EUGENE TECHNOLOGY CO., LTD.

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Chungcheongnam-do, KR

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing impurities in thin film and substrate processin...
- Patent number 11,972,946
- Issue date Apr 30, 2024
- Eugene Technology Co., Ltd.
- Kyu Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead and substrate processing apparatus including the same
- Patent number 11,242,601
- Issue date Feb 8, 2022
- Eugene Technology Co., Ltd.
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ICP antenna and substrate processing device including the same
- Patent number 10,892,139
- Issue date Jan 12, 2021
- Eugene Technology Co., Ltd.
- Yoon Seok Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for assembling tube assembly
- Patent number 10,840,118
- Issue date Nov 17, 2020
- Eugene Technology Co., Ltd.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 10,793,949
- Issue date Oct 6, 2020
- Eugene Technology Co., Ltd.
- Jun Jin Hyon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming epitaxial layer at low temperature
- Patent number 10,796,915
- Issue date Oct 6, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Doo Yeol Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,741,396
- Issue date Aug 11, 2020
- Eugene Technology Co., Ltd.
- Woo Duck Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,692,745
- Issue date Jun 23, 2020
- Eugene Technology Co., Ltd.
- Sung Ha Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting unit, substrate processing apparatus, and meth...
- Patent number 10,622,228
- Issue date Apr 14, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for substrate processing using exhaust ports
- Patent number 10,593,545
- Issue date Mar 17, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,392,702
- Issue date Aug 27, 2019
- Eugene Technology Co., Ltd.
- Woo Duck Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,364,494
- Issue date Jul 30, 2019
- Eugene Technology Co., Ltd.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,337,103
- Issue date Jul 2, 2019
- Eugene Technology Co., Ltd.
- Jun Jin Hyon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device
- Patent number 10,287,687
- Issue date May 14, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple gases providing method and multiple gases providing apparatus
- Patent number 10,283,391
- Issue date May 7, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Jun-Jin Hyon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming amorphous thin film
- Patent number 10,246,773
- Issue date Apr 2, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Seung-Woo Shin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate treatment apparatus
- Patent number 10,229,845
- Issue date Mar 12, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Jun-Jin Hyon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,199,225
- Issue date Feb 5, 2019
- Eugene Technology Co., Ltd.
- Woo Duck Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting unit, substrate processing apparatus, and meth...
- Patent number 10,192,760
- Issue date Jan 29, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,161,036
- Issue date Dec 25, 2018
- Eugene Technology Co., Ltd.
- Jun Jin Hyon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,145,012
- Issue date Dec 4, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for manufacturing three-dimensional-structure...
- Patent number 10,006,121
- Issue date Jun 26, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Sung Kil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including heat-shield plate
- Patent number 9,953,850
- Issue date Apr 24, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including exhaust ports and substrat...
- Patent number 9,875,895
- Issue date Jan 23, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting unit and substrate processing apparatus manufa...
- Patent number 9,761,473
- Issue date Sep 12, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Hai Won Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus, and method for controlling temperatu...
- Patent number 9,758,870
- Issue date Sep 12, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming polysilicon film
- Patent number 9,741,562
- Issue date Aug 22, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Seung-Woo Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclic deposition method for thin film and manufacturing method for...
- Patent number 9,741,574
- Issue date Aug 22, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Hai-Won Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing amorphous silicon film
- Patent number 9,721,798
- Issue date Aug 1, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Seung-Woo Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater moving type substrate processing apparatus
- Patent number 9,644,895
- Issue date May 9, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20230411203
- Publication date Dec 21, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Ryong HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20230282459
- Publication date Sep 7, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20230253191
- Publication date Aug 10, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230245867
- Publication date Aug 3, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Woo Duck JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20230097999
- Publication date Mar 30, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Doo-Yeol RYU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME
- Publication number 20230082802
- Publication date Mar 16, 2023
- SK HYNIX INC.
- Min Jin JUNG
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230005712
- Publication date Jan 5, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Yong Ki KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220336259
- Publication date Oct 20, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Sang Don LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20220328340
- Publication date Oct 13, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Byoung Gyu SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA
- Publication number 20220277931
- Publication date Sep 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Yoon Seok CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING IMPURITIES IN THIN FILM AND SUBSTRATE PROCESSIN...
- Publication number 20220230875
- Publication date Jul 21, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Kyu Jin CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR PROCESSING SUBSTRATE
- Publication number 20220165588
- Publication date May 26, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Chang Dol KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20220130647
- Publication date Apr 28, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20220093445
- Publication date Mar 24, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Ryong HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD FOR SUBSTRATE P...
- Publication number 20220076963
- Publication date Mar 10, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Seung Kook YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A THIN FILM
- Publication number 20220049349
- Publication date Feb 17, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Jin Woong KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220028658
- Publication date Jan 27, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD
- Publication number 20210102287
- Publication date Apr 8, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Kwang Woon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH-TYPE SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20210017644
- Publication date Jan 21, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Hee Seok KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
- Publication number 20200392619
- Publication date Dec 17, 2020
- SK HYNIX INC.
- Min Jin JUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20200350143
- Publication date Nov 5, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20200350145
- Publication date Nov 5, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20200263303
- Publication date Aug 20, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Sung Tae JE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200243301
- Publication date Jul 30, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ICP ANTENNA AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME
- Publication number 20190385814
- Publication date Dec 19, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Yoon-Seok CHOI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20190341278
- Publication date Nov 7, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20190316254
- Publication date Oct 17, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING EPITAXIAL LAYER AT LOW TEMPERATURE
- Publication number 20190304785
- Publication date Oct 3, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Doo Yeol RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS
- Publication number 20190108985
- Publication date Apr 11, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS
- Publication number 20190085456
- Publication date Mar 21, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

EUGENE TECHNOLOGY CO., LTD.

Organization

Patents Grantslast 30 patents

Method for removing impurities in thin film and substrate processin...

Showerhead and substrate processing apparatus including the same

ICP antenna and substrate processing device including the same

Substrate processing apparatus and method for assembling tube assembly

Substrate processing apparatus and substrate processing method usin...

Method for forming epitaxial layer at low temperature

Substrate processing apparatus

Substrate processing apparatus

Substrate supporting unit, substrate processing apparatus, and meth...

Method for substrate processing using exhaust ports

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate processing device

Multiple gases providing method and multiple gases providing apparatus

Method for forming amorphous thin film

Substrate treatment apparatus

Substrate processing apparatus

Substrate supporting unit, substrate processing apparatus, and meth...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Method and apparatus for manufacturing three-dimensional-structure...

Substrate processing apparatus including heat-shield plate

Substrate processing apparatus including exhaust ports and substrat...

Substrate supporting unit and substrate processing apparatus manufa...

Substrate treatment apparatus, and method for controlling temperatu...

Method for forming polysilicon film

Cyclic deposition method for thin film and manufacturing method for...

Method and apparatus for depositing amorphous silicon film

Heater moving type substrate processing apparatus

Patents Applicationslast 30 patents

APPARATUS FOR PROCESSING SUBSTRATE

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORT ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING APPARATUS HAVING...

APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA

METHOD FOR REMOVING IMPURITIES IN THIN FILM AND SUBSTRATE PROCESSIN...

SYSTEM FOR PROCESSING SUBSTRATE

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD FOR SUBSTRATE P...

METHOD FOR FORMING A THIN FILM

PLASMA PROCESSING APPARATUS

THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD

BATCH-TYPE SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD THEREOF

APPARATUS AND METHOD OF PROCESSING A SUBSTRATE

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

PLASMA PROCESSING APPARATUS

ICP ANTENNA AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

METHOD FOR FORMING EPITAXIAL LAYER AT LOW TEMPERATURE

BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

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