Elith LLC

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New Providence, NJ, US

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Patents Grantslast 30 patents

Information Patent Grant
Projection electron beam lithography apparatus and method employing...
- Patent number 7,050,957
- Issue date May 23, 2006
- Agere Systems Inc.
- Stuart T. Stanton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming an alignment feature in or on a multi-layered sem...
- Patent number 6,706,609
- Issue date Mar 16, 2004
- Agere Systems Inc.
- David M. Boulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for suppressing space charge induced aberrations...
- Patent number 6,528,799
- Issue date Mar 4, 2003
- Lucent Technologies, Inc.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Illumination system for electron beam lithography tool
- Patent number 6,333,508
- Issue date Dec 25, 2001
- Lucent Technologies, Inc.
- Victor Katsap
- B82 - NANO-TECHNOLOGY

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Patents Applicationslast 30 patents

Information Patent Application
Projection electron beam lithography apparatus and method employing...
- Publication number 20060116858
- Publication date Jun 1, 2006
- Agere Systems Inc.
- Stuart T. Stanton
- G05 - CONTROLLING REGULATING