TREA

ELECTRONIC INDUSTRIES ASSOCIATION OF JAPAN

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  • TOKYO, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching gas
    • Patent number 6,514,425
    • Issue date Feb 4, 2003
    • Agency of Industrial Science & Technology
    • Akira Sekiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 6,383,403
    • Issue date May 7, 2002
    • Japan as represented by the Director General of the Agency of Industrial Scie...
    • Akira Sekiya
    • H01 - BASIC ELECTRIC ELEMENTS

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