Hyundia Electronics Industries Co., Ltd.

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Ichon-Shi, KR

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Dry etching method of multilayer film
- Patent number 6,146,542
- Issue date Nov 14, 2000
- Hyundia Electronics Industries Co., Ltd.
- Jae-Hee Ha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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