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FABMATICS GMBH
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DRESDEN, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Interface device for a purging unit for purging a wafer container
Patent number
11,462,427
Issue date
Oct 4, 2022
Fabmatics GmbH
Bernhard Stein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FOUP measurement chamber
Patent number
10,847,396
Issue date
Nov 24, 2020
Fabmatics GmbH
Martin Bachlechner
G01 - MEASURING TESTING
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Patent Grant
Flexible purge management system
Patent number
9,875,921
Issue date
Jan 23, 2018
Fabmatics GmbH
Martin Bachlechner
H01 - BASIC ELECTRIC ELEMENTS
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Patents Applications
last 30 patents
Information
Patent Application
SHUTTLE STORAGE AND METHOD FOR PRODUCING THE SAME
Publication number
20240327119
Publication date
Oct 3, 2024
Fabmatics GmbH
Karsten BUDACH
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
Interface Device for a Purging Unit for Purging a Wafer Container
Publication number
20200227296
Publication date
Jul 16, 2020
Fabmatics GmbH
Bernhard Stein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOUP Measurement Chamber
Publication number
20190131155
Publication date
May 2, 2019
Fabmatics GmbH
Martin Bachlechner
H01 - BASIC ELECTRIC ELEMENTS