FSI International, Inc.

Organization

Chaska, MN, US

SPECIAL INDUSTRY MACHINERY, NEC
Business Address
3455 LYMAN BLVD. CHASKA MN 55318 9524485440
Mailing Address
3455 LYMAN BLVD. CHASKA MN 55318
State Location
MN
State of Incorporation
MN

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 8,235,062
- Issue date Aug 7, 2012
- FSI International, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing systems and related methods
- Patent number 8,235,068
- Issue date Aug 7, 2012
- FSI International, Inc.
- Kurt K. Christenson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process for treatment of semiconductor wafer using water vapor cont...
- Patent number 8,142,571
- Issue date Mar 27, 2012
- FSI International, Inc.
- Kurt K. Christenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reagent activator for electroless plating
- Patent number 8,104,425
- Issue date Jan 31, 2012
- FSI International, Inc.
- Kurt Karl Christenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for rinsing microelectronic substrates utilizing cool rinse...
- Patent number 8,070,884
- Issue date Dec 6, 2011
- FSI International, Inc.
- Tracy A. Gast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rinsing methodologies for barrier plate and venturi containment sys...
- Patent number 7,913,706
- Issue date Mar 29, 2011
- FSI International, Inc.
- David DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treatment of substrates with water vapor or steam
- Patent number 7,819,984
- Issue date Oct 26, 2010
- FSI International, Inc.
- David DeKraker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compact duct system incorporating moveable and nestable baffles for...
- Patent number 7,681,581
- Issue date Mar 23, 2010
- FSI International, Inc.
- Alan D. Rose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for removing material from substrates
- Patent number 7,592,264
- Issue date Sep 22, 2009
- FSI International, Inc.
- Kurt Karl Christenson
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
System and method for carrying out liquid and subsequent drying tre...
- Patent number 7,556,697
- Issue date Jul 7, 2009
- FSI International, Inc.
- Arne C. Benson
- B08 - CLEANING
Information Patent Grant
Reagent activator for electroless plating
- Patent number 7,476,616
- Issue date Jan 13, 2009
- FSI International, Inc.
- Kurt Karl Christenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of silyating agents
- Patent number 7,425,505
- Issue date Sep 16, 2008
- FSI International, Inc.
- Philip G. Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary unions, fluid delivery systems, and related methods
- Patent number 7,422,031
- Issue date Sep 9, 2008
- FSI International, Inc.
- Arne C. Benson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Coating methods and apparatus for coating
- Patent number 7,404,681
- Issue date Jul 29, 2008
- FSI International, Inc.
- Samuel A. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rinsing processes and equipment
- Patent number 7,364,625
- Issue date Apr 29, 2008
- FSI International, Inc.
- Kurt K. Christenson
- B08 - CLEANING
Information Patent Grant
Advanced process control for low variation treatment in immersion p...
- Patent number 7,312,161
- Issue date Dec 25, 2007
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectronic device drying devices and techniques
- Patent number 7,244,315
- Issue date Jul 17, 2007
- FSI International, Inc.
- Tracy A. Gast
- B08 - CLEANING
Information Patent Grant
Liquid coating device with barometric pressure compensation
- Patent number 7,238,239
- Issue date Jul 3, 2007
- FSI International, Inc.
- Joseph W. Daggett
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Controlled growth of highly uniform, oxide layers, especially ultra...
- Patent number 7,235,495
- Issue date Jun 26, 2007
- FSI International, Inc.
- Thomas J. Wagener
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transition flow treatment process and apparatus
- Patent number 7,156,927
- Issue date Jan 2, 2007
- FSI International, Inc.
- Kurt Karl Christenson
- B08 - CLEANING
Information Patent Grant
Reduced footprint tool for automated processing of microelectronic...
- Patent number 7,134,827
- Issue date Nov 14, 2006
- FSI International, Inc.
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scheduling multi-robot processing systems
- Patent number 7,089,076
- Issue date Aug 8, 2006
- FSI International, Inc.
- H. Neil Geismar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for surface conditioning
- Patent number 7,025,831
- Issue date Apr 11, 2006
- FSI International, Inc.
- Jeffery W. Butterbaugh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Robot with tactile sensor device
- Patent number 6,996,456
- Issue date Feb 7, 2006
- FSI International, Inc.
- Andrew W. Cordell
- G05 - CONTROLLING REGULATING
Information Patent Grant
Reduced footprint tool for automated processing of microelectronic...
- Patent number 6,979,165
- Issue date Dec 27, 2005
- FSI International, Inc.
- Robert E. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal process station with heated lid
- Patent number 6,884,066
- Issue date Apr 26, 2005
- FSI International, Inc.
- Vuong P. Nguyen
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Semiconductor wafer cleaning systems and methods
- Patent number 6,875,289
- Issue date Apr 5, 2005
- FSI International, Inc.
- Kurt K. Christenson
- G11 - INFORMATION STORAGE
Information Patent Grant
Temperature control apparatus and method with recirculated coolant
- Patent number 6,854,514
- Issue date Feb 15, 2005
- FSI International, Inc.
- Ben J. Sloan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge gripping device for handling a set of semiconductor wafers in...
- Patent number 6,845,779
- Issue date Jan 25, 2005
- FSI International, Inc.
- Tim W. Herbst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing system and methods for forming low-k dielectric...
- Patent number 6,838,115
- Issue date Jan 4, 2005
- FSI International, Inc.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES
- Publication number 20130037511
- Publication date Feb 14, 2013
- FSI International, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE
- Publication number 20130032172
- Publication date Feb 7, 2013
- FSI International, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...
- Publication number 20130032182
- Publication date Feb 7, 2013
- FSI International, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR SUPPLYING WATER VAPOR IN SEMICONDUCTOR WAFER TREATMENT
- Publication number 20100124410
- Publication date May 20, 2010
- FSI International, Inc.
- Arne Benson
- B08 - CLEANING
Information Patent Application
HYDROPHILIC FLUOROPOLYMER MATERIALS AND METHODS
- Publication number 20090304995
- Publication date Dec 10, 2009
- FSI International, Inc.
- Kurt Karl Christenson
- B24 - GRINDING POLISHING
Information Patent Application
PROCESS FOR TREATMENT OF SEMICONDUCTOR WAFER USING WATER VAPOR CONT...
- Publication number 20090286334
- Publication date Nov 19, 2009
- FSI INTERNATIONAL, INC.
- Kurt K. Christenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED PROCESS CONTROL FOR LOW VARIATION TREATMENT IN IMMERSION P...
- Publication number 20070257011
- Publication date Nov 8, 2007
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Robot with vibration sensor device
- Publication number 20070001638
- Publication date Jan 4, 2007
- FSI International, Inc.
- Charles Gray
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHODS FOR RINSING MICROELECTRONIC SUBSTRATES UTILIZING COOL RINSE...
- Publication number 20060219258
- Publication date Oct 5, 2006
- FSI International, Inc.
- Tracy A. Gast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reagent activator for electroless plating
- Publication number 20060128133
- Publication date Jun 15, 2006
- FSI International, Inc.
- Kurt Karl Christenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotary unions, fluid delivery systems, and related methods
- Publication number 20050200123
- Publication date Sep 15, 2005
- FSI International, Inc.
- Arne C. Benson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SCHEDULING MULTI-ROBOT PROCESSING SYSTEMS
- Publication number 20040230334
- Publication date Nov 18, 2004
- FSI International
- H. Neil Geismar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods incorporating an end effector with a rotatable...
- Publication number 20040012363
- Publication date Jan 22, 2004
- FSI International, Inc.
- Sean D. Simondet
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
High flow high control valve and assembly
- Publication number 20030116204
- Publication date Jun 26, 2003
- FSI International, Inc.
- Michael Volovets
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Nozzle design for generating fluid streams useful in the manufactur...
- Publication number 20020139125
- Publication date Oct 3, 2002
- FSI International, Inc.
- Pam Kunkel
- B24 - GRINDING POLISHING
Information Patent Application
Thermal processing chamber for heating and cooling wafer-like objects
- Publication number 20010040155
- Publication date Nov 15, 2001
- FSI International Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
77093864 - YIELDUP
- Serial number 77093864
- Registration number 3306145
- Filing date Jan 29, 2007
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
77092454 - ORION
- Serial number 77092454
- Registration number 3427695
- Filing date Jan 26, 2007
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
78267234 - INSTACURE
- Serial number 78267234
- Registration number 2904894
- Filing date Jun 26, 2003
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
78171182 - ALWAYS THINKING // BETTER
- Serial number 78171182
- Registration number 2808576
- Filing date Oct 4, 2002
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
76446826 - SYMFLOW
- Serial number 76446826
- Registration number 2998609
- Filing date Sep 4, 2002
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
76323051 - MAGELLAN
- Serial number 76323051
- Registration number 2751103
- Filing date Oct 9, 2001
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
76227446 - FSI
- Serial number 76227446
- Registration number 2617351
- Filing date Mar 20, 2001
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
76074948 - STG
- Serial number 76074948
- Registration number 2455466
- Filing date Jun 21, 2000
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
75805985 - INSTACURE
- Serial number 75805985
- Filing date Sep 22, 1999
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
75746644 - CALYPSO
- Serial number 75746644
- Filing date Jul 9, 1999
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75519457 - METALLIS
- Serial number 75519457
- Filing date Jul 15, 1998
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
75516767 - ANTARES
- Serial number 75516767
- Registration number 2496596
- Filing date Jul 10, 1998
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
75516986
- Serial number 75516986
- Registration number 2386249
- Filing date Jul 10, 1998
- FSI INTERNATIONAL, INC.
- 7 - Machines and machine tools
Information Trademark
75308245 - DYCONEX
- Serial number 75308245
- Registration number 2594500
- Filing date Jun 13, 1997
- FSI INTERNATIONAL, INC.
- 37 - Building construction
Information Trademark
75097151 - ARIES
- Serial number 75097151
- Registration number 2177248
- Filing date May 1, 1996
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75052351 - ZETA
- Serial number 75052351
- Registration number 2341602
- Filing date Feb 2, 1996
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75001154 - ICE
- Serial number 75001154
- Filing date Oct 3, 1995
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74662892 - HEPASPHERE
- Serial number 74662892
- Filing date Apr 19, 1995
- FSI INTERNATIONAL, INC.
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
74379012 - ORION
- Serial number 74379012
- Registration number 2032431
- Filing date Apr 14, 1993
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74121760 - HELIOS
- Serial number 74121760
- Registration number 1696899
- Filing date Dec 10, 1990
- FSI INTERNATIONAL, INC.
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
74054479 - POLARIS
- Serial number 74054479
- Registration number 1696821
- Filing date Apr 30, 1990
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73760704 - FSI
- Serial number 73760704
- Registration number 1631352
- Filing date Oct 31, 1988
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
73736932 - MERCURY
- Serial number 73736932
- Registration number 1560565
- Filing date Jun 27, 1988
- FSI INTERNATIONAL, INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

FSI International, Inc.

Organization

Business Address

Mailing Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Tools and methods for processing microelectronic workpieces using p...

Substrate processing systems and related methods

Process for treatment of semiconductor wafer using water vapor cont...

Reagent activator for electroless plating

Methods for rinsing microelectronic substrates utilizing cool rinse...

Rinsing methodologies for barrier plate and venturi containment sys...

Process for treatment of substrates with water vapor or steam

Compact duct system incorporating moveable and nestable baffles for...

Process for removing material from substrates

System and method for carrying out liquid and subsequent drying tre...

Reagent activator for electroless plating

Use of silyating agents

Rotary unions, fluid delivery systems, and related methods

Coating methods and apparatus for coating

Rinsing processes and equipment

Advanced process control for low variation treatment in immersion p...

Microelectronic device drying devices and techniques

Liquid coating device with barometric pressure compensation

Controlled growth of highly uniform, oxide layers, especially ultra...

Transition flow treatment process and apparatus

Reduced footprint tool for automated processing of microelectronic...

Scheduling multi-robot processing systems

Apparatus for surface conditioning

Robot with tactile sensor device

Reduced footprint tool for automated processing of microelectronic...

Thermal process station with heated lid

Semiconductor wafer cleaning systems and methods

Temperature control apparatus and method with recirculated coolant

Edge gripping device for handling a set of semiconductor wafers in...

Thermal processing system and methods for forming low-k dielectric...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES

METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE

BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...

SYSTEM FOR SUPPLYING WATER VAPOR IN SEMICONDUCTOR WAFER TREATMENT

HYDROPHILIC FLUOROPOLYMER MATERIALS AND METHODS

PROCESS FOR TREATMENT OF SEMICONDUCTOR WAFER USING WATER VAPOR CONT...

ADVANCED PROCESS CONTROL FOR LOW VARIATION TREATMENT IN IMMERSION P...

Robot with vibration sensor device

METHODS FOR RINSING MICROELECTRONIC SUBSTRATES UTILIZING COOL RINSE...

Reagent activator for electroless plating

Rotary unions, fluid delivery systems, and related methods

SCHEDULING MULTI-ROBOT PROCESSING SYSTEMS

Systems and methods incorporating an end effector with a rotatable...

High flow high control valve and assembly

Nozzle design for generating fluid streams useful in the manufactur...

Thermal processing chamber for heating and cooling wafer-like objects

Trademarklast 30 trademarks

77093864 - YIELDUP

77092454 - ORION

78267234 - INSTACURE

78171182 - ALWAYS THINKING // BETTER

76446826 - SYMFLOW

76323051 - MAGELLAN

76227446 - FSI

76074948 - STG

75805985 - INSTACURE

75746644 - CALYPSO

75519457 - METALLIS

75516767 - ANTARES

75516986

75308245 - DYCONEX

75097151 - ARIES

75052351 - ZETA

75001154 - ICE

74662892 - HEPASPHERE

74379012 - ORION

74121760 - HELIOS

74054479 - POLARIS

73760704 - FSI

73736932 - MERCURY