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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device with dynamic focus and method of opera...
Patent number
9,431,210
Issue date
Aug 30, 2016
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam device with dispersion compensation, and method of op...
Patent number
9,048,068
Issue date
Jun 2, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contamination reduction electrode for particle detector
Patent number
8,963,084
Issue date
Feb 24, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High brightness electron gun with moving condenser lens
Patent number
8,921,804
Issue date
Dec 30, 2014
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Jürgen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi channel detector, optics therefor and method of operating the...
Patent number
8,618,500
Issue date
Dec 31, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-axis lens, beam system making use of the compound lens, and m...
Patent number
8,481,958
Issue date
Jul 9, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for high spatial resolution and multip...
Patent number
7,544,937
Issue date
Jun 9, 2009
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
Publication number
20150228452
Publication date
Aug 13, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan LANIO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERA...
Publication number
20150213998
Publication date
Jul 30, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM SYSTEM FOR HIGH THROUGHPUT EBI
Publication number
20150155134
Publication date
Jun 4, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Jürgen FROSIEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD...
Publication number
20150021474
Publication date
Jan 22, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Matthias FIRNKES
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN ARRANGEMENT
Publication number
20140264019
Publication date
Sep 18, 2014
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH BRIGHTNESS ELECTRON GUN, SYSTEM USING THE SAME, AND METHOD OF...
Publication number
20140264063
Publication date
Sep 18, 2014
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
Publication number
20140191127
Publication date
Jul 10, 2014
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
Publication number
20140175277
Publication date
Jun 26, 2014
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH BRIGHTNESS ELECTRON GUN WITH MOVING CONDENSER LENS
Publication number
20130327951
Publication date
Dec 12, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Jürgen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
Publication number
20130320228
Publication date
Dec 5, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELEMENT FOR FAST MAGNETIC BEAM DEFLECTION
Publication number
20130306863
Publication date
Nov 21, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Pavel ADAMEC
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHANNEL DETECTOR, OPTICS THEREFOR AND METHOD OF OPERATING THE...
Publication number
20130270439
Publication date
Oct 17, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD O...
Publication number
20130270438
Publication date
Oct 17, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan LANIO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERA...
Publication number
20130214155
Publication date
Aug 22, 2013
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM DEVICE WITH TILTING AND DISPERSION COMPENSATION, AND...
Publication number
20120006997
Publication date
Jan 12, 2012
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Jürgen Frosien
H01 - BASIC ELECTRIC ELEMENTS
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