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Zhubei City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Fluid nozzle device and method for cleaning a substrate using the same
Patent number
9,737,901
Issue date
Aug 22, 2017
ELS SYSTEM TECHNOLOGY CO., LTD.
Chih-Ming Teng
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
FLUID NOZZLE DEVICE AND METHOD FOR CLEANING A SUBSTRATE USING THE SAME
Publication number
20150013727
Publication date
Jan 15, 2015
els System Technology Co., Ltd.
Chih-Ming Teng
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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