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last 30 patents
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Patent Grant
Alignment unit control apparatus and alignment method
Patent number
8,737,719
Issue date
May 27, 2014
Mitsubishi Heavy Industries, Ltd.
Yoichiro Tsumura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ALIGNMENT UNIT CONTROL APPARATUS AND ALIGNMENT METHOD
Publication number
20110134235
Publication date
Jun 9, 2011
Mitsubishi Heavy Industries, Ltd.
Yoichiro Tsumura
H01 - BASIC ELECTRIC ELEMENTS
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