HAMPSHIRE INSTRUMENTS, INC.

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ROCHESTER, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Pin chuck for lithography system
- Patent number 5,197,089
- Issue date Mar 23, 1993
- Hampshire Instruments, Inc.
- David G. Baker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Partially constrained minimum energy state controller
- Patent number 5,165,094
- Issue date Nov 17, 1992
- Hampshire Instruments, Inc.
- Neil H. Judell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
X-ray lithography system
- Patent number 4,980,896
- Issue date Dec 25, 1990
- Hampshire Instruments, Inc.
- James M. Forsyth
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray lithography system
- Patent number 4,969,169
- Issue date Nov 6, 1990
- Hampshire Instruments, Inc.
- James M. Forsyth
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Long life X-ray source target
- Patent number 4,896,341
- Issue date Jan 23, 1990
- Hampshire Instruments, Inc.
- James M. Forsyth
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Target structure for x-ray lithography system
- Patent number 4,872,189
- Issue date Oct 3, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gap sensing/adjustment apparatus and method for a lithography machine
- Patent number 4,870,668
- Issue date Sep 26, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Target positioning for minimum debris
- Patent number 4,860,328
- Issue date Aug 22, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mass limited target
- Patent number 4,837,793
- Issue date Jun 6, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic system mask inspection device
- Patent number 4,734,923
- Issue date Mar 29, 1988
- Hampshire Instruments, Inc.
- Robert D. Frankel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Long life x-ray source target
- Patent number 4,700,371
- Issue date Oct 13, 1987
- Hampshire Instruments, Inc.
- James M. Forsyth
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray lithography system
- Patent number 4,692,934
- Issue date Sep 8, 1987
- Hampshire Instruments
- James M. Forsyth
- B82 - NANO-TECHNOLOGY

HAMPSHIRE INSTRUMENTS, INC.

Organization

Patents Grantslast 30 patents

Pin chuck for lithography system

Partially constrained minimum energy state controller

X-ray lithography system

X-ray lithography system

Long life X-ray source target

Target structure for x-ray lithography system

Gap sensing/adjustment apparatus and method for a lithography machine

Target positioning for minimum debris

Mass limited target

Lithographic system mask inspection device

Long life x-ray source target

X-ray lithography system

Patents Applicationslast 30 patents

Trademarklast 30 trademarks