Etec Systems, Inc.

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Organization

NV, US

SPECIAL INDUSTRY MACHINERY, NEC
Business Address
26460 CORPORATE AVE M/S 1240 HAYWARD CA 94545 5107839210
Mailing Address
26460 CORPORATE AVENUE M/S 1240 HAYWARD CA 94545
State Location
CA
State of Incorporation
NV

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Patents Grantslast 30 patents

Information Patent Grant
Scanning lithography system with opposing motion
- Patent number 5,815,245
- Issue date Sep 29, 1998
- Etec Systems, Inc.
- Timothy N. Thomas
- G02 - OPTICS
Information Patent Grant
Magnification correction for small field scanning
- Patent number 5,739,964
- Issue date Apr 14, 1998
- Etec Systems, Inc.
- Paul C. Allen
- G02 - OPTICS

Patents Applicationslast 30 patents

Trademarklast 30 trademarks