Horiike; Yasuhiro

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Hiroshima, JP

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Patents Grantslast 30 patents

Information Patent Grant
ECR plasma generator and an ECR system using the generator
- Patent number 6,155,200
- Issue date Dec 5, 2000
- Tokyo Electron Limited
- Yasuhiro Horiike
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching an SiO.sub.2 film
- Patent number 5,328,558
- Issue date Jul 12, 1994
- Tokyo Electron Limited
- Kouhei Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing surface of semiconductor layer
- Patent number 5,308,791
- Issue date May 3, 1994
- Tokyo Electron Limited
- Yasuhiro Horiike
- H01 - BASIC ELECTRIC ELEMENTS

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