozone water for use in cleaning semiconductor substrate
- Patent number 7,678,200
- Issue date Mar 16, 2010
- Sumitomo Mitsubishi Silicon Corporation
- Makoto Takemura
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
Technique on ozone water for use in cleaning semiconductor substrate
- Publication number 20060154837
- Publication date Jul 13, 2006
- Echo Giken Co., Ltd.
- Makoto Takemura
- B08 - CLEANING

Trademarklast 30 trademarks