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IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT, LTD.

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  • Shanghai, CN
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    Plasma processing apparatus
    • Patent number 9,271,384
    • Issue date Feb 23, 2016
    • IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT, LTD.
    • Jinyuan Chen
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

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