EUV Limited Liability Corporation

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for the manufacture of phase shifting masks for EUV lithography
- Patent number 7,022,435
- Issue date Apr 4, 2006
- EUV Limited Liability Corporation
- Daniel G. Stearns
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method to repair localized amplitude defects in a EUV lithography m...
- Patent number 6,967,168
- Issue date Nov 22, 2005
- The EUV Limited Liability Corporation
- Daniel G. Stearns
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Etched-multilayer phase shifting masks for EUV lithography
- Patent number 6,875,543
- Issue date Apr 5, 2005
- EUV Limited Liability Corporation
- Henry N. Chapman
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Growth of multi-component alloy films with controlled graded chemic...
- Patent number 6,867,149
- Issue date Mar 15, 2005
- EUV Limited Liability Corporation
- Sasa Bajt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of precision optics using an imbedded reference surface
- Patent number 6,849,859
- Issue date Feb 1, 2005
- EUV Limited Liability Corporation
- James A. Folta
- G02 - OPTICS
Information Patent Grant
Correction of localized shape errors on optical surfaces by alterin...
- Patent number 6,844,272
- Issue date Jan 18, 2005
- EUV Limited Liability Corporation
- John S. Taylor
- B82 - NANO-TECHNOLOGY