IMM Institut Fur Mikrotechnik GmbH

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Patents Grantslast 30 patents

Information Patent Grant
Sensor head for use in atomic force microscopy and method for its p...
- Patent number 5,465,611
- Issue date Nov 14, 1995
- IMM Institut Fur Mikrotechnik GmbH
- Alexander Ruf
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method to produce nonlinear optical microcomponents
- Patent number 5,376,506
- Issue date Dec 27, 1994
- IMM, Institut fur Mikrotechnik GmbH
- Wolfgang Ehrfeld
- G02 - OPTICS
Information Patent Grant
Method to produce nonlinear optical microcomponents
- Patent number 5,376,507
- Issue date Dec 27, 1994
- IMM, Institut fur Mikrotechnik GmbH
- Wolfgang Ehrfeld
- G02 - OPTICS

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