IBIS TECHNOLOGY CORPORATION

Organization

Danvers, MA, US

SEMICONDUCTORS & RELATED DEVICES
Business Address
32 CHERRY HILL DR DANVERS MA 01923 9787774247
Mailing Address
32 CHERRY HILL DR DANVERS MA 01923
State Location
MA
State of Incorporation
MA

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Internal gettering in SIMOX SOI silicon substrates
- Patent number 7,294,561
- Issue date Nov 13, 2007
- Ibis Technology Corporation
- Yuri Erokhin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing a high resistivity SIMOX silicon substrate
- Patent number 7,112,509
- Issue date Sep 26, 2006
- Ibis Technology Corporation
- Yuri Erokhin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power sag detection and control in ion implanting system
- Patent number 7,067,829
- Issue date Jun 27, 2006
- Ibis Technology Coporation
- Steven Richards
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active wafer cooling during damage engineering implant to enhance b...
- Patent number 6,998,353
- Issue date Feb 14, 2006
- Ibis Technology Corporation
- Yuri Erokhin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SIMOX using controlled water vapor for oxygen implants
- Patent number 6,989,315
- Issue date Jan 24, 2006
- Ibis Technology, Inc.
- Robert Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaft cooling mechanisms
- Patent number 6,863,736
- Issue date Mar 8, 2005
- Ibis Technology Corporation
- William Leavitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam stop for use in an ion implantation system
- Patent number 6,815,696
- Issue date Nov 9, 2004
- Ibis Technology Corporation
- Steven Richards
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation process using substoichiometric, oxygen doses at diffe...
- Patent number 6,794,264
- Issue date Sep 21, 2004
- Ibis Technology Corporation
- Robert P. Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermosetting resin wafer-holding pin
- Patent number 6,794,662
- Issue date Sep 21, 2004
- Ibis Technology Corporation
- William Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holding pin
- Patent number 6,774,376
- Issue date Aug 10, 2004
- Ibis Technology Corporation
- Bernhard F. Cordts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer heating devices for use in ion implantation systems
- Patent number 6,744,017
- Issue date Jun 1, 2004
- Ibis Technology Corporation
- William Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system having an energy probe
- Patent number 6,661,017
- Issue date Dec 9, 2003
- Ibis Technology Corporation
- Steven Richards
- G01 - MEASURING TESTING
Information Patent Grant
Low defect density, thin-layer, SOI substrates
- Patent number 6,593,173
- Issue date Jul 15, 2003
- Ibis Technology Corporation
- Maria J. Anc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holding pin
- Patent number 6,452,195
- Issue date Sep 17, 2002
- Ibis Technology Corporation
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated wafer holding pin
- Patent number 6,433,342
- Issue date Aug 13, 2002
- Ibis Technology Corporation
- Bernhard F. Cordts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder for simox processing
- Patent number 6,423,975
- Issue date Jul 23, 2002
- Ibis Technology, Inc.
- Theodore H. Smick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation process using sub-stoichiometric, oxygen doses at diff...
- Patent number 6,417,078
- Issue date Jul 9, 2002
- Ibis Technology Corporation
- Robert P. Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SIMOX using controlled water vapor for oxygen implants
- Patent number 6,248,642
- Issue date Jun 19, 2001
- Ibis Technology Corporation
- Robert Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc inhibiting wafer holder assembly
- Patent number 6,155,436
- Issue date Dec 5, 2000
- Ibis Technology Corporation
- Theodore H. Smick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic system and method for uniformly scanning heavy ion beams
- Patent number 5,481,116
- Issue date Jan 2, 1996
- Ibis Technology Corporation
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prenucleation process for simox device fabrication
- Patent number 5,288,650
- Issue date Feb 22, 1994
- Ibis Technology Corporation
- Peter M. Sandow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simox materials through energy variation
- Patent number 5,196,355
- Issue date Mar 23, 1993
- Ibis Technology Corporation
- Andrew B. Wittkower
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation profile control with surface sputtering
- Patent number 5,080,730
- Issue date Jan 14, 1992
- Ibis Technology Corporation
- Andrew B. Wittkower
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for ion implantation
- Patent number 5,053,627
- Issue date Oct 1, 1991
- Ibis Technology Corporation
- John P. Ruffell
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
ION BEAM PROFILER
- Publication number 20080073553
- Publication date Mar 27, 2008
- IBIS TECHNOLOGY CORPORATION
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID WAFER-HOLDER
- Publication number 20070199656
- Publication date Aug 30, 2007
- IBIS TECHNOLOGY CORPORATION
- William Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHARACTERIZING AN ION BEAM
- Publication number 20070194227
- Publication date Aug 23, 2007
- IBIS TECHNOLOGY CORPORATION
- Robert P. Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC PARTICLE GETTERING IN AN ION IMPLANTER
- Publication number 20070187618
- Publication date Aug 16, 2007
- IBIS TECHNOLOGY CORPORATION
- Robert P. Dolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING A HIGH RESISTIVITY SIMOX SILICON SUBSTRATE
- Publication number 20040224477
- Publication date Nov 11, 2004
- IBIS TECHNOLOGY CORPORATION
- Yuri Erokhin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM HAVING AN ENERGY PROBE
- Publication number 20030222226
- Publication date Dec 4, 2003
- IBIS TECHNOLOGY
- Steven Richards
- G01 - MEASURING TESTING
Information Patent Application
Shaft cooling mechanisms
- Publication number 20030221626
- Publication date Dec 4, 2003
- IBIS TECHNOLOGY
- William Leavitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer heating devices for use in ion implantation systems
- Publication number 20030222072
- Publication date Dec 4, 2003
- IBIS TECHNOLOGY CORPORATON
- William Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam stop for use in an ion implantation system
- Publication number 20030222227
- Publication date Dec 4, 2003
- IBIS TECHNOLOGY
- Steven Richards
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer holding pin
- Publication number 20030052282
- Publication date Mar 20, 2003
- IBIS TECHNOLOGY CORPORATION
- Bernhard F. Cordts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Implantation process using substoichiometric, oxygen doses at diffe...
- Publication number 20020123211
- Publication date Sep 5, 2002
- IBIS TECHNOLOGY
- Robert P. Dolan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANTATION PROCESS USING SUB-STOICHIOMETRIC, OXYGEN DOSES AT DIFF...
- Publication number 20020081824
- Publication date Jun 27, 2002
- Ibis Technology, Inc.
- Robert P. Dolan
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
76488055 - IBIS
- Serial number 76488055
- Registration number 2873499
- Filing date Feb 7, 2003
- Ibis Technology Corporation
- 7 - Machines and machine tools
Information Trademark
76488281 - I2000
- Serial number 76488281
- Registration number 2820909
- Filing date Feb 7, 2003
- Ibis Technology Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75266604 - IBIS TECHNOLOGY CORPORATION
- Serial number 75266604
- Registration number 2144636
- Filing date Mar 31, 1997
- Ibis Technology Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75172570 - ADVANTOX
- Serial number 75172570
- Registration number 2226547
- Filing date Sep 26, 1996
- Ibis Technology Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
74073629 - SIMOX
- Serial number 74073629
- Filing date Jun 28, 1990
- Ibis Technology Corp.
- 6 - Common metals and their alloys

NSF Awardslast 12 months

processing...

Count: 2

NSF Awards

Information NSF Award
Modified In-Situ Rutherford Design for Early SIMOX Contamination De...
- Award Id 9424597
- Effective date Oct 1, 1996
Information NSF Award
Modified In-Situ Rutherford Design for Early SIMOX Contamination De...
- Award Id 9360519
- Effective date Jan 15, 1994

IBIS TECHNOLOGY CORPORATION

Organization

Business Address

Mailing Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Internal gettering in SIMOX SOI silicon substrates

Method of producing a high resistivity SIMOX silicon substrate

Power sag detection and control in ion implanting system

Active wafer cooling during damage engineering implant to enhance b...

SIMOX using controlled water vapor for oxygen implants

Shaft cooling mechanisms

Beam stop for use in an ion implantation system

Implantation process using substoichiometric, oxygen doses at diffe...

Thermosetting resin wafer-holding pin

Wafer holding pin

Wafer heating devices for use in ion implantation systems

Ion implantation system having an energy probe

Low defect density, thin-layer, SOI substrates

Wafer holding pin

Coated wafer holding pin

Wafer holder for simox processing

Implantation process using sub-stoichiometric, oxygen doses at diff...

SIMOX using controlled water vapor for oxygen implants

Arc inhibiting wafer holder assembly

Magnetic system and method for uniformly scanning heavy ion beams

Prenucleation process for simox device fabrication

Simox materials through energy variation

Implantation profile control with surface sputtering

Apparatus for ion implantation

Patents Applicationslast 30 patents

ION BEAM PROFILER

HYBRID WAFER-HOLDER

METHOD OF CHARACTERIZING AN ION BEAM

ELECTROSTATIC PARTICLE GETTERING IN AN ION IMPLANTER

METHOD OF PRODUCING A HIGH RESISTIVITY SIMOX SILICON SUBSTRATE

ION IMPLANTATION SYSTEM HAVING AN ENERGY PROBE

Shaft cooling mechanisms

Wafer heating devices for use in ion implantation systems

Beam stop for use in an ion implantation system

Wafer holding pin

Implantation process using substoichiometric, oxygen doses at diffe...

IMPLANTATION PROCESS USING SUB-STOICHIOMETRIC, OXYGEN DOSES AT DIFF...

Trademarklast 30 trademarks

76488055 - IBIS

76488281 - I2000

75266604 - IBIS TECHNOLOGY CORPORATION

75172570 - ADVANTOX

74073629 - SIMOX

NSF Awardslast 12 months

NSF Awards

Modified In-Situ Rutherford Design for Early SIMOX Contamination De...

Modified In-Situ Rutherford Design for Early SIMOX Contamination De...