Excimer Laser Systems Inc

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Organization

Wayland, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum chuck
- Patent number 6,032,997
- Issue date Mar 7, 2000
- Excimer Laser Systems
- David J. Elliott
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Enclosure system for laser optical systems and devices
- Patent number 5,771,260
- Issue date Jun 23, 1998
- Excimer Laser Systems, Inc.
- David J. Elliott
- G02 - OPTICS
Information Patent Grant
Deep ultraviolet optical imaging system for microlithography and/or...
- Patent number 5,559,338
- Issue date Sep 24, 1996
- Excimer Laser Systems, Inc.
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deep ultraviolet microlithography system
- Patent number 5,488,229
- Issue date Jan 30, 1996
- Excimer Laser Systems, Inc.
- David J. Elliott
- G02 - OPTICS

NSF Awardslast 12 months

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Count: 2

NSF Awards

Information NSF Award
Catadioptric Lens for Excimer Laser Lithography
- Award Id 9301920
- Effective date Oct 1, 1994
Information NSF Award
Catadioptric Lens for Excimer Laser Lithography
- Award Id 9161062
- Effective date Jan 15, 1992