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Patents Grants
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Patent Grant
Apparatus and method for the removal of pellicles from masks
Patent number
8,168,036
Issue date
May 1, 2012
HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH
Lothar Andritzke
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patents Applications
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Patent Application
Apparatus for transporting and aligning disk-shaped elements
Publication number
20050123387
Publication date
Jun 9, 2005
HAP Handhabungs-, Automatisierungs- und Prazisionstechnik GmbH
Steffen Pollack
H01 - BASIC ELECTRIC ELEMENTS
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Trademark
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Trademark
79197943 - FABMATICS
Serial number
79197943
Registration number
5337499
Filing date
Oct 11, 2016
HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH Dresden
7 - Machines and machine tools