GaSonics International Corporation

Organization

San Jose, CA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
- Patent number 6,228,563
- Issue date May 8, 2001
- GaSonics International Corporation
- Vladimir Starov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Energy transfer microwave plasma source
- Patent number 6,211,621
- Issue date Apr 3, 2001
- Gasonics International
- James W. Caughran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer device and method
- Patent number 6,190,103
- Issue date Feb 20, 2001
- GaSonics International Corporation
- Shmuel Erez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End effector
- Patent number 6,183,026
- Issue date Feb 6, 2001
- GaSonics International Corporation
- Lihong Cai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant impedance-matching slow-wave ring structure microwave appl...
- Patent number 6,175,095
- Issue date Jan 16, 2001
- Gasonics International
- Niles K. MacDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backside etch process chamber and method
- Patent number 5,914,278
- Issue date Jun 22, 1999
- Gasonics International
- Charles A. Boitnott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular process system
- Patent number 5,863,170
- Issue date Jan 26, 1999
- Gasonics International
- Charles A. Boitnott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing carousel
- Patent number 5,855,465
- Issue date Jan 5, 1999
- Gasonics International
- Charles A. Boitnott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Short-coupled-path extender for plasma source
- Patent number 5,814,154
- Issue date Sep 29, 1998
- Gasonics International
- Charles A. Boitnott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber sleeve with ring seals for isolating individual pro...
- Patent number 5,667,592
- Issue date Sep 16, 1997
- Gasonics International
- Charles A. Boitnott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular gas box system
- Patent number 5,662,143
- Issue date Sep 2, 1997
- Gasonics International
- James W. Caughran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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Trademarklast 30 trademarks

Information Trademark
76110139 - IRIDIA
- Serial number 76110139
- Filing date Aug 15, 2000
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
76110141
- Serial number 76110141
- Filing date Aug 15, 2000
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
76110140 - IRIDIA
- Serial number 76110140
- Registration number 2590681
- Filing date Aug 14, 2000
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
76109725 - GASONICS
- Serial number 76109725
- Registration number 2581157
- Filing date Aug 14, 2000
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
75513115 - INTEGRATEDCLEAN
- Serial number 75513115
- Filing date Jul 6, 1998
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
75409265 - INTEGRATED CLEAN
- Serial number 75409265
- Filing date Dec 22, 1997
- GaSonics International Corporation,
- 7 - Machines and machine tools
Information Trademark
75289908 - DFC
- Serial number 75289908
- Filing date May 12, 1997
- GaSonics International Corporation
- 1 - Chemicals used in industry, science and photography, as well as in agriculture, horticulture and forestry
Information Trademark
75289907 - MILLENNIA
- Serial number 75289907
- Filing date May 12, 1997
- GaSonics International Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75276376 - MILLENNIA
- Serial number 75276376
- Filing date Apr 17, 1997
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
75276385 - DFC
- Serial number 75276385
- Filing date Apr 17, 1997
- GaSonics International Corporation
- 7 - Machines and machine tools
Information Trademark
74587278 - IPC
- Serial number 74587278
- Filing date Oct 19, 1994
- GaSonics International Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

GaSonics International Corporation

Organization

Patents Grantslast 30 patents

Method and apparatus for removing post-etch residues and other adhe...

Energy transfer microwave plasma source

Wafer transfer device and method

End effector

Resonant impedance-matching slow-wave ring structure microwave appl...

Backside etch process chamber and method

Modular process system

Semiconductor wafer processing carousel

Short-coupled-path extender for plasma source

Process chamber sleeve with ring seals for isolating individual pro...

Modular gas box system

Trademarklast 30 trademarks

76110139 - IRIDIA

76110141

76110140 - IRIDIA

76109725 - GASONICS

75513115 - INTEGRATEDCLEAN

75409265 - INTEGRATED CLEAN

75289908 - DFC

75289907 - MILLENNIA

75276376 - MILLENNIA

75276385 - DFC

74587278 - IPC